Band Gap and Phase Stability in (Al$_{\mathrm{x}}$Ga$_{\mathrm{1-x}})_{2}$O$_{3}$ Alloy Films

POSTER

Abstract

Gallium oxide is a transparent semiconductor (E$_{\mathrm{g}}=$ 4.8 eV) that exhibits n-type conductivity; it has been proposed for a variety of uses ranging from ``solar-blind'' conductive coatings to chemical sensing. An intriguing possibility is development of transparent, high power transistors based on carrier accumulation at an epitaxial Ga$_{2}$O$_{3}$--(Al$_{\mathrm{x}}$Ga$_{\mathrm{1-x}})_{2}$O$_{3}$ alloy interface. Using pulsed laser deposition, composition-spread (Al$_{\mathrm{x}}$Ga$_{\mathrm{1-x}})_{2}$O$_{3}$ thin films were fabricated on sapphire and silicon substrates, with $x$ varying smoothly across the surface. Position-dependent X-ray diffraction revealed [-201]-oriented Ga$_{2}$O$_{3}$ on c-plane sapphire, and unoriented Ga$_{2}$O$_{3}$ on silicon with native oxide. Alloy (Al$_{\mathrm{x}}$Ga$_{\mathrm{1-x}})_{2}$O$_{3}$ films on sapphire remain in the $\beta $-Ga$_{2}$O$_{3}$ phase for $x$ \textless 0.30 then relax to the $\alpha $-Al$_{2}$O$_{3}$ phase, whereas films on silicon remain in the $\beta $-Ga$_{2}$O$_{3}$ phase for $x $\textless 0.35 and then relax into the cubic $\gamma $-Al$_{2}$O$_{3}$ phase. Photoemission spectroscopy shows core and valence levels shifting to higher binding energy and decreasing work function, while spectroscopic ellipsometry reveals the absorption edge moving to higher photon energy, consistent with a widening band gap.

Authors

  • Benjamin Krueger

    Univ of Washington

  • William H. Dowd

    Oregon State University, University of Washington, University of Hong Kong, University of Tennessee, Oak Ridge National Laboratory, University of British Columbia, Univ of Washington, Univ of Cambridge, Michigan State University, Universit\'e de Caen, Argonne National Laboratory, Texas A\&M University -Commerce, Texas A\&M University, Department of Physics, University of Idaho, Moscow, Idaho 83844, USA, Universidad de Salamanca, E-37008 Salamanca, Spain, Department of Physics, Florida State University, Tallahassee, Florida 32306, USA, University of Cambridge, Institute of Astronomy, University of Cambridge, Canadian Institute for Theoretical Astrophysics, University of Toronto, Seoul National University, Chungnam National University, Department of Physics, Oregon State University, TRIUMF, Roosevelt High School, Department of Physics, University of Washington, Oregon State Department of Chemistry, Oregon State School of Electrical Engineering and Computer Science, Oregon State Department of Physics, University of Idaho, Lawrence Livermore National Laboratory, Idaho National Laboratory, Pacific Northwest National Laboratory, Carnegie Institution of Washington, Department of Chemistry, Oregon State University, School of Electrical Engineering and Computer Science, Oregon State University, Washington State University, Harvard University, Idaho Accelerator Center, Idaho Accelerator Center, Idaho State University, 1500 Alvin Ricken drive, Pocatello, ID 83201, USA, CENPA, University of Washington, Physics Division, ANL, NSCL, Michigan State University, Division, ANL, LPC, CAEN, France, Paul Scherrer Institute, US Geological Survey, 12201 Sunrise Valley Drive, Reston, VA, 20192, USA, University of Calgary Department of Physics and Astronomy, University of Calgary Department of Geoscience, None, University of the Fraser Valley, Univ of California, Berkeley, Simon Fraser University, Los Alamos Natl. Lab., University of Science and Technology of China, Hefei, U of Washington, Georgia Institute of Technology, Washington State Univ, National Institute of Standards and Technology and University of Maryland, American University

