Fabrication of a Photonic Band Gap (PBG) Wavelength Demultiplexing Device

ORAL

Abstract

We successfully modeled a two and three channel wavelength demultiplexer based on photonic band gap crystals,\footnote{M.Y Tekeste and J.M.Yarrison-Rice, \textit{Opt. Exp}. \textbf{14}, 7931-7942 (2006).} assembled the optical characterization setup and initialized the device fabrication process. This PBG device is being fabricated in a 200 nm thick Si$_{3}$N$_{4}$ core planar waveguide on SiO$_{2}$ cladding layer using air pores with 150 nm diameter and 213 nm pitches. Fabrication steps include Cr wet etching after PMMA e-beam exposure, and final plasma etching of airpores in Si$_{3}$N$_{4}$. To date we have successfully exposed the device pattern with e-beam lithography and obtained airpores and coupling cavities within specification. After wet etching the Cr, AFM results are presented in which we study the hard Cr mask which will be used for plasma etching of final device.

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Authors

  • Siwei Cao

    Miami University

  • William H. Rauckhorst

    Gothenburg University, Denison University, Bowling Green State University, NASA Glenn Research Center, Ohio Wesleyan University, Nitronex Corporation, 2305 Presidential Drive, Durham, NC, AFRL/MLPS, Wright-Patterson AFB, OH, Miami University, Ursinus College, Purdue University Calumet, GSI, Florida State University, Carnegie Mellon University, Dept. of Health Sciences, Cleveland State University, Physics Dept., Cleveland State University, University of Rochester, OMI College of Applied Science, University of Cincinnati, Davis and Elkins College, WV, Schlumberger-Doll, Korea Institute of Science and Technology, University of Cincinnati, Lock Haven University of Pennsylvania, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6372, Albion College, Albion, MI 49224, University of Toledo, Toledo, OH 43606, Youngstown State University, Joint Institute for Nuclear Research (Dubna), Naval Research Laboratory, ManTech SRS Technologies, Inc., Ecopulse, Inc., Army Research Laboratory, University of Surrey, The Ohio State University, Univ. Akron, Owens Community College, Toledo, OH

  • Jan Yarrison-Rice

    Miami University