Investigating loss in NbN and NbTi resonators on high resistivity Si substrates

Developing low loss, magnetic field compatible superconducting microwave circuits opens the door to exploring novel systems in quantum computing and quantum sensing. Superconducting resonators with such properties can be fabricated using superconducting thin films with relatively high critical temperature (Tc) and high critical field (Bc). In this work, we study the superconducting coplanar waveguide resonators made from thin films of NbN and NbTi sputtered on silicon substrates. We conduct a systematic investigation on the effect of growth conditions, and film thickness on the internal quality factor and magnetic field compatibility of NbN and NbTi in order to study two level system losses and dissipation from vortices. We integrate these resonators with InAs-Gatemon qubits and study the performance in presence of magnetic fields.