Hyperdoped Silicon Characterization and Photodetectors

POSTER

Abstract

Hyperdoped silicon is a promising material for infrared detection. Supersaturated solutions of impurities in Si are produced in order to create intermediate bands (IBs) in between the valence and conduction bands. This new IB serves on sub-band gap absorption. Ion implantation followed by pulsed laser melting has been demonstrated as a method to produce concentrations of impurities in Si that are well above the solid solubility limit. In this work, we look at Si hyperdoped with Au or Ti. To achieve devices that could be commercialized for FPAs or other demanding applications, efficient ones will require significant optical absorption and high quality Ohmic contacts for carrier extraction. We fabricated Si layers hyperdoped with Au or Ti at varying concentrations, measured the optical absorption enhancement relative to Si, and attempted to form Ohmic contacts to the layers. The results show significant enhancement of optical absorption by increasing the implant dose. For making Ohmic contacts to hyperdoped materials, we tried several treatments, including boron or phosphorus shallow doping, rapid thermal annealing of contact, etching off the top metallic layer, and modifying the PLM process to suppress dopant segregation. Recipes for Ohmic contacts to each layer were demonstrated.

Authors

  • Yining Liu

    University of Dayton

  • Rudrakant Sollapur

    Miami University, The College of Wooster, University of Dayton, Ohio University and Argonne National Laboratory, Argonne National Laboratory, J. Stefen Inst., Slovenia, Ohio University, Institute of Physics, University of Belgrade, The University of Akron, Faculty of Physics, University of Belgrade, Institute for Multidisciplinary Research, University of Belgrade, Faculty of Sciences, University of Novi Sad, Bowling Green State University, Australian National University, Benet lab, Department of Physics and Electro-Optics Program University of Dayton, Dayton, OH 45469, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, Department of Physics, Arizona State University, Tempe, AZ, Electro-Optics Program, University of Dayton, Dayton, OH 45469, Department of Physics and Astronomy, Youngstown State University, University of Memphis, TN, Union College Barbourville, KY, Air Force Research Laboratory, Materials and Manufacturing Directorate, WPAFB, OH, Arizona State University, Materials and Manufacturing Directorate, Air Force Research Laboratory, WPAFB, OH 45433, Materials and Manufacturing Directorate, Wright-Patterson AFB, OH, Case Western Reserve University, Department of Electrical Engineering and Computer Science, Cleveland, OH, Air Force Research Lab, Materials and Manufacturing Directorate, WPAFB, OH, Ohio Northern Univ, University of Notre Dame, Miami Univ, Leibniz Institute of Photonic Technology e.V.; and Otto Schott Institute of Material Research, Abbe Center of Photonics, Leibniz Institute of Photonic Technology e.V., Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University; and Helmholtz Institute Jena, Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University

  • Rudrakant Sollapur

    Miami University, The College of Wooster, University of Dayton, Ohio University and Argonne National Laboratory, Argonne National Laboratory, J. Stefen Inst., Slovenia, Ohio University, Institute of Physics, University of Belgrade, The University of Akron, Faculty of Physics, University of Belgrade, Institute for Multidisciplinary Research, University of Belgrade, Faculty of Sciences, University of Novi Sad, Bowling Green State University, Australian National University, Benet lab, Department of Physics and Electro-Optics Program University of Dayton, Dayton, OH 45469, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, Department of Physics, Arizona State University, Tempe, AZ, Electro-Optics Program, University of Dayton, Dayton, OH 45469, Department of Physics and Astronomy, Youngstown State University, University of Memphis, TN, Union College Barbourville, KY, Air Force Research Laboratory, Materials and Manufacturing Directorate, WPAFB, OH, Arizona State University, Materials and Manufacturing Directorate, Air Force Research Laboratory, WPAFB, OH 45433, Materials and Manufacturing Directorate, Wright-Patterson AFB, OH, Case Western Reserve University, Department of Electrical Engineering and Computer Science, Cleveland, OH, Air Force Research Lab, Materials and Manufacturing Directorate, WPAFB, OH, Ohio Northern Univ, University of Notre Dame, Miami Univ, Leibniz Institute of Photonic Technology e.V.; and Otto Schott Institute of Material Research, Abbe Center of Photonics, Leibniz Institute of Photonic Technology e.V., Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University; and Helmholtz Institute Jena, Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University

  • Rudrakant Sollapur

    Miami University, The College of Wooster, University of Dayton, Ohio University and Argonne National Laboratory, Argonne National Laboratory, J. Stefen Inst., Slovenia, Ohio University, Institute of Physics, University of Belgrade, The University of Akron, Faculty of Physics, University of Belgrade, Institute for Multidisciplinary Research, University of Belgrade, Faculty of Sciences, University of Novi Sad, Bowling Green State University, Australian National University, Benet lab, Department of Physics and Electro-Optics Program University of Dayton, Dayton, OH 45469, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, Department of Physics, Arizona State University, Tempe, AZ, Electro-Optics Program, University of Dayton, Dayton, OH 45469, Department of Physics and Astronomy, Youngstown State University, University of Memphis, TN, Union College Barbourville, KY, Air Force Research Laboratory, Materials and Manufacturing Directorate, WPAFB, OH, Arizona State University, Materials and Manufacturing Directorate, Air Force Research Laboratory, WPAFB, OH 45433, Materials and Manufacturing Directorate, Wright-Patterson AFB, OH, Case Western Reserve University, Department of Electrical Engineering and Computer Science, Cleveland, OH, Air Force Research Lab, Materials and Manufacturing Directorate, WPAFB, OH, Ohio Northern Univ, University of Notre Dame, Miami Univ, Leibniz Institute of Photonic Technology e.V.; and Otto Schott Institute of Material Research, Abbe Center of Photonics, Leibniz Institute of Photonic Technology e.V., Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University; and Helmholtz Institute Jena, Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University

