Reducing Losses in Transmon Qubits Using Fluorine-Based Etches

Superconducting qubits have developed from proof-of principle single-bit demonstrations to mature deployments of many-qubit quantum processors. Reducing materials- and processing-induced decoherence in superconducting qubit circuits is critical to further the development of large-scale quantum architectures. In this talk we discuss the results of applying selective fluorine-based etches, targeting lossy silicon oxides, in close proximity to sensitive aluminum circuit elements such as Josephson Junctions, resonators and crossover tethers. These fabrication improvements can be implemented with little to no damage to existing structures. The impact that these have on transmon qubit coherence will be discussed.