Building and Testing a Photolithographic System
POSTER
Abstract
Photolithography is a technique used to deposit metals onto substrates in specific patterns. The process uses light to transfer geometric patterns onto a light sensitive photoresist on the surface of a substrate. We have built a low-cost, maskless photolithographic system assembled from a computer, a consumer projector, and a microscope. The photoresist is spun in a modified food processor and baked on a standard hot plate. Exposing the photoresist only takes a few minutes and allows for multiple runs on the same substrate in a short amount of time. Through multiple exposures, we can make features ranging from approximately 8 $\mu $m to 785 $\mu $m, which is especially useful when making contacts using the large features.
Authors
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Kyel Lambert
Linfield College
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A. Knecht
Oregon State University, University of Idaho, Department of Chemistry, Oregon State University, Corvallis, OR, School of EECS, Oregon State University, Corvallis, OR, National Renewable Energy Laboratory, Golden, CO, Oregon Health and Science University, Linfield College, Purdue University, National Institute of Standards and Technology, Montana State University, University of British Columbia, University of Washington, Cornell University, Philipps-University, 35032 Marburg, Germany, University of Arizona, Tucson, Arizona 85721, Oregon State University, Corvallis, OR 97331, Physics Department, SUNY Binghamton, Physics Department, Oregon State University, Argonne National Laboratory