Ultrahigh Vacuum Growth and PEEM Characterization of Patterned Graphene Nanostructures on Si-Polar 6H-SiC Surfaces

POSTER

Abstract

We report the growth and Photoelectron Emission Microscopy (PEEM) characterization of graphene films on Si-polar surfaces of 6H-SiC by thermal decomposition in an ultrahigh vacuum (UHV) chamber. Following growth, focused ion beam lithography has been used to successfully etch the graphene films and control the lateral dimensions of a number of nanostructures on these graphene layers with etch rates of $\sim $18 nm/s and lateral dimensions of $\sim $250 to 1500 nm. Epitaxial graphene films (1-4 layers thick) have been grown on the Si face. Theoretical reports have recently addressed the bandgap engineering of graphene nanoribbons by altering the physical dimensions, edge structure, and edge atoms of the nanoribbons. However, experimental control of the growth and quality graphene nanostructures is still a challenge. Our PEEM results show that the electronic properties of the graphene are very different near step edges which indicates that some confinement effects expected for graphene nanoribbons may be achieved by selected stepped surfaces. The patterned surfaces show additional sites that are chemically different and may be useful for certain sensor applications. Possible interpretations of the PEEM contrast mechanisms will be discussed.

Authors

  • Jaetae Seo

    NC A\&T State University, Penn State University, The Ohio State University, Wright State University, AFRL/RYHC Hanscom AFB MA 01731, Harvard University, The College of William \& Mary, NCSU Near-field Optics Lab, University of North Carolina at Chapel Hill, Weizmann, PTB, Braunschweig, UMass, TUNL/Duke, UConn, UConn/TUNL, University of North Carolina, Chapel Hill, North Carolina State University, Brimrose Corporation of America, Hampton University, Elizabeth City State University, Department of Physics, Florida A\&M University, Tallahassee, Florida-32307, Department of Physics, University of Rajshahi, Rajshahi-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshah-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshahi-6250, Bangladesh, Department of Physics, University of Rajshahi-6205, Bangladesh, Alabama A\&M University, Fachbereich C-Mathematik und Naturwissen-Schaften, Bergische Universitat Wuppertal, D-42097, Wuppertal, Germany, NC State University, College of William and Mary, Department of Physics, N.C. State Univeristy, Research Triangle Institute, NCSU Physics, Pennsylvania State University, Tsinghua University, Lawrence Berkeley National Laboratory, Vanderbilt University, LSU, UNIRIB, U. Tenn., ORNL, Miss. St., University of North Carolina at Chapel Hill and Triangle Universities Nuclear Laboratory, NCA\&T, Duke, NCCU, UNC-Chapel Hill, Department of Physics, North Carolina State University, Department of Chemistry, North Carolina State University, Department of Physics and Astronomy, University of North Carolina, Chapel Hill, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Department of Pathology and Laboratory Medicine, University of North Carolina at Chapel Hil, North Carolina School of Science and Mathematics, Department of Physics, Elon University, Dept. of Physics - UNC - Chapel Hill, Nanyang Technological University, School of Materials Sciences and Engineering, Singapore, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599-3255, USA, Argonne National Laboratory, Department of Physics, Hampton University, Hampton, VA 23668, Korea Research Institute of Standards and Science, Daejeon, 305-600, South Korea, Department of Chemistry, Gyeongsang National University, Jinju 660-701, South Korea, Electronics and Telecommunications Research Institute, Daejeon, 305-700, South Korea, Department of Chemistry and Biochemistry, Worcester Polytechnic Institute, Worcester, MA 01609

  • Jaetae Seo

    NC A\&T State University, Penn State University, The Ohio State University, Wright State University, AFRL/RYHC Hanscom AFB MA 01731, Harvard University, The College of William \& Mary, NCSU Near-field Optics Lab, University of North Carolina at Chapel Hill, Weizmann, PTB, Braunschweig, UMass, TUNL/Duke, UConn, UConn/TUNL, University of North Carolina, Chapel Hill, North Carolina State University, Brimrose Corporation of America, Hampton University, Elizabeth City State University, Department of Physics, Florida A\&M University, Tallahassee, Florida-32307, Department of Physics, University of Rajshahi, Rajshahi-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshah-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshahi-6250, Bangladesh, Department of Physics, University of Rajshahi-6205, Bangladesh, Alabama A\&M University, Fachbereich C-Mathematik und Naturwissen-Schaften, Bergische Universitat Wuppertal, D-42097, Wuppertal, Germany, NC State University, College of William and Mary, Department of Physics, N.C. State Univeristy, Research Triangle Institute, NCSU Physics, Pennsylvania State University, Tsinghua University, Lawrence Berkeley National Laboratory, Vanderbilt University, LSU, UNIRIB, U. Tenn., ORNL, Miss. St., University of North Carolina at Chapel Hill and Triangle Universities Nuclear Laboratory, NCA\&T, Duke, NCCU, UNC-Chapel Hill, Department of Physics, North Carolina State University, Department of Chemistry, North Carolina State University, Department of Physics and Astronomy, University of North Carolina, Chapel Hill, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Department of Pathology and Laboratory Medicine, University of North Carolina at Chapel Hil, North Carolina School of Science and Mathematics, Department of Physics, Elon University, Dept. of Physics - UNC - Chapel Hill, Nanyang Technological University, School of Materials Sciences and Engineering, Singapore, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599-3255, USA, Argonne National Laboratory, Department of Physics, Hampton University, Hampton, VA 23668, Korea Research Institute of Standards and Science, Daejeon, 305-600, South Korea, Department of Chemistry, Gyeongsang National University, Jinju 660-701, South Korea, Electronics and Telecommunications Research Institute, Daejeon, 305-700, South Korea, Department of Chemistry and Biochemistry, Worcester Polytechnic Institute, Worcester, MA 01609

