Wide Range Ceramic Metal-Alloy Thin Film Thermometers for High Magnetic Fields

Many thermal measurements in high magnetic fields require thermometers that are sensitive over a wide temperature range, are low mass, have a rapid thermal response, and have a minimal, easily correctable magnetoresistance. Here we report the development of a new granular-metal oxide ceramic composite (cermet) for this purpose formed by co-sputtering of the metallic alloy nichrome Ni0.8Cr0.2 and the insulator silcon dioxide SiO2. The resulting thin films are sensitive enough to be used from room temperature down to below 100 mK in magnetic fields up to at least 35 tesla. The maximum magnetic-field induced fractional error in temperature ΔT/T over this temperature range is 2%.