Radio frequency reflectometry measurements on industrial CMOS Double Quantum Dot using superconducting spiral inductor

Silicon spin qubits, with their long coherence time and compatibility with industrial CMOS technology, hold great promise for large-scale quantum computing. As the number of spin qubits per chip continues growing, building industrial compatible devices is required for the necessary level of scalability and reproducibility to reach fault-tolerant quantum computing. In addition, a method for spin readout that minimizes the footprint is essential to achieve a large-scale quantum processor. In this context we present a reflectometry measurements of a spin compatible double quantum dot fully fabricated in a 300 mm integrated process at the IMEC manufacturing facility.

Our reflectometry measurement uses a Nb superconducting spiral inductor, improving the quality factor of the tank circuit. Through an analysis of the reflected signal's amplitude and phase, we can discern crucial electronic properties of the quantum dots, including electronic temperature and tunneling rate, providing invaluable insights into their behavior and applications.



This research was undertaken thanks in part to funding from the Canada First Research Excellence Fund. We acknowledge the support of the Natural Sciences and Engineering Research Council of Canada (NSERC).