Soft Magnetic Films Made of Iron-Iron Oxide Core-Shell Nanocluster Impact for High Frequency Applications

ORAL

Abstract

High-frequency soft magnetic thin films, are increasingly in demand with rapid improvement and miniaturization in electromagnetic devices. To achieve high permeability in high frequency up to GHz, high resistivity, saturation magnetization and uniaxial anisotropy field are required. Accordingly, Fe/Ferrite core-shell nanocluster thin films are prepared at room temperature directly on the top of CMOS by novel energetic cluster impact. To avoid high-temperature field deposition or post-annealing, bias voltage up to 20 kV is applied to the oblique substrate to induce in-plane shape anisotropy. The high magnetic moment of Fe cores and the insulated Fe oxide shells jointly cause the combination of high saturation magnetization and high resistivity of the nanocluster thin films. Consequently, the thin films exhibit high permeabilities in up to 1.5 GHz, which are measured by a shorted transmission-line perturbation method. Moreover, the core fraction and the surface density are adjusted, which shows remarkable effects on the thin films' high-frequency permeabilities.

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Authors

  • Qi Yao

    Department of Physics, University of Idaho, Moscow, Idaho 83844-0903

  • Anthony Colaprete

    Triumf, Texas A\&M University, Tel Aviv University, TRIUMF, Simon Fraser University, Dept. of Physics, SFU, BC, Canada, Department of Physics and Astronomy, University of British Columbia, Cavendish Laboratory, University of Cambridge, Department of Physics, Simon Fraser University, University of British Columbia, University of Wisconsin-Madison, Brookhaven National Laboratory, Los Alamos National Laboratory, Department of Molecular Science and Technology, Ajou University, Suwon 443-749, Korea, Department of Physics, Oregon State University, Corvallis, OR 97331-6507, Imago Scientific Instruments Corp., Department of Physics, Simon Fraser University, 8888 University Dr., Burnaby, BC, V5A 1S6 Canada, Linfield College, PNNL, University of Washington, University of Victoria, IUPUI1, Wabash, IUPUI2, Environmental Biotechnology Institute, University of Idaho, Moscow ID 83843, Physics Department, University of Idaho, Moscow ID 83843, Environmental Biotechnology Institute, University of Idaho, Moscow, ID 83844, Physics Department, University of Idaho, Moscow, Idaho 83844, TRIUMF / UBC, 5CSNSM-IN2P3-CNRS, Universit\'e Paris 11, University of Manitoba, Texas A\&M, U. Manitoba, Tel Aviv U., U. British Columbia, Universidad de Pa\'is Vasco, Department of Physics, University of Idaho, Moscow, Idaho 83844-0903, University of Idaho, Boise State University, Idaho State University, NASA Ames Research Center

  • Anthony Colaprete

    Triumf, Texas A\&M University, Tel Aviv University, TRIUMF, Simon Fraser University, Dept. of Physics, SFU, BC, Canada, Department of Physics and Astronomy, University of British Columbia, Cavendish Laboratory, University of Cambridge, Department of Physics, Simon Fraser University, University of British Columbia, University of Wisconsin-Madison, Brookhaven National Laboratory, Los Alamos National Laboratory, Department of Molecular Science and Technology, Ajou University, Suwon 443-749, Korea, Department of Physics, Oregon State University, Corvallis, OR 97331-6507, Imago Scientific Instruments Corp., Department of Physics, Simon Fraser University, 8888 University Dr., Burnaby, BC, V5A 1S6 Canada, Linfield College, PNNL, University of Washington, University of Victoria, IUPUI1, Wabash, IUPUI2, Environmental Biotechnology Institute, University of Idaho, Moscow ID 83843, Physics Department, University of Idaho, Moscow ID 83843, Environmental Biotechnology Institute, University of Idaho, Moscow, ID 83844, Physics Department, University of Idaho, Moscow, Idaho 83844, TRIUMF / UBC, 5CSNSM-IN2P3-CNRS, Universit\'e Paris 11, University of Manitoba, Texas A\&M, U. Manitoba, Tel Aviv U., U. British Columbia, Universidad de Pa\'is Vasco, Department of Physics, University of Idaho, Moscow, Idaho 83844-0903, University of Idaho, Boise State University, Idaho State University, NASA Ames Research Center

  • Anthony Colaprete

    Triumf, Texas A\&M University, Tel Aviv University, TRIUMF, Simon Fraser University, Dept. of Physics, SFU, BC, Canada, Department of Physics and Astronomy, University of British Columbia, Cavendish Laboratory, University of Cambridge, Department of Physics, Simon Fraser University, University of British Columbia, University of Wisconsin-Madison, Brookhaven National Laboratory, Los Alamos National Laboratory, Department of Molecular Science and Technology, Ajou University, Suwon 443-749, Korea, Department of Physics, Oregon State University, Corvallis, OR 97331-6507, Imago Scientific Instruments Corp., Department of Physics, Simon Fraser University, 8888 University Dr., Burnaby, BC, V5A 1S6 Canada, Linfield College, PNNL, University of Washington, University of Victoria, IUPUI1, Wabash, IUPUI2, Environmental Biotechnology Institute, University of Idaho, Moscow ID 83843, Physics Department, University of Idaho, Moscow ID 83843, Environmental Biotechnology Institute, University of Idaho, Moscow, ID 83844, Physics Department, University of Idaho, Moscow, Idaho 83844, TRIUMF / UBC, 5CSNSM-IN2P3-CNRS, Universit\'e Paris 11, University of Manitoba, Texas A\&M, U. Manitoba, Tel Aviv U., U. British Columbia, Universidad de Pa\'is Vasco, Department of Physics, University of Idaho, Moscow, Idaho 83844-0903, University of Idaho, Boise State University, Idaho State University, NASA Ames Research Center