Co-existing Nanostructures of Lamellae and Cylinders by A1BA2C Tetrablock Terpolymer

ORAL

Abstract

Nanopatterns with multiple shapes, such as lines and dots, in a single substrate are needed for the next-generation nanolithography. Here, we observed, via small-angle X-ray scattering (SAXS) and transmission electron microscopy (TEM), co-existing morphologies of lamellae and cylinders by careful control of volume fraction of each block in polystyrene-b-polyisoprene-b-polystyrene-b-poly(2-vinylpyridine) tetrablock terpolymer (S1IS2V). The PI cylinders are located inside PS lamellae, but close to the interface of PS/P2VP lamellae. The experimentally observed morphology is in good agreement with the predicted phase by self-consistent filed theory (SCFT). Finally, we obtained vertically oriented co-existing nanostructures on a substrate by using solvent vapor annealing (SVA) and confirmed the orientation of co-existing nanopattern by grazing-incidence small angle X-ray scattering (GI-SAXS) and atomic force microscopy (AFM).

*National Creative Research Initiative Program supported by the National Research Foundation of Korea (Grant No. 2022R1A3A3002149) funded by the Korean Government. National Natural Science Foundation of China (NSFC) (Grant No. 21925301).

Presenters

  • Hyeongkeon Yoon

    • Pohang Univ of Sci & Tech

Authors

  • Hyeongkeon Yoon

    • Pohang Univ of Sci & Tech
  • Qingshu Dong

    • Fudan University
  • Weihua Li

    • Fudan Univ
    • Fudan University