Integration of Boltzmann transport theory and Boltzmann statistics on gas sensor: from gas dynamics to electric transport

We integrate Boltzmann transport theory and Boltzmann statistics to be a unified theory of gas sensors for the correlation between gas adsorption/desorption and conductivity, which develops the reaction of gas sensor system from the dynamics of gas source to the changes of material electronic property. The integrated theory contains an airflow term and is compatible with the original theory. In this work, we demarcate different action zones for the gas adsorption system, and analyze the interaction between gas molecules and sensor surface to conduct theoretical derivation. In order to demonstrate the correction of our deduction and modified theory, we perform airflow experiment on SnO2 sensor with inert and oxidizing gas to verify the existence of flow behavior in the sensing response experiments, which was consistent with the trend predicted by the theoretical derivation. Based on the fact of this work, we confirm that the sensor response and result should consider the jet flow effect, which is beneficial for analyzing the effect of gas flow characteristics on the development of the room-temperature sensors and further eliminating doubts about whether fluid flow.