A Method to Optimize Transport Properties of AlGaN/GaN on Silicon

POSTER

Abstract

We report on a study to investigate the impact of a thin AlN interlayer on the transport properties of AlGaN/GaN heterostructures grown by MOCVD on silicon substrates. Hall and Shubnikov-de Haas (SdH) measurements were used to compare the transport parameters of the conventional, AlGaN/GaN, structure to those of an AlGaN/AlN/GaN. The results clearly indicate that the interlayer leads to an enhancement of both the mobility and the carrier density. At 300 K, the carrier density and mobility for the conventional structure were roughly 8.57x10$^{12}$ cm$^{-2}$ and 1523 cm$^{2}$/Vs, respectively. For the structure containing the AlN interlayer these numbers were 10.03 x 10$^{12}$ cm$^{-2}$ and 1937 cm$^{2}$/Vs respectively. While the carrier density remained relatively unchanged down to 10 K, the mobility for the modified structure increased substantially. Shubnikov-de Haas measurements confirmed the presence of a high quality 2DEG in both structures. However, the amplitudes of the SdH oscillations in the conventional structure were higher.

Authors

  • J.D. Daniel

    Physics, University of Dayton

  • S. Elhamri

    Physics, University of Dayton

  • Rex Berney

    Physics, University of Dayton

  • Mo Ahoujja

    Physics, University of Dayton

  • William H. Rauckhorst

    Gothenburg University, Denison University, Bowling Green State University, NASA Glenn Research Center, Ohio Wesleyan University, Nitronex Corporation, 2305 Presidential Drive, Durham, NC, AFRL/MLPS, Wright-Patterson AFB, OH, Miami University, Ursinus College, Purdue University Calumet, GSI, Florida State University, Carnegie Mellon University, Dept. of Health Sciences, Cleveland State University, Physics Dept., Cleveland State University, University of Rochester, OMI College of Applied Science, University of Cincinnati, Davis and Elkins College, WV, Schlumberger-Doll, Korea Institute of Science and Technology, University of Cincinnati, Lock Haven University of Pennsylvania, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6372, Albion College, Albion, MI 49224, University of Toledo, Toledo, OH 43606, Youngstown State University, Joint Institute for Nuclear Research (Dubna), Naval Research Laboratory, ManTech SRS Technologies, Inc., Ecopulse, Inc., Army Research Laboratory, University of Surrey, The Ohio State University, Univ. Akron, Owens Community College, Toledo, OH

  • William H. Rauckhorst

    Gothenburg University, Denison University, Bowling Green State University, NASA Glenn Research Center, Ohio Wesleyan University, Nitronex Corporation, 2305 Presidential Drive, Durham, NC, AFRL/MLPS, Wright-Patterson AFB, OH, Miami University, Ursinus College, Purdue University Calumet, GSI, Florida State University, Carnegie Mellon University, Dept. of Health Sciences, Cleveland State University, Physics Dept., Cleveland State University, University of Rochester, OMI College of Applied Science, University of Cincinnati, Davis and Elkins College, WV, Schlumberger-Doll, Korea Institute of Science and Technology, University of Cincinnati, Lock Haven University of Pennsylvania, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6372, Albion College, Albion, MI 49224, University of Toledo, Toledo, OH 43606, Youngstown State University, Joint Institute for Nuclear Research (Dubna), Naval Research Laboratory, ManTech SRS Technologies, Inc., Ecopulse, Inc., Army Research Laboratory, University of Surrey, The Ohio State University, Univ. Akron, Owens Community College, Toledo, OH

