Elastically Strain-Relaxed GaAs/InGaAs/GaAs Heterostructures on GaAs(001)

ORAL

Abstract

Engineered substrates with surface regions having an in-plane lattice parameter different from that of available semiconductor wafers are of interest to extend the properties of semiconductor devices. This was achieved by bonding strain-relaxed GaAs/In$_{0.08}$Ga$_{0.92}$As/GaAs structures on GaAs(001) substrates. Pseudomorphic heterostructures having a lattice mismatch of 0.56{\%} were grown by metal-organic chemical vapor deposition (MOCVD) and patterned using conventional photolithography to define arrays of 10 or 20 micron square structures. A sacrificial AlAs layer was then removed by selective etching with HF. During etching, the strained structures relax elastically, without introducing misfit dislocations, and bond weakly in-place to the substrate. The degree of strain relaxation of the InGaAs layer is determined by the relative thickness of the GaAs and InGaAs layers in agreement with a force balance model.\footnote{G.M. Cohen, et al., App. Phys. Lett. \textbf{86}, 251902 (2005).} The bond was then strengthened by annealing at 400$^{\circ}$C for 2hrs, while stabilizing the surface with TBAs in the MOCVD reactor. The increase in the in-plane lattice parameter of the bonded structures compared to the GaAs substrate was 0.25-0.44{\%}.

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Authors

  • Anthony Colaprete

    Triumf, Texas A\&M University, Tel Aviv University, TRIUMF, Simon Fraser University, Dept. of Physics, SFU, BC, Canada, Department of Physics and Astronomy, University of British Columbia, Cavendish Laboratory, University of Cambridge, Department of Physics, Simon Fraser University, University of British Columbia, University of Wisconsin-Madison, Brookhaven National Laboratory, Los Alamos National Laboratory, Department of Molecular Science and Technology, Ajou University, Suwon 443-749, Korea, Department of Physics, Oregon State University, Corvallis, OR 97331-6507, Imago Scientific Instruments Corp., Department of Physics, Simon Fraser University, 8888 University Dr., Burnaby, BC, V5A 1S6 Canada, Linfield College, PNNL, University of Washington, University of Victoria, IUPUI1, Wabash, IUPUI2, Environmental Biotechnology Institute, University of Idaho, Moscow ID 83843, Physics Department, University of Idaho, Moscow ID 83843, Environmental Biotechnology Institute, University of Idaho, Moscow, ID 83844, Physics Department, University of Idaho, Moscow, Idaho 83844, TRIUMF / UBC, 5CSNSM-IN2P3-CNRS, Universit\'e Paris 11, University of Manitoba, Texas A\&M, U. Manitoba, Tel Aviv U., U. British Columbia, Universidad de Pa\'is Vasco, Department of Physics, University of Idaho, Moscow, Idaho 83844-0903, University of Idaho, Boise State University, Idaho State University, NASA Ames Research Center

  • Anthony Colaprete

    Triumf, Texas A\&M University, Tel Aviv University, TRIUMF, Simon Fraser University, Dept. of Physics, SFU, BC, Canada, Department of Physics and Astronomy, University of British Columbia, Cavendish Laboratory, University of Cambridge, Department of Physics, Simon Fraser University, University of British Columbia, University of Wisconsin-Madison, Brookhaven National Laboratory, Los Alamos National Laboratory, Department of Molecular Science and Technology, Ajou University, Suwon 443-749, Korea, Department of Physics, Oregon State University, Corvallis, OR 97331-6507, Imago Scientific Instruments Corp., Department of Physics, Simon Fraser University, 8888 University Dr., Burnaby, BC, V5A 1S6 Canada, Linfield College, PNNL, University of Washington, University of Victoria, IUPUI1, Wabash, IUPUI2, Environmental Biotechnology Institute, University of Idaho, Moscow ID 83843, Physics Department, University of Idaho, Moscow ID 83843, Environmental Biotechnology Institute, University of Idaho, Moscow, ID 83844, Physics Department, University of Idaho, Moscow, Idaho 83844, TRIUMF / UBC, 5CSNSM-IN2P3-CNRS, Universit\'e Paris 11, University of Manitoba, Texas A\&M, U. Manitoba, Tel Aviv U., U. British Columbia, Universidad de Pa\'is Vasco, Department of Physics, University of Idaho, Moscow, Idaho 83844-0903, University of Idaho, Boise State University, Idaho State University, NASA Ames Research Center

