Nanoscale postfabrication treatment for a wafer-scale precise qubits frequency control

Multiple-qubit quantum processors both with frequency tunable and fixed-frequency superconducting qubits require Josephson energy tunning after fabrication. Here, we propose a new method for precise control of superconducting qubit frequencies with nanoscale postfabrication treatment of Josephson junctions tunnel barriers, which can be beneficial for a wafer-scale quantum processors fabrication. We demonstrate the possibility to shift qubits frequency up to 30% with high accuracy and sub-1% chip-scale reproducibility of 100nm-scale Josephson junction normal resistance. Finally, we show non-degradation frequency trimming for transmon qubits with coherence time up to 300 us.