Modification of Bulk Nb Surfaces Using Ar/BF$_{3}$ and Ar/Cl$_{2}$ Plasmas

POSTER

Abstract

In-situ plasma treatment is one of the promising methods for preparation of Nb surface in superconducting radio-frequency cavities. The aim of our work is to remove Nb oxides and other poor superconductors from the bulk niobium surface and to eliminate surface roughness. Since Nb forms volatile fluorides and chlorides, reactive gas mixture can contain fluoride and/or chloride based gases. We exposed the Nb surface to Ar/Cl$_{2}$ reactive gases mixture in the microwave cavity discharge system [1] and to Ar/BF$_{3 }$in the repetitively pulsed d.c. diode system [2]. Optical and mass spectrometry methods were employed for process monitoring during the surface exposure to the discharges. Treated surfaces were characterized with optical microscope, scanning electron microscope, and scanning probe microscope. The preliminary studies on the planar samples show improvement of the surface smoothness comparing to buffered chemical polishing method, currently in use. Further, the gas-phase kinetics study of both discharges used in our work is being performed. These results will be compared with the process diagnostics data in order to develop better understanding of the surface modification processes. The results will be presented at the conference. [1] M. Raskovic, et al., Proc. EPAC 2006, Edinburgh, Scotland, MOPCH184. [2] S. Radovanov, et al., J. Appl. Phys. \textbf{98}, 113307 (2005).

Authors

  • J. Deng

    US Naval Observatory, University of Virginia, Thomas Jefferson National Accelerator Facility, College of William and Mary, US Army Research Office, Brimrose Corporation of America, Hampton University, Department of Physics, University of Rajshahi, Rajshahi, Bangladesh, Department of Physics, Old Dominion University, Norfolk, VA 23529, University of North Carolina at Chapel Hill, Department of Physics, Old Dominion University, Norfolk, Virginia, Department of Physics, Korea University, Seoul, Korea, Department of Physics, University of Virginia, Charlottesville, VA, Department of Physics, Old Dominion University, Norfolk, VA, North Carolina State University and WebAssign, Raleigh, NC, North Carolina State University, Raleigh, NC, Broughton High School, Raleigh, NC, University of Wisconsin at Whitewater, Whitewater, WI, University of North Carolina-Chapel Hill Department of Physics, University of West Virginia - Chemistry Dept., ORNL, Old Dominion University, University of West Virginia Department of Chemistry, Clemson University, South Carolina Governor’s School for Science and Mathematics, College of Charleston, Rice University, Korea Research Institute of Standards and Science, Ohio State University, Wright State University, Yale U, JINR, Dubna, Univ. Fed. do Rio de Janeiro, Vanderbilt Univ./JIHIR(ORNL)/Tsinghua Univ., NSCL(MSU), LLNL, LBNL, Vanderbilt Univ./LBNL/JIHIR(ORNL), Vanderbilt Univ., Jagellonian University, University of Bonn, North Carolina A{\&T} State University, North Carolina Central University, Duke University and TUNL

  • J. Deng

    US Naval Observatory, University of Virginia, Thomas Jefferson National Accelerator Facility, College of William and Mary, US Army Research Office, Brimrose Corporation of America, Hampton University, Department of Physics, University of Rajshahi, Rajshahi, Bangladesh, Department of Physics, Old Dominion University, Norfolk, VA 23529, University of North Carolina at Chapel Hill, Department of Physics, Old Dominion University, Norfolk, Virginia, Department of Physics, Korea University, Seoul, Korea, Department of Physics, University of Virginia, Charlottesville, VA, Department of Physics, Old Dominion University, Norfolk, VA, North Carolina State University and WebAssign, Raleigh, NC, North Carolina State University, Raleigh, NC, Broughton High School, Raleigh, NC, University of Wisconsin at Whitewater, Whitewater, WI, University of North Carolina-Chapel Hill Department of Physics, University of West Virginia - Chemistry Dept., ORNL, Old Dominion University, University of West Virginia Department of Chemistry, Clemson University, South Carolina Governor’s School for Science and Mathematics, College of Charleston, Rice University, Korea Research Institute of Standards and Science, Ohio State University, Wright State University, Yale U, JINR, Dubna, Univ. Fed. do Rio de Janeiro, Vanderbilt Univ./JIHIR(ORNL)/Tsinghua Univ., NSCL(MSU), LLNL, LBNL, Vanderbilt Univ./LBNL/JIHIR(ORNL), Vanderbilt Univ., Jagellonian University, University of Bonn, North Carolina A{\&T} State University, North Carolina Central University, Duke University and TUNL

  • J. Deng

    US Naval Observatory, University of Virginia, Thomas Jefferson National Accelerator Facility, College of William and Mary, US Army Research Office, Brimrose Corporation of America, Hampton University, Department of Physics, University of Rajshahi, Rajshahi, Bangladesh, Department of Physics, Old Dominion University, Norfolk, VA 23529, University of North Carolina at Chapel Hill, Department of Physics, Old Dominion University, Norfolk, Virginia, Department of Physics, Korea University, Seoul, Korea, Department of Physics, University of Virginia, Charlottesville, VA, Department of Physics, Old Dominion University, Norfolk, VA, North Carolina State University and WebAssign, Raleigh, NC, North Carolina State University, Raleigh, NC, Broughton High School, Raleigh, NC, University of Wisconsin at Whitewater, Whitewater, WI, University of North Carolina-Chapel Hill Department of Physics, University of West Virginia - Chemistry Dept., ORNL, Old Dominion University, University of West Virginia Department of Chemistry, Clemson University, South Carolina Governor’s School for Science and Mathematics, College of Charleston, Rice University, Korea Research Institute of Standards and Science, Ohio State University, Wright State University, Yale U, JINR, Dubna, Univ. Fed. do Rio de Janeiro, Vanderbilt Univ./JIHIR(ORNL)/Tsinghua Univ., NSCL(MSU), LLNL, LBNL, Vanderbilt Univ./LBNL/JIHIR(ORNL), Vanderbilt Univ., Jagellonian University, University of Bonn, North Carolina A{\&T} State University, North Carolina Central University, Duke University and TUNL