  • Jaetae Seo

    NC A\&T State University, Penn State University, The Ohio State University, Wright State University, AFRL/RYHC Hanscom AFB MA 01731, Harvard University, The College of William \& Mary, NCSU Near-field Optics Lab, University of North Carolina at Chapel Hill, Weizmann, PTB, Braunschweig, UMass, TUNL/Duke, UConn, UConn/TUNL, University of North Carolina, Chapel Hill, North Carolina State University, Brimrose Corporation of America, Hampton University, Elizabeth City State University, Department of Physics, Florida A\&M University, Tallahassee, Florida-32307, Department of Physics, University of Rajshahi, Rajshahi-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshah-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshahi-6250, Bangladesh, Department of Physics, University of Rajshahi-6205, Bangladesh, Alabama A\&M University, Fachbereich C-Mathematik und Naturwissen-Schaften, Bergische Universitat Wuppertal, D-42097, Wuppertal, Germany, NC State University, College of William and Mary, Department of Physics, N.C. State Univeristy, Research Triangle Institute, NCSU Physics, Pennsylvania State University, Tsinghua University, Lawrence Berkeley National Laboratory, Vanderbilt University, LSU, UNIRIB, U. Tenn., ORNL, Miss. St., University of North Carolina at Chapel Hill and Triangle Universities Nuclear Laboratory, NCA\&T, Duke, NCCU, UNC-Chapel Hill, Department of Physics, North Carolina State University, Department of Chemistry, North Carolina State University, Department of Physics and Astronomy, University of North Carolina, Chapel Hill, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Department of Pathology and Laboratory Medicine, University of North Carolina at Chapel Hil, North Carolina School of Science and Mathematics, Department of Physics, Elon University, Dept. of Physics - UNC - Chapel Hill, Nanyang Technological University, School of Materials Sciences and Engineering, Singapore, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599-3255, USA, Argonne National Laboratory, Department of Physics, Hampton University, Hampton, VA 23668, Korea Research Institute of Standards and Science, Daejeon, 305-600, South Korea, Department of Chemistry, Gyeongsang National University, Jinju 660-701, South Korea, Electronics and Telecommunications Research Institute, Daejeon, 305-700, South Korea, Department of Chemistry and Biochemistry, Worcester Polytechnic Institute, Worcester, MA 01609

  • Jaetae Seo

    NC A\&T State University, Penn State University, The Ohio State University, Wright State University, AFRL/RYHC Hanscom AFB MA 01731, Harvard University, The College of William \& Mary, NCSU Near-field Optics Lab, University of North Carolina at Chapel Hill, Weizmann, PTB, Braunschweig, UMass, TUNL/Duke, UConn, UConn/TUNL, University of North Carolina, Chapel Hill, North Carolina State University, Brimrose Corporation of America, Hampton University, Elizabeth City State University, Department of Physics, Florida A\&M University, Tallahassee, Florida-32307, Department of Physics, University of Rajshahi, Rajshahi-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshah-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshahi-6250, Bangladesh, Department of Physics, University of Rajshahi-6205, Bangladesh, Alabama A\&M University, Fachbereich C-Mathematik und Naturwissen-Schaften, Bergische Universitat Wuppertal, D-42097, Wuppertal, Germany, NC State University, College of William and Mary, Department of Physics, N.C. State Univeristy, Research Triangle Institute, NCSU Physics, Pennsylvania State University, Tsinghua University, Lawrence Berkeley National Laboratory, Vanderbilt University, LSU, UNIRIB, U. Tenn., ORNL, Miss. St., University of North Carolina at Chapel Hill and Triangle Universities Nuclear Laboratory, NCA\&T, Duke, NCCU, UNC-Chapel Hill, Department of Physics, North Carolina State University, Department of Chemistry, North Carolina State University, Department of Physics and Astronomy, University of North Carolina, Chapel Hill, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Department of Pathology and Laboratory Medicine, University of North Carolina at Chapel Hil, North Carolina School of Science and Mathematics, Department of Physics, Elon University, Dept. of Physics - UNC - Chapel Hill, Nanyang Technological University, School of Materials Sciences and Engineering, Singapore, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599-3255, USA, Argonne National Laboratory, Department of Physics, Hampton University, Hampton, VA 23668, Korea Research Institute of Standards and Science, Daejeon, 305-600, South Korea, Department of Chemistry, Gyeongsang National University, Jinju 660-701, South Korea, Electronics and Telecommunications Research Institute, Daejeon, 305-700, South Korea, Department of Chemistry and Biochemistry, Worcester Polytechnic Institute, Worcester, MA 01609

  • Jack Rowe

    NC State University