Fabrication of Nb/Al2O3/Nb Josephson Junctions using Atomic Layer Deposition

ORAL

Abstract

Atomic layer deposition (ALD) provides a promising approach for deposition of ultrathin low-defect-density tunnel barriers, and it has been implemented in a high-vacuum magnetron sputtering system for \textit{in situ} deposition of ALD-Al$_{2}$O$_{3}$ tunnel barriers in superconductor-insulator-superconductor (SIS) Josephson junctions. A smooth ALD-Al$_{2}$O$_{3}$ barrier layer was grown on a Al-wetted Nb bottom electrode and was followed with a top Nb electrode growth using sputtering. The formation of tunnel barriers in these Nb/ALD-Al$_{2}$O$_{3}$/Nb trilayers was strongly indicated at room temperature by using the current-in-plane tunneling technique. Preliminary low temperature measurements of current-voltage characteristics (IVC) of the Josephson junctions made from these trilayers confirmed the integrity of the ALD-Al$_{2}$O$_{3}$ barrier layer. However, the I$_{c}$R$_{N}$ product of the junctions is much smaller than the value expected from the Ambegaokar-Baratoff formula suggesting a significant pair-breaking mechanism at the interfaces.

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Authors

  • Rongtao Lu

    University of Kansas Dept. of Physics \& Astronomy

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa

  • Jatinder Kumar

    Harvard U., Baker University, Bejing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Northrop Grumman, Baltimore, MD, University of Kansas Dept. of Physics \& Astronomy, Kansas State University, Department of Chemistry, College of Materials Science \& Engineering, Sichuan University, China, Illinois State University, Mullard Space Science Laboratory, University College of London, Holmbury St. Mary, United Kingdom, Laboratory for Atmospheric and Space Physics, University of Colorado, Boulder, CO, United States, Weizmann Institute of Science, Rehovot, Israel, Monmouth College, Missouri State University, Birla Institute of Technology and Science, University of Illinois at Urbana Champaign, Ames Laboratory. Department of Physics and Astronomy, Iowa State University, Siena College, \'Ecole Polytechnique F\'ed\'erale de Lausanne, Switzerland, Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Kansas State University, Purdue University, Princeton University, Oklahoma State University, University of Chicago, University of Iowa, University of Kansas, University of Kansas and University of Iowa