Atomic layer deposition for membranes, metamaterials, and machines

ORAL

Abstract

Ultra-thin films of inorganic materials are well-suited for fabrication of micron-scale actuators because they can sustain small radii of curvature, are compatible with semiconductor processing, and are chemically robust. We leverage atomic layer deposition (ALD) to produce free-standing mechanical devices with sub-5 nm film thicknesses. We fabricate cantilevers from ALD films to characterize the mechanical properties. We find that ALD films are elastic and exhibit a bending stiffness on the order of 10^-15 J. These measurements enable fabrication of cantilever springs with ultra-low spring constants suitable for micron-scale machinery. ALD mechanical metamaterials are fabricated by patterning of both the film and its substrate. Corrugations transferred into the ALD film enhance its bending stiffness and enable bending anisotropy, while cuts etched into the film soften the in-plane response. We integrate these results to produce magnetically actuated three-dimensional devices with applications in micromachinery.

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Presenters

  • Kyle J Dorsey

    School of Applied and Engineering Physics, Cornell University, Physics, Cornell University

Authors

  • Kyle J Dorsey

    School of Applied and Engineering Physics, Cornell University, Physics, Cornell University

  • Tanner G Pearson

    School of Applied and Engineering Physics, Cornell University

  • Edward P Esposito

    Laboratory of Atomic and Solid State Physics, Cornell University

  • Baris Bircan

    School of Applied and Engineering Physics, Cornell University, Physics, Cornell University

  • Yimo Han

    School of Applied and Engineering Physics, Cornell University, Applied and Engineering Physics, Cornell University

  • Sierra Russell

    Nanoscale Engineering, SUNY Polytechnic

  • David Anthony Muller

    School of Applied and Engineering Physics, Cornell University, Cornell University, Applied and Engineering Physics, Cornell University

  • Itai Cohen

    Department of Physics, Cornell University, Laboratory of Atomic and Solid State Physics, Cornell University, Physics, Cornell University, Department of Physics, LASSP, Cornell University, Physics Department, Cornell University, Cornell University

  • Paul L McEuen

    Laboratory of Atomic and Solid State Physics, Cornell University, Physics, Cornell University, Department of Physics, LASSP, Cornell University, Physics Department, Cornell University, Cornell University