Al$_{2}$O$_{3}$ Conformal Coating of High-Aspect-Ratio Vertically Aligned Carbon Nanofiber Array Using Atomic Layer Deposition

ORAL

Abstract

A vertically aligned carbon nanofiber array (VACNFA) was used as a high-aspect-ratio substrate for atomic layer deposition (ALD) coating of aluminum oxide (Al$_{2}$O$_{3})$. Al$_{2}$O$_{3}$ was deposited on the VACNFA using alternating pulses of trimethylaluminum and distilled water for each cycle. The VACNFA was chosen as the substrate because of its large surface area as a result of the three dimensional structure and its surface reactivity due to outside dangling bonds. ~This reactive nature eliminated the need for functionalization of the VACNFA before ALD deposition. ~Transmission electron microscopy (TEM) was used to verify the Al$_{2}$O$_{3}$ layer conformally coated the VACNFA despite its high-aspect ratio. TEM images also revealed an approximate growth rate of the Al$_{2}$O$_{3}$ layer to be 0.85 {\AA}/cycle. Therefore, we can control the thickness of the Al$_{2}$O$_{3}$ layer on the VACNFA by tuning the number of ALD cycles.

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Authors

  • Gary Malek

    University of Kansas Dept. of Physics \& Astronomy

  • Judy Wu

    University of Kansas Dept. of Physics \& Astronomy, University of Kansas

  • Rongtao Lu

    University of Kansas Dept. of Physics \& Astronomy

  • Jianwei Liu

    University of Kansas Dept. of Physics \& Astronomy

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa