Thermal conductivity measurements of amorphous metal thin films via the 3$\omega$ method

POSTER

Abstract

Amorphous multicomponent metals have promising applications in novel electronic devices because of their atomically smooth surface morphology and lack of grain boundaries. It is important to understand the thermal transport properties of amorphous metals and an accurate measurement of their thermal conductivity will be essential for further improvement of device performance and reliability. Here, the 3$\omega$ method has been improved and extended to investigate the room temperature thermal conductivity of amorphous metals. Iterative, amorphous multicomponent metallic films are deposited on silicon substrate by magnetron sputter deposition. A thin layer of hafnium oxide film is deposited on top of amorphous metals by atomic layer deposition, providing a reliable insulation between an aluminum heater and the amorphous metal film. The room temperature thermal conductivities of thin-film hafnium oxide and silicon nitride are also measured to demonstrate the capability and reliability of the 3$\omega$ technique.

Authors

  • Kai Zhan

    Department of Physics, Oregon State University

  • William H. Dowd

    Oregon State University, University of Washington, University of Hong Kong, University of Tennessee, Oak Ridge National Laboratory, University of British Columbia, Univ of Washington, Univ of Cambridge, Michigan State University, Universit\'e de Caen, Argonne National Laboratory, Texas A\&M University -Commerce, Texas A\&M University, Department of Physics, University of Idaho, Moscow, Idaho 83844, USA, Universidad de Salamanca, E-37008 Salamanca, Spain, Department of Physics, Florida State University, Tallahassee, Florida 32306, USA, University of Cambridge, Institute of Astronomy, University of Cambridge, Canadian Institute for Theoretical Astrophysics, University of Toronto, Seoul National University, Chungnam National University, Department of Physics, Oregon State University, TRIUMF, Roosevelt High School, Department of Physics, University of Washington, Oregon State Department of Chemistry, Oregon State School of Electrical Engineering and Computer Science, Oregon State Department of Physics, University of Idaho, Lawrence Livermore National Laboratory, Idaho National Laboratory, Pacific Northwest National Laboratory, Carnegie Institution of Washington, Department of Chemistry, Oregon State University, School of Electrical Engineering and Computer Science, Oregon State University, Washington State University, Harvard University, Idaho Accelerator Center, Idaho Accelerator Center, Idaho State University, 1500 Alvin Ricken drive, Pocatello, ID 83201, USA, CENPA, University of Washington, Physics Division, ANL, NSCL, Michigan State University, Division, ANL, LPC, CAEN, France, Paul Scherrer Institute, US Geological Survey, 12201 Sunrise Valley Drive, Reston, VA, 20192, USA, University of Calgary Department of Physics and Astronomy, University of Calgary Department of Geoscience, None, University of the Fraser Valley, Univ of California, Berkeley, Simon Fraser University, Los Alamos Natl. Lab., University of Science and Technology of China, Hefei, U of Washington, Georgia Institute of Technology, Washington State Univ, National Institute of Standards and Technology and University of Maryland, American University

  • William H. Dowd

    Oregon State University, University of Washington, University of Hong Kong, University of Tennessee, Oak Ridge National Laboratory, University of British Columbia, Univ of Washington, Univ of Cambridge, Michigan State University, Universit\'e de Caen, Argonne National Laboratory, Texas A\&M University -Commerce, Texas A\&M University, Department of Physics, University of Idaho, Moscow, Idaho 83844, USA, Universidad de Salamanca, E-37008 Salamanca, Spain, Department of Physics, Florida State University, Tallahassee, Florida 32306, USA, University of Cambridge, Institute of Astronomy, University of Cambridge, Canadian Institute for Theoretical Astrophysics, University of Toronto, Seoul National University, Chungnam National University, Department of Physics, Oregon State University, TRIUMF, Roosevelt High School, Department of Physics, University of Washington, Oregon State Department of Chemistry, Oregon State School of Electrical Engineering and Computer Science, Oregon State Department of Physics, University of Idaho, Lawrence Livermore National Laboratory, Idaho National Laboratory, Pacific Northwest National Laboratory, Carnegie Institution of Washington, Department of Chemistry, Oregon State University, School of Electrical Engineering and Computer Science, Oregon State University, Washington State University, Harvard University, Idaho Accelerator Center, Idaho Accelerator Center, Idaho State University, 1500 Alvin Ricken drive, Pocatello, ID 83201, USA, CENPA, University of Washington, Physics Division, ANL, NSCL, Michigan State University, Division, ANL, LPC, CAEN, France, Paul Scherrer Institute, US Geological Survey, 12201 Sunrise Valley Drive, Reston, VA, 20192, USA, University of Calgary Department of Physics and Astronomy, University of Calgary Department of Geoscience, None, University of the Fraser Valley, Univ of California, Berkeley, Simon Fraser University, Los Alamos Natl. Lab., University of Science and Technology of China, Hefei, U of Washington, Georgia Institute of Technology, Washington State Univ, National Institute of Standards and Technology and University of Maryland, American University

