Oxygen annealing effects on optical properties of ZnO and TiO nanocluster thin film

ORAL

Abstract

Thin films of zinc oxide (ZnO) and titanium oxides (TiO) were deposited on Si (100) substrate by third generation nanocluster source. Post deposition Oxygen Annealing (OA) effects were evaluated by X-Ray diffraction (XRD), Raman spectroscopy, and photoluminescence (PL). As deposited, diameter of ZnO nanoclusters $\sim $24 nm and ZnO OA nanoclusters $\sim $30 nm. As deposited TiO clusters $\sim $10 nm in diameter, and TiO OA cluster $\sim $20 nm. XRD shows increased crystal quality and improved ZnO c-axis crystal growth. XRD shows improved stoichiometric TiO$_{2}$ clusters and preferred anatase phase. Intensity of ZnO PL spectrum has temperature dependence from 10K to 300K. ZnO OA produces red-shifted PL peak, and there are no below-bandgap PL peaks. TiO has room temperature PL with UV peak $\sim $388 nm and visible peak $\sim $426 nm. ZnO OA nanoclusters show narrower, red shifted peak by $\sim $0.07eV compared to as deposited ZnO nanoclusters. This indicates increased average grain size and improved size homogeneity after annealing. This is confirmed by Raman spectra showing blue-shifted and narrower peak of the A1 (LO) phonon peak in ZnO OA sample. DOE-EPSCoR (DE-FG02-04ER46142) DOE-BES (DE-FG02-07ER46386).

Authors

  • Ryan Souza

    University of Idaho

  • Hui Che

    University of Idaho

  • Anthony Colaprete

    Triumf, Texas A\&M University, Tel Aviv University, TRIUMF, Simon Fraser University, Dept. of Physics, SFU, BC, Canada, Department of Physics and Astronomy, University of British Columbia, Cavendish Laboratory, University of Cambridge, Department of Physics, Simon Fraser University, University of British Columbia, University of Wisconsin-Madison, Brookhaven National Laboratory, Los Alamos National Laboratory, Department of Molecular Science and Technology, Ajou University, Suwon 443-749, Korea, Department of Physics, Oregon State University, Corvallis, OR 97331-6507, Imago Scientific Instruments Corp., Department of Physics, Simon Fraser University, 8888 University Dr., Burnaby, BC, V5A 1S6 Canada, Linfield College, PNNL, University of Washington, University of Victoria, IUPUI1, Wabash, IUPUI2, Environmental Biotechnology Institute, University of Idaho, Moscow ID 83843, Physics Department, University of Idaho, Moscow ID 83843, Environmental Biotechnology Institute, University of Idaho, Moscow, ID 83844, Physics Department, University of Idaho, Moscow, Idaho 83844, TRIUMF / UBC, 5CSNSM-IN2P3-CNRS, Universit\'e Paris 11, University of Manitoba, Texas A\&M, U. Manitoba, Tel Aviv U., U. British Columbia, Universidad de Pa\'is Vasco, Department of Physics, University of Idaho, Moscow, Idaho 83844-0903, University of Idaho, Boise State University, Idaho State University, NASA Ames Research Center

  • You Qiang

    University of Idaho

  • Rene Rodriguez

    Idaho State University

  • Anthony Colaprete

    Triumf, Texas A\&M University, Tel Aviv University, TRIUMF, Simon Fraser University, Dept. of Physics, SFU, BC, Canada, Department of Physics and Astronomy, University of British Columbia, Cavendish Laboratory, University of Cambridge, Department of Physics, Simon Fraser University, University of British Columbia, University of Wisconsin-Madison, Brookhaven National Laboratory, Los Alamos National Laboratory, Department of Molecular Science and Technology, Ajou University, Suwon 443-749, Korea, Department of Physics, Oregon State University, Corvallis, OR 97331-6507, Imago Scientific Instruments Corp., Department of Physics, Simon Fraser University, 8888 University Dr., Burnaby, BC, V5A 1S6 Canada, Linfield College, PNNL, University of Washington, University of Victoria, IUPUI1, Wabash, IUPUI2, Environmental Biotechnology Institute, University of Idaho, Moscow ID 83843, Physics Department, University of Idaho, Moscow ID 83843, Environmental Biotechnology Institute, University of Idaho, Moscow, ID 83844, Physics Department, University of Idaho, Moscow, Idaho 83844, TRIUMF / UBC, 5CSNSM-IN2P3-CNRS, Universit\'e Paris 11, University of Manitoba, Texas A\&M, U. Manitoba, Tel Aviv U., U. British Columbia, Universidad de Pa\'is Vasco, Department of Physics, University of Idaho, Moscow, Idaho 83844-0903, University of Idaho, Boise State University, Idaho State University, NASA Ames Research Center

  • Anthony Colaprete

    Triumf, Texas A\&M University, Tel Aviv University, TRIUMF, Simon Fraser University, Dept. of Physics, SFU, BC, Canada, Department of Physics and Astronomy, University of British Columbia, Cavendish Laboratory, University of Cambridge, Department of Physics, Simon Fraser University, University of British Columbia, University of Wisconsin-Madison, Brookhaven National Laboratory, Los Alamos National Laboratory, Department of Molecular Science and Technology, Ajou University, Suwon 443-749, Korea, Department of Physics, Oregon State University, Corvallis, OR 97331-6507, Imago Scientific Instruments Corp., Department of Physics, Simon Fraser University, 8888 University Dr., Burnaby, BC, V5A 1S6 Canada, Linfield College, PNNL, University of Washington, University of Victoria, IUPUI1, Wabash, IUPUI2, Environmental Biotechnology Institute, University of Idaho, Moscow ID 83843, Physics Department, University of Idaho, Moscow ID 83843, Environmental Biotechnology Institute, University of Idaho, Moscow, ID 83844, Physics Department, University of Idaho, Moscow, Idaho 83844, TRIUMF / UBC, 5CSNSM-IN2P3-CNRS, Universit\'e Paris 11, University of Manitoba, Texas A\&M, U. Manitoba, Tel Aviv U., U. British Columbia, Universidad de Pa\'is Vasco, Department of Physics, University of Idaho, Moscow, Idaho 83844-0903, University of Idaho, Boise State University, Idaho State University, NASA Ames Research Center

  • Dmitri Tenne

    Boise State University