  • William H. Dowd

    Oregon State University, University of Washington, University of Hong Kong, University of Tennessee, Oak Ridge National Laboratory, University of British Columbia, Univ of Washington, Univ of Cambridge, Michigan State University, Universit\'e de Caen, Argonne National Laboratory, Texas A\&M University -Commerce, Texas A\&M University, Department of Physics, University of Idaho, Moscow, Idaho 83844, USA, Universidad de Salamanca, E-37008 Salamanca, Spain, Department of Physics, Florida State University, Tallahassee, Florida 32306, USA, University of Cambridge, Institute of Astronomy, University of Cambridge, Canadian Institute for Theoretical Astrophysics, University of Toronto, Seoul National University, Chungnam National University, Department of Physics, Oregon State University, TRIUMF, Roosevelt High School, Department of Physics, University of Washington, Oregon State Department of Chemistry, Oregon State School of Electrical Engineering and Computer Science, Oregon State Department of Physics, University of Idaho, Lawrence Livermore National Laboratory, Idaho National Laboratory, Pacific Northwest National Laboratory, Carnegie Institution of Washington, Department of Chemistry, Oregon State University, School of Electrical Engineering and Computer Science, Oregon State University, Washington State University, Harvard University, Idaho Accelerator Center, Idaho Accelerator Center, Idaho State University, 1500 Alvin Ricken drive, Pocatello, ID 83201, USA, CENPA, University of Washington, Physics Division, ANL, NSCL, Michigan State University, Division, ANL, LPC, CAEN, France, Paul Scherrer Institute, US Geological Survey, 12201 Sunrise Valley Drive, Reston, VA, 20192, USA, University of Calgary Department of Physics and Astronomy, University of Calgary Department of Geoscience, None, University of the Fraser Valley, Univ of California, Berkeley, Simon Fraser University, Los Alamos Natl. Lab., University of Science and Technology of China, Hefei, U of Washington, Georgia Institute of Technology, Washington State Univ, National Institute of Standards and Technology and University of Maryland, American University

  • William H. Dowd

    Oregon State University, University of Washington, University of Hong Kong, University of Tennessee, Oak Ridge National Laboratory, University of British Columbia, Univ of Washington, Univ of Cambridge, Michigan State University, Universit\'e de Caen, Argonne National Laboratory, Texas A\&M University -Commerce, Texas A\&M University, Department of Physics, University of Idaho, Moscow, Idaho 83844, USA, Universidad de Salamanca, E-37008 Salamanca, Spain, Department of Physics, Florida State University, Tallahassee, Florida 32306, USA, University of Cambridge, Institute of Astronomy, University of Cambridge, Canadian Institute for Theoretical Astrophysics, University of Toronto, Seoul National University, Chungnam National University, Department of Physics, Oregon State University, TRIUMF, Roosevelt High School, Department of Physics, University of Washington, Oregon State Department of Chemistry, Oregon State School of Electrical Engineering and Computer Science, Oregon State Department of Physics, University of Idaho, Lawrence Livermore National Laboratory, Idaho National Laboratory, Pacific Northwest National Laboratory, Carnegie Institution of Washington, Department of Chemistry, Oregon State University, School of Electrical Engineering and Computer Science, Oregon State University, Washington State University, Harvard University, Idaho Accelerator Center, Idaho Accelerator Center, Idaho State University, 1500 Alvin Ricken drive, Pocatello, ID 83201, USA, CENPA, University of Washington, Physics Division, ANL, NSCL, Michigan State University, Division, ANL, LPC, CAEN, France, Paul Scherrer Institute, US Geological Survey, 12201 Sunrise Valley Drive, Reston, VA, 20192, USA, University of Calgary Department of Physics and Astronomy, University of Calgary Department of Geoscience, None, University of the Fraser Valley, Univ of California, Berkeley, Simon Fraser University, Los Alamos Natl. Lab., University of Science and Technology of China, Hefei, U of Washington, Georgia Institute of Technology, Washington State Univ, National Institute of Standards and Technology and University of Maryland, American University