Investigation of growth mechanisms during the deposition and oxidation of Ir and Ru based thin films

ORAL

Abstract

The reliable growth of phase-pure platinum group metal thin films has been of recent interest due to the group’s tendencies toward high conductivity and corrosive resistance. Ir and Ru have been studied as favorable candidates for interconnects in microelectronics1 and catalytic materials for green hydrogen production.2 Several ruthenate and iridate oxides have also been studied for their unique magnetic and electrical properties.3 Film quality often dictates the performance of these materials and is controlled by the growth machanism and conditions of synthesis. In this work, we examined the thermodynamic driving forces underlying the synthesis of elemental Ir and Ru thin films grown by solid source metal-organic molecular beam epitaxy (SSMOMBE).4 In combination with experimental efforts, we aimed to understand the significance of these driving forces in governing metal (Ru, Ir) vs. oxide (RuO2, IrO2) formation during SSMOMBE growth. This work has the potential to be expanded to ternary systems of interest, which may further our understanding of the underlying driving forces governing film synthesis.



(1) Wen, L. G.; et. al., ACS Appl. Mater. Interfaces 2016, 8 (39), 26119–26125.

(2) Basińska, A.; et. al., React. Kinet. Catal. Lett. 2006, 89 (2), 319–324.

(3) Koster, G.; et. al., Rev. Mod. Phys. 2012, 84 (1), 253–298.

(4) Nair, S.; et. al., J. Vac. Sci. Technol. A 2023, 41 (6), 062701.

* Film growth and characterization was supported by the U.S. Department of Energy through No. DE-SC0020211. This work was supported by the UMN MRSEC program under Award No. DMR-2011401. Parts of this work were carried out at the Characterization Facility, University of Minnesota, which receives partial support from the National Science Foundation (NSF) through the MRSEC program under Award No. DMR-2011401. The authors acknowledge the Minnesota Supercomputing Institute (MSI) at the University of Minnesota for providing resources that contributed to the research results reported here.

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Publication: Nair, S.; Noordhoek, K.; Lee, D.; Bartel, C. J.; Jalan, B. Solid-Source Metal-Organic MBE for Elemental Ir and Ru Films. J. Vac. Sci. Technol. A 2023, 41 (6), 062701. https://doi.org/10.1116/6.0002955.

Presenters

  • Kyle Noordhoek

    University of Minnesota

Authors

  • Kyle Noordhoek

    University of Minnesota

  • Sreejith Thampan Nair

    University of Minnesota, Twin Cities

  • Dooyong Lee

    Kyungpook National University

  • Bharat Jalan

    University of Minnesota

  • Christopher Bartel

    University of Minnesota