Superconducting cobalt disilicide thin films for quantum information technolgy

In the past few decades, there has been tremendous progress in the field of superconducting quantum information technology. Nevertheless, scalability and decoherence are still major challenges that need to be overcome for these systems to be implemented on a large scale. One way to make progress on the field is by carefully engineering the materials and devices that constitute them. In this context, we report the synthesis of closely lattice matched superconducting cobalt disilicide thin films grown on low loss silicon (111) substrates using molecular beam epitaxy. We characterize the structure of the films using reflection high energy electron diffraction, atomic force microscopy and x-ray diffraction. We then study the superconductivity of the films by performing electrical transport measurements down to 50 mK. Finally, we explore the fabrication of distributed and lumped element resonator circuits and Josephson junctions based on Si fins which can be used in superconducting circuits and merged element transmon applications.