  • Anthony Colaprete

    Triumf, Texas A\&M University, Tel Aviv University, TRIUMF, Simon Fraser University, Dept. of Physics, SFU, BC, Canada, Department of Physics and Astronomy, University of British Columbia, Cavendish Laboratory, University of Cambridge, Department of Physics, Simon Fraser University, University of British Columbia, University of Wisconsin-Madison, Brookhaven National Laboratory, Los Alamos National Laboratory, Department of Molecular Science and Technology, Ajou University, Suwon 443-749, Korea, Department of Physics, Oregon State University, Corvallis, OR 97331-6507, Imago Scientific Instruments Corp., Department of Physics, Simon Fraser University, 8888 University Dr., Burnaby, BC, V5A 1S6 Canada, Linfield College, PNNL, University of Washington, University of Victoria, IUPUI1, Wabash, IUPUI2, Environmental Biotechnology Institute, University of Idaho, Moscow ID 83843, Physics Department, University of Idaho, Moscow ID 83843, Environmental Biotechnology Institute, University of Idaho, Moscow, ID 83844, Physics Department, University of Idaho, Moscow, Idaho 83844, TRIUMF / UBC, 5CSNSM-IN2P3-CNRS, Universit\'e Paris 11, University of Manitoba, Texas A\&M, U. Manitoba, Tel Aviv U., U. British Columbia, Universidad de Pa\'is Vasco, Department of Physics, University of Idaho, Moscow, Idaho 83844-0903, University of Idaho, Boise State University, Idaho State University, NASA Ames Research Center

  • Anthony Colaprete

    Triumf, Texas A\&M University, Tel Aviv University, TRIUMF, Simon Fraser University, Dept. of Physics, SFU, BC, Canada, Department of Physics and Astronomy, University of British Columbia, Cavendish Laboratory, University of Cambridge, Department of Physics, Simon Fraser University, University of British Columbia, University of Wisconsin-Madison, Brookhaven National Laboratory, Los Alamos National Laboratory, Department of Molecular Science and Technology, Ajou University, Suwon 443-749, Korea, Department of Physics, Oregon State University, Corvallis, OR 97331-6507, Imago Scientific Instruments Corp., Department of Physics, Simon Fraser University, 8888 University Dr., Burnaby, BC, V5A 1S6 Canada, Linfield College, PNNL, University of Washington, University of Victoria, IUPUI1, Wabash, IUPUI2, Environmental Biotechnology Institute, University of Idaho, Moscow ID 83843, Physics Department, University of Idaho, Moscow ID 83843, Environmental Biotechnology Institute, University of Idaho, Moscow, ID 83844, Physics Department, University of Idaho, Moscow, Idaho 83844, TRIUMF / UBC, 5CSNSM-IN2P3-CNRS, Universit\'e Paris 11, University of Manitoba, Texas A\&M, U. Manitoba, Tel Aviv U., U. British Columbia, Universidad de Pa\'is Vasco, Department of Physics, University of Idaho, Moscow, Idaho 83844-0903, University of Idaho, Boise State University, Idaho State University, NASA Ames Research Center

  • Anthony Colaprete

    Triumf, Texas A\&M University, Tel Aviv University, TRIUMF, Simon Fraser University, Dept. of Physics, SFU, BC, Canada, Department of Physics and Astronomy, University of British Columbia, Cavendish Laboratory, University of Cambridge, Department of Physics, Simon Fraser University, University of British Columbia, University of Wisconsin-Madison, Brookhaven National Laboratory, Los Alamos National Laboratory, Department of Molecular Science and Technology, Ajou University, Suwon 443-749, Korea, Department of Physics, Oregon State University, Corvallis, OR 97331-6507, Imago Scientific Instruments Corp., Department of Physics, Simon Fraser University, 8888 University Dr., Burnaby, BC, V5A 1S6 Canada, Linfield College, PNNL, University of Washington, University of Victoria, IUPUI1, Wabash, IUPUI2, Environmental Biotechnology Institute, University of Idaho, Moscow ID 83843, Physics Department, University of Idaho, Moscow ID 83843, Environmental Biotechnology Institute, University of Idaho, Moscow, ID 83844, Physics Department, University of Idaho, Moscow, Idaho 83844, TRIUMF / UBC, 5CSNSM-IN2P3-CNRS, Universit\'e Paris 11, University of Manitoba, Texas A\&M, U. Manitoba, Tel Aviv U., U. British Columbia, Universidad de Pa\'is Vasco, Department of Physics, University of Idaho, Moscow, Idaho 83844-0903, University of Idaho, Boise State University, Idaho State University, NASA Ames Research Center