  • William H. Rauckhorst

    Gothenburg University, Denison University, Bowling Green State University, NASA Glenn Research Center, Ohio Wesleyan University, Nitronex Corporation, 2305 Presidential Drive, Durham, NC, AFRL/MLPS, Wright-Patterson AFB, OH, Miami University, Ursinus College, Purdue University Calumet, GSI, Florida State University, Carnegie Mellon University, Dept. of Health Sciences, Cleveland State University, Physics Dept., Cleveland State University, University of Rochester, OMI College of Applied Science, University of Cincinnati, Davis and Elkins College, WV, Schlumberger-Doll, Korea Institute of Science and Technology, University of Cincinnati, Lock Haven University of Pennsylvania, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6372, Albion College, Albion, MI 49224, University of Toledo, Toledo, OH 43606, Youngstown State University, Joint Institute for Nuclear Research (Dubna), Naval Research Laboratory, ManTech SRS Technologies, Inc., Ecopulse, Inc., Army Research Laboratory, University of Surrey, The Ohio State University, Univ. Akron, Owens Community College, Toledo, OH

  • William H. Rauckhorst

    Gothenburg University, Denison University, Bowling Green State University, NASA Glenn Research Center, Ohio Wesleyan University, Nitronex Corporation, 2305 Presidential Drive, Durham, NC, AFRL/MLPS, Wright-Patterson AFB, OH, Miami University, Ursinus College, Purdue University Calumet, GSI, Florida State University, Carnegie Mellon University, Dept. of Health Sciences, Cleveland State University, Physics Dept., Cleveland State University, University of Rochester, OMI College of Applied Science, University of Cincinnati, Davis and Elkins College, WV, Schlumberger-Doll, Korea Institute of Science and Technology, University of Cincinnati, Lock Haven University of Pennsylvania, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6372, Albion College, Albion, MI 49224, University of Toledo, Toledo, OH 43606, Youngstown State University, Joint Institute for Nuclear Research (Dubna), Naval Research Laboratory, ManTech SRS Technologies, Inc., Ecopulse, Inc., Army Research Laboratory, University of Surrey, The Ohio State University, Univ. Akron, Owens Community College, Toledo, OH

  • William H. Rauckhorst

    Gothenburg University, Denison University, Bowling Green State University, NASA Glenn Research Center, Ohio Wesleyan University, Nitronex Corporation, 2305 Presidential Drive, Durham, NC, AFRL/MLPS, Wright-Patterson AFB, OH, Miami University, Ursinus College, Purdue University Calumet, GSI, Florida State University, Carnegie Mellon University, Dept. of Health Sciences, Cleveland State University, Physics Dept., Cleveland State University, University of Rochester, OMI College of Applied Science, University of Cincinnati, Davis and Elkins College, WV, Schlumberger-Doll, Korea Institute of Science and Technology, University of Cincinnati, Lock Haven University of Pennsylvania, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6372, Albion College, Albion, MI 49224, University of Toledo, Toledo, OH 43606, Youngstown State University, Joint Institute for Nuclear Research (Dubna), Naval Research Laboratory, ManTech SRS Technologies, Inc., Ecopulse, Inc., Army Research Laboratory, University of Surrey, The Ohio State University, Univ. Akron, Owens Community College, Toledo, OH

  • William H. Rauckhorst

    Gothenburg University, Denison University, Bowling Green State University, NASA Glenn Research Center, Ohio Wesleyan University, Nitronex Corporation, 2305 Presidential Drive, Durham, NC, AFRL/MLPS, Wright-Patterson AFB, OH, Miami University, Ursinus College, Purdue University Calumet, GSI, Florida State University, Carnegie Mellon University, Dept. of Health Sciences, Cleveland State University, Physics Dept., Cleveland State University, University of Rochester, OMI College of Applied Science, University of Cincinnati, Davis and Elkins College, WV, Schlumberger-Doll, Korea Institute of Science and Technology, University of Cincinnati, Lock Haven University of Pennsylvania, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6372, Albion College, Albion, MI 49224, University of Toledo, Toledo, OH 43606, Youngstown State University, Joint Institute for Nuclear Research (Dubna), Naval Research Laboratory, ManTech SRS Technologies, Inc., Ecopulse, Inc., Army Research Laboratory, University of Surrey, The Ohio State University, Univ. Akron, Owens Community College, Toledo, OH