Multimedia ellipsometry of (aminomethylaminoethyl)phenethyltrimethoxysilane (PEDA) layers

ORAL

Abstract

A novel ellipsometric characterization method is described for determining the layer thickness and refractive index of substrates functionalized using (aminomethylaminoethyl)phenethyltrimethoxysilane (PEDA) self assembled monolayers (SAMs). Since traditional ellipsometry cannot independently determine the thickness and index of very thin layers, we have developed an ellipsometric apparatus that measures films in liquid solvents, and an analysis procedure that combines the separate three-layer models in these solvent media to enable measurement of both values. Two types of ellipsometry analysis procedures are shown. We illustrate an analysis of thin layer deposition on a simple substrate using PEDA on Si growth vs. time and solution. For more complex substrates, which require measurement before and after SAM layer growth, we show results for a PEDA/oxide/Si multilayer system. Since the refractive index of the layer is a function of the density of the molecules on the substrate, multimedia ellipsometry can determine whether the changes of the ellipsometric parameters are due to density or overgrowth effects.

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Authors

  • Jeremy Peters

    NC State University

  • Jaetae Seo

    NC A\&T State University, Penn State University, The Ohio State University, Wright State University, AFRL/RYHC Hanscom AFB MA 01731, Harvard University, The College of William \& Mary, NCSU Near-field Optics Lab, University of North Carolina at Chapel Hill, Weizmann, PTB, Braunschweig, UMass, TUNL/Duke, UConn, UConn/TUNL, University of North Carolina, Chapel Hill, North Carolina State University, Brimrose Corporation of America, Hampton University, Elizabeth City State University, Department of Physics, Florida A\&M University, Tallahassee, Florida-32307, Department of Physics, University of Rajshahi, Rajshahi-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshah-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshahi-6250, Bangladesh, Department of Physics, University of Rajshahi-6205, Bangladesh, Alabama A\&M University, Fachbereich C-Mathematik und Naturwissen-Schaften, Bergische Universitat Wuppertal, D-42097, Wuppertal, Germany, NC State University, College of William and Mary, Department of Physics, N.C. State Univeristy, Research Triangle Institute, NCSU Physics, Pennsylvania State University, Tsinghua University, Lawrence Berkeley National Laboratory, Vanderbilt University, LSU, UNIRIB, U. Tenn., ORNL, Miss. St., University of North Carolina at Chapel Hill and Triangle Universities Nuclear Laboratory, NCA\&T, Duke, NCCU, UNC-Chapel Hill, Department of Physics, North Carolina State University, Department of Chemistry, North Carolina State University, Department of Physics and Astronomy, University of North Carolina, Chapel Hill, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Department of Pathology and Laboratory Medicine, University of North Carolina at Chapel Hil, North Carolina School of Science and Mathematics, Department of Physics, Elon University, Dept. of Physics - UNC - Chapel Hill, Nanyang Technological University, School of Materials Sciences and Engineering, Singapore, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599-3255, USA, Argonne National Laboratory, Department of Physics, Hampton University, Hampton, VA 23668, Korea Research Institute of Standards and Science, Daejeon, 305-600, South Korea, Department of Chemistry, Gyeongsang National University, Jinju 660-701, South Korea, Electronics and Telecommunications Research Institute, Daejeon, 305-700, South Korea, Department of Chemistry and Biochemistry, Worcester Polytechnic Institute, Worcester, MA 01609