Investigation of the interface structure in sputtered WSi$_{2}$/Si multilayers by in-situ synchrotron X-ray scattering.

POSTER

Abstract

We report on the growth of WSi$_{2}$ and Si amorphous thin films by dc magnetron sputtering in a vacuum chamber with 10$^{-9}$ Torr base pressure. In-situ synchrotron X-ray scattering with high temporal resolution has been employed to probe the surface and interface roughness evolution during film deposition. X-ray reflectivity simulations were performed using the IMD software package. It is found that the structure of WSi$_{2}$/Si multilayers is with an alternately smooth and rough interface. The ion energy and flux assisting the growth may play a role in inducing this asymmetry in the interface roughness.

Authors

  • Yiping Wang

  • Hua Zhou

    Univ. of Massachusetts Amherst Physics Dept., Department of Physics and Astronomy, University of Maine, Orono, Maine 04469-5709, University of Vermont, National Synchrotron Light Source, Brookhaven National Laboratory, Physics Department, Boston University, Boston University, Department of Physics, Advanced Photon Source, Argonne National Laboratory, University of Vermont, Department of Physics

  • Hua Zhou

    Univ. of Massachusetts Amherst Physics Dept., Department of Physics and Astronomy, University of Maine, Orono, Maine 04469-5709, University of Vermont, National Synchrotron Light Source, Brookhaven National Laboratory, Physics Department, Boston University, Boston University, Department of Physics, Advanced Photon Source, Argonne National Laboratory, University of Vermont, Department of Physics

  • Hua Zhou

    Univ. of Massachusetts Amherst Physics Dept., Department of Physics and Astronomy, University of Maine, Orono, Maine 04469-5709, University of Vermont, National Synchrotron Light Source, Brookhaven National Laboratory, Physics Department, Boston University, Boston University, Department of Physics, Advanced Photon Source, Argonne National Laboratory, University of Vermont, Department of Physics

  • Hua Zhou

    Univ. of Massachusetts Amherst Physics Dept., Department of Physics and Astronomy, University of Maine, Orono, Maine 04469-5709, University of Vermont, National Synchrotron Light Source, Brookhaven National Laboratory, Physics Department, Boston University, Boston University, Department of Physics, Advanced Photon Source, Argonne National Laboratory, University of Vermont, Department of Physics

  • Hua Zhou

    Univ. of Massachusetts Amherst Physics Dept., Department of Physics and Astronomy, University of Maine, Orono, Maine 04469-5709, University of Vermont, National Synchrotron Light Source, Brookhaven National Laboratory, Physics Department, Boston University, Boston University, Department of Physics, Advanced Photon Source, Argonne National Laboratory, University of Vermont, Department of Physics

  • Hua Zhou

    Univ. of Massachusetts Amherst Physics Dept., Department of Physics and Astronomy, University of Maine, Orono, Maine 04469-5709, University of Vermont, National Synchrotron Light Source, Brookhaven National Laboratory, Physics Department, Boston University, Boston University, Department of Physics, Advanced Photon Source, Argonne National Laboratory, University of Vermont, Department of Physics