Structure of Copolymer Films Created by Plasma Enhanced Chemical Vapor Deposition (PECVD)

ORAL

Abstract

The structures of substrate/layer and layer/air interfaces in copolymer films made using plasma enhanced chemical vapor deposition (PECVD) have been probed for the first time using x-ray reflectivity (XR). Both XR and atomic force microscopy (AFM) measurements revealed extremely smooth surfaces for copolymer films made from comonomers benzene and octafluorocylcobutane (B-OFCB) and from comonomers hexamethyldisiloxane and octafluorocylcobutane (HMDS-OFCB). The surface roughnesses range from 2.5 to 9.5 {\AA} for both B-OFCB and HMDS-OFCB films. HMDS-OFCB copolymer films and B-OFCB copolymer films deposited on Si substrates are characterized by a uniform scattering length density throughout the film thickness. The XR measurements also reveal that one can tune the refractive index by varying the monomer feed ratio in the copolymer films.

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Authors

  • Someshwara Peri

  • Hyeonjae Kim

    NASA Johnson Space Center, Ursinus College, Purdue University Calumet, University of Notre Dame, GSI, Germany, Florida State University, Ohio Wesleyan University, Department of Physics, The University of Akron, Physics Department, Cleveland State University, Wright State University, Cornell University, Johannes Gutenberg Universit{\"a}t Mainz, Brookhaven National Laboratory, Miami University, Case Western Reserve University, Harvey Mudd College, Univ. Akron, Dept. of Geology and Physics, Lock Haven University of Pennsylvania, The University of Akron

  • Hyeonjae Kim

    NASA Johnson Space Center, Ursinus College, Purdue University Calumet, University of Notre Dame, GSI, Germany, Florida State University, Ohio Wesleyan University, Department of Physics, The University of Akron, Physics Department, Cleveland State University, Wright State University, Cornell University, Johannes Gutenberg Universit{\"a}t Mainz, Brookhaven National Laboratory, Miami University, Case Western Reserve University, Harvey Mudd College, Univ. Akron, Dept. of Geology and Physics, Lock Haven University of Pennsylvania, The University of Akron