Bidirectional Folding with Atomic Layer Deposition Bimorphs for Autonomous Micro-Origami

ORAL

Abstract


We present micron sized self-folding structures that consist of nanometer-thin, atomic layer deposited SiO2-Si3N4bilayers, built with conventional semiconductor fabrication methods. A bending response originating from strain differentials within these bilayer stacks is used as the fold actuation mechanism. This strain differential induced bending is controlled by ion exchange reactions in our nanoscale sheets, enabling us to produce radii of curvature at the order of microns within fractions of a second. By lithographically patterning these sheets and localizing the bending using flat photoresist panels, we create microscale origami devices that can sense chemical changes in their environment and respond by changing configurations according to prescribed mountain-valley fold patterns. Finally, we show that our fabrication approach offers a range of chemical, electrical and biological functions as well as a path to sequential folding through the programming of stacks.

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Presenters

  • Itai Cohen

    Department of Physics, Cornell University, Laboratory of Atomic and Solid State Physics, Cornell University, Physics, Cornell University, Department of Physics, LASSP, Cornell University, Physics Department, Cornell University, Cornell University

Authors

  • Itai Cohen

    Department of Physics, Cornell University, Laboratory of Atomic and Solid State Physics, Cornell University, Physics, Cornell University, Department of Physics, LASSP, Cornell University, Physics Department, Cornell University, Cornell University

  • Baris Bircan

    School of Applied and Engineering Physics, Cornell University, Physics, Cornell University

  • Marc Miskin

    Physics, Cornell University, Department of Physics, LASSP, Cornell University, Laboratory of Atomic and Solid State Physics, Cornell University

  • Robert J Lang

    Robert Lang Origami

  • Kyle J Dorsey

    School of Applied and Engineering Physics, Cornell University, Physics, Cornell University

  • Paul L McEuen

    Laboratory of Atomic and Solid State Physics, Cornell University, Physics, Cornell University, Department of Physics, LASSP, Cornell University, Physics Department, Cornell University, Cornell University