  • Rudrakant Sollapur

    Miami University, The College of Wooster, University of Dayton, Ohio University and Argonne National Laboratory, Argonne National Laboratory, J. Stefen Inst., Slovenia, Ohio University, Institute of Physics, University of Belgrade, The University of Akron, Faculty of Physics, University of Belgrade, Institute for Multidisciplinary Research, University of Belgrade, Faculty of Sciences, University of Novi Sad, Bowling Green State University, Australian National University, Benet lab, Department of Physics and Electro-Optics Program University of Dayton, Dayton, OH 45469, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, Department of Physics, Arizona State University, Tempe, AZ, Electro-Optics Program, University of Dayton, Dayton, OH 45469, Department of Physics and Astronomy, Youngstown State University, University of Memphis, TN, Union College Barbourville, KY, Air Force Research Laboratory, Materials and Manufacturing Directorate, WPAFB, OH, Arizona State University, Materials and Manufacturing Directorate, Air Force Research Laboratory, WPAFB, OH 45433, Materials and Manufacturing Directorate, Wright-Patterson AFB, OH, Case Western Reserve University, Department of Electrical Engineering and Computer Science, Cleveland, OH, Air Force Research Lab, Materials and Manufacturing Directorate, WPAFB, OH, Ohio Northern Univ, University of Notre Dame, Miami Univ, Leibniz Institute of Photonic Technology e.V.; and Otto Schott Institute of Material Research, Abbe Center of Photonics, Leibniz Institute of Photonic Technology e.V., Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University; and Helmholtz Institute Jena, Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University

  • Rudrakant Sollapur

    Miami University, The College of Wooster, University of Dayton, Ohio University and Argonne National Laboratory, Argonne National Laboratory, J. Stefen Inst., Slovenia, Ohio University, Institute of Physics, University of Belgrade, The University of Akron, Faculty of Physics, University of Belgrade, Institute for Multidisciplinary Research, University of Belgrade, Faculty of Sciences, University of Novi Sad, Bowling Green State University, Australian National University, Benet lab, Department of Physics and Electro-Optics Program University of Dayton, Dayton, OH 45469, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, Department of Physics, Arizona State University, Tempe, AZ, Electro-Optics Program, University of Dayton, Dayton, OH 45469, Department of Physics and Astronomy, Youngstown State University, University of Memphis, TN, Union College Barbourville, KY, Air Force Research Laboratory, Materials and Manufacturing Directorate, WPAFB, OH, Arizona State University, Materials and Manufacturing Directorate, Air Force Research Laboratory, WPAFB, OH 45433, Materials and Manufacturing Directorate, Wright-Patterson AFB, OH, Case Western Reserve University, Department of Electrical Engineering and Computer Science, Cleveland, OH, Air Force Research Lab, Materials and Manufacturing Directorate, WPAFB, OH, Ohio Northern Univ, University of Notre Dame, Miami Univ, Leibniz Institute of Photonic Technology e.V.; and Otto Schott Institute of Material Research, Abbe Center of Photonics, Leibniz Institute of Photonic Technology e.V., Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University; and Helmholtz Institute Jena, Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University

  • Rudrakant Sollapur

    Miami University, The College of Wooster, University of Dayton, Ohio University and Argonne National Laboratory, Argonne National Laboratory, J. Stefen Inst., Slovenia, Ohio University, Institute of Physics, University of Belgrade, The University of Akron, Faculty of Physics, University of Belgrade, Institute for Multidisciplinary Research, University of Belgrade, Faculty of Sciences, University of Novi Sad, Bowling Green State University, Australian National University, Benet lab, Department of Physics and Electro-Optics Program University of Dayton, Dayton, OH 45469, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, Department of Physics, Arizona State University, Tempe, AZ, Electro-Optics Program, University of Dayton, Dayton, OH 45469, Department of Physics and Astronomy, Youngstown State University, University of Memphis, TN, Union College Barbourville, KY, Air Force Research Laboratory, Materials and Manufacturing Directorate, WPAFB, OH, Arizona State University, Materials and Manufacturing Directorate, Air Force Research Laboratory, WPAFB, OH 45433, Materials and Manufacturing Directorate, Wright-Patterson AFB, OH, Case Western Reserve University, Department of Electrical Engineering and Computer Science, Cleveland, OH, Air Force Research Lab, Materials and Manufacturing Directorate, WPAFB, OH, Ohio Northern Univ, University of Notre Dame, Miami Univ, Leibniz Institute of Photonic Technology e.V.; and Otto Schott Institute of Material Research, Abbe Center of Photonics, Leibniz Institute of Photonic Technology e.V., Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University; and Helmholtz Institute Jena, Institute of Optics and Quantum Electronics, Abbe Center of Photonics, Friedrich Schiller University