A novel nanoglue and whole wafer self-alignment based upon self-assembled monolayers

POSTER

Abstract

New methodologies for fabrication of multilevel packaging, particularly for RF signal analysis, are investigated. A new method for ``gluing'' silicon wafers together with a Self Assembled Monolayers (SAMs) based nanoglue are discussed, as are methods to enable its use with nonconforming wafers. Results of bond strength measurements as a function of temperature and process will be presented. Surface area bonded is characterized by infrared (IR) imaging. We will also present a method of inducing self-alignment between whole silicon wafers with micrometer precision. This represents a qualitative departure from alignment of millimeter-sized object as has been previously demonstrated. Self-alignment is induced by creating hydrophilic and hydrophobic regions on the wafers and using capillary forces of water in these regions to force the wafers to align with little to no outside influence. Results are characterized by IR imaging. Physical ideas that enable the whole-wafer alignment such as flow channels, elimination of secondary minima, large central capture areas and small edge features are discussed. The possibility of aligning with the nanoglue materials as the alignment drivers is discussed.

Authors

  • Ako Emanuel

    North Carolina State University

  • Jaetae Seo

    NC A\&T State University, Penn State University, The Ohio State University, Wright State University, AFRL/RYHC Hanscom AFB MA 01731, Harvard University, The College of William \& Mary, NCSU Near-field Optics Lab, University of North Carolina at Chapel Hill, Weizmann, PTB, Braunschweig, UMass, TUNL/Duke, UConn, UConn/TUNL, University of North Carolina, Chapel Hill, North Carolina State University, Brimrose Corporation of America, Hampton University, Elizabeth City State University, Department of Physics, Florida A\&M University, Tallahassee, Florida-32307, Department of Physics, University of Rajshahi, Rajshahi-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshah-6205, Bangladesh, Department of Physics, University of Rajshahi, Rajshahi-6250, Bangladesh, Department of Physics, University of Rajshahi-6205, Bangladesh, Alabama A\&M University, Fachbereich C-Mathematik und Naturwissen-Schaften, Bergische Universitat Wuppertal, D-42097, Wuppertal, Germany, NC State University, College of William and Mary, Department of Physics, N.C. State Univeristy, Research Triangle Institute, NCSU Physics, Pennsylvania State University, Tsinghua University, Lawrence Berkeley National Laboratory, Vanderbilt University, LSU, UNIRIB, U. Tenn., ORNL, Miss. St., University of North Carolina at Chapel Hill and Triangle Universities Nuclear Laboratory, NCA\&T, Duke, NCCU, UNC-Chapel Hill, Department of Physics, North Carolina State University, Department of Chemistry, North Carolina State University, Department of Physics and Astronomy, University of North Carolina, Chapel Hill, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Department of Pathology and Laboratory Medicine, University of North Carolina at Chapel Hil, North Carolina School of Science and Mathematics, Department of Physics, Elon University, Dept. of Physics - UNC - Chapel Hill, Nanyang Technological University, School of Materials Sciences and Engineering, Singapore, Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599-3255, USA, Argonne National Laboratory, Department of Physics, Hampton University, Hampton, VA 23668, Korea Research Institute of Standards and Science, Daejeon, 305-600, South Korea, Department of Chemistry, Gyeongsang National University, Jinju 660-701, South Korea, Electronics and Telecommunications Research Institute, Daejeon, 305-700, South Korea, Department of Chemistry and Biochemistry, Worcester Polytechnic Institute, Worcester, MA 01609

  • Hans Hallen

    North Carolina State University