  • William H. Dowd

    Oregon State University, University of Washington, University of Hong Kong, University of Tennessee, Oak Ridge National Laboratory, University of British Columbia, Univ of Washington, Univ of Cambridge, Michigan State University, Universit\'e de Caen, Argonne National Laboratory, Texas A\&M University -Commerce, Texas A\&M University, Department of Physics, University of Idaho, Moscow, Idaho 83844, USA, Universidad de Salamanca, E-37008 Salamanca, Spain, Department of Physics, Florida State University, Tallahassee, Florida 32306, USA, University of Cambridge, Institute of Astronomy, University of Cambridge, Canadian Institute for Theoretical Astrophysics, University of Toronto, Seoul National University, Chungnam National University, Department of Physics, Oregon State University, TRIUMF, Roosevelt High School, Department of Physics, University of Washington, Oregon State Department of Chemistry, Oregon State School of Electrical Engineering and Computer Science, Oregon State Department of Physics, University of Idaho, Lawrence Livermore National Laboratory, Idaho National Laboratory, Pacific Northwest National Laboratory, Carnegie Institution of Washington, Department of Chemistry, Oregon State University, School of Electrical Engineering and Computer Science, Oregon State University, Washington State University, Harvard University, Idaho Accelerator Center, Idaho Accelerator Center, Idaho State University, 1500 Alvin Ricken drive, Pocatello, ID 83201, USA, CENPA, University of Washington, Physics Division, ANL, NSCL, Michigan State University, Division, ANL, LPC, CAEN, France, Paul Scherrer Institute, US Geological Survey, 12201 Sunrise Valley Drive, Reston, VA, 20192, USA, University of Calgary Department of Physics and Astronomy, University of Calgary Department of Geoscience, None, University of the Fraser Valley, Univ of California, Berkeley, Simon Fraser University, Los Alamos Natl. Lab., University of Science and Technology of China, Hefei, U of Washington, Georgia Institute of Technology, Washington State Univ, National Institute of Standards and Technology and University of Maryland, American University

  • William H. Dowd

    Oregon State University, University of Washington, University of Hong Kong, University of Tennessee, Oak Ridge National Laboratory, University of British Columbia, Univ of Washington, Univ of Cambridge, Michigan State University, Universit\'e de Caen, Argonne National Laboratory, Texas A\&M University -Commerce, Texas A\&M University, Department of Physics, University of Idaho, Moscow, Idaho 83844, USA, Universidad de Salamanca, E-37008 Salamanca, Spain, Department of Physics, Florida State University, Tallahassee, Florida 32306, USA, University of Cambridge, Institute of Astronomy, University of Cambridge, Canadian Institute for Theoretical Astrophysics, University of Toronto, Seoul National University, Chungnam National University, Department of Physics, Oregon State University, TRIUMF, Roosevelt High School, Department of Physics, University of Washington, Oregon State Department of Chemistry, Oregon State School of Electrical Engineering and Computer Science, Oregon State Department of Physics, University of Idaho, Lawrence Livermore National Laboratory, Idaho National Laboratory, Pacific Northwest National Laboratory, Carnegie Institution of Washington, Department of Chemistry, Oregon State University, School of Electrical Engineering and Computer Science, Oregon State University, Washington State University, Harvard University, Idaho Accelerator Center, Idaho Accelerator Center, Idaho State University, 1500 Alvin Ricken drive, Pocatello, ID 83201, USA, CENPA, University of Washington, Physics Division, ANL, NSCL, Michigan State University, Division, ANL, LPC, CAEN, France, Paul Scherrer Institute, US Geological Survey, 12201 Sunrise Valley Drive, Reston, VA, 20192, USA, University of Calgary Department of Physics and Astronomy, University of Calgary Department of Geoscience, None, University of the Fraser Valley, Univ of California, Berkeley, Simon Fraser University, Los Alamos Natl. Lab., University of Science and Technology of China, Hefei, U of Washington, Georgia Institute of Technology, Washington State Univ, National Institute of Standards and Technology and University of Maryland, American University

  • William H. Dowd

    Oregon State University, University of Washington, University of Hong Kong, University of Tennessee, Oak Ridge National Laboratory, University of British Columbia, Univ of Washington, Univ of Cambridge, Michigan State University, Universit\'e de Caen, Argonne National Laboratory, Texas A\&M University -Commerce, Texas A\&M University, Department of Physics, University of Idaho, Moscow, Idaho 83844, USA, Universidad de Salamanca, E-37008 Salamanca, Spain, Department of Physics, Florida State University, Tallahassee, Florida 32306, USA, University of Cambridge, Institute of Astronomy, University of Cambridge, Canadian Institute for Theoretical Astrophysics, University of Toronto, Seoul National University, Chungnam National University, Department of Physics, Oregon State University, TRIUMF, Roosevelt High School, Department of Physics, University of Washington, Oregon State Department of Chemistry, Oregon State School of Electrical Engineering and Computer Science, Oregon State Department of Physics, University of Idaho, Lawrence Livermore National Laboratory, Idaho National Laboratory, Pacific Northwest National Laboratory, Carnegie Institution of Washington, Department of Chemistry, Oregon State University, School of Electrical Engineering and Computer Science, Oregon State University, Washington State University, Harvard University, Idaho Accelerator Center, Idaho Accelerator Center, Idaho State University, 1500 Alvin Ricken drive, Pocatello, ID 83201, USA, CENPA, University of Washington, Physics Division, ANL, NSCL, Michigan State University, Division, ANL, LPC, CAEN, France, Paul Scherrer Institute, US Geological Survey, 12201 Sunrise Valley Drive, Reston, VA, 20192, USA, University of Calgary Department of Physics and Astronomy, University of Calgary Department of Geoscience, None, University of the Fraser Valley, Univ of California, Berkeley, Simon Fraser University, Los Alamos Natl. Lab., University of Science and Technology of China, Hefei, U of Washington, Georgia Institute of Technology, Washington State Univ, National Institute of Standards and Technology and University of Maryland, American University