Measuring potential energy dissipation effects via below-surface electronic excitations in solids using MOS devices

ORAL

Abstract

We have conducted measurements on oxides irradiated by multicharged ions ($Q>1$) to explore the potential energy/charge state effect on subsurface damage caused in the target. Our goal was to determine charge state dependence of stopping power, or energy lost per unit distance, relative to the singly charged ($Q=1$) ions usually encountered in ion-solid interactions. Specifically, we have irradiated a 170 nm thick SiO$_2$-on-Si sample with Ar$^{Q+}$ ions ($Q=1,4,8,11$) at a fixed K.E. of 1 keV and tracked the electronic excitations in the oxide by capacitance-voltage (C-V) characterization post irradiation. Energy dissipation within the oxide generates electron-hole pairs which leads to mobile holes that can transport across the oxide and have a finite probability of getting trapped within the oxide, which causes a flatband voltage shift in its C-V curve. To obtain C-V characteristics, we deposited top metal contacts on our oxides to create MOS devices (Al-SiO$_2$-Si). These measurements showed increased flatband voltage shifts dependent on impact position, ion dose and the ion charge state. the ion charge state. Preliminary analysis reveals a power law ($Q^{2.2}$) dependence on the charge state which is compared to theoretical predictions and other experimental studies.

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Authors

  • Dhruva Kulkarni

    Clemson Univ

  • Brad Cox

    North Carolnia State University, Vanderbilt University, University of South Carolina, University of Virginia, Francis Marion Univ, Oak Ridge National Laboratory, Massachusetts Institute of Technology, Florida International University, Georgia College, JINR, Tsinghua University, LBNL, GANIL, Austin Peay State University, Lehigh University, University of Pardubice, Universit\'e de Rennes, Austin Peay State University Department of Physics and Astronomy, Oak Ridge National Laboratory, Oak Ridge TN 37831, American Superconductor Corp., Westborough MA 01581, University of North Georgia, Dahlonega GA 30597, Florida State University, Ecole Polytechnique, Space Telescope Science Institute, Fermi National Accelerator Lab, National Optical Astronomy Observatory, Austin Peay State Univerity, North Carolna State University, Florida Intl Univ, University of North Georgia, Clemson University, Clemson Univ, Vanderbilt University/ORNL, Vanderbilt University/Univ. of Kentucky, College of William and Mary, Louisiana State University, Presbyterian College, North Carolina State Univ, Department of Physics, Virginia Tech, Mathematical Institute, University of Oxford, Virginia Tech University, Hollins University, University of Tennessee Space Institute, Davidson College, University of Tennessee, American Superconductor Corporation, University of South Alabama, North Carolina State University, James Madison University, Lousiana State University, Korea Electrotechnology Research Institute, Changwon Korea

  • Brad Cox

    North Carolnia State University, Vanderbilt University, University of South Carolina, University of Virginia, Francis Marion Univ, Oak Ridge National Laboratory, Massachusetts Institute of Technology, Florida International University, Georgia College, JINR, Tsinghua University, LBNL, GANIL, Austin Peay State University, Lehigh University, University of Pardubice, Universit\'e de Rennes, Austin Peay State University Department of Physics and Astronomy, Oak Ridge National Laboratory, Oak Ridge TN 37831, American Superconductor Corp., Westborough MA 01581, University of North Georgia, Dahlonega GA 30597, Florida State University, Ecole Polytechnique, Space Telescope Science Institute, Fermi National Accelerator Lab, National Optical Astronomy Observatory, Austin Peay State Univerity, North Carolna State University, Florida Intl Univ, University of North Georgia, Clemson University, Clemson Univ, Vanderbilt University/ORNL, Vanderbilt University/Univ. of Kentucky, College of William and Mary, Louisiana State University, Presbyterian College, North Carolina State Univ, Department of Physics, Virginia Tech, Mathematical Institute, University of Oxford, Virginia Tech University, Hollins University, University of Tennessee Space Institute, Davidson College, University of Tennessee, American Superconductor Corporation, University of South Alabama, North Carolina State University, James Madison University, Lousiana State University, Korea Electrotechnology Research Institute, Changwon Korea

  • Brad Cox

    North Carolnia State University, Vanderbilt University, University of South Carolina, University of Virginia, Francis Marion Univ, Oak Ridge National Laboratory, Massachusetts Institute of Technology, Florida International University, Georgia College, JINR, Tsinghua University, LBNL, GANIL, Austin Peay State University, Lehigh University, University of Pardubice, Universit\'e de Rennes, Austin Peay State University Department of Physics and Astronomy, Oak Ridge National Laboratory, Oak Ridge TN 37831, American Superconductor Corp., Westborough MA 01581, University of North Georgia, Dahlonega GA 30597, Florida State University, Ecole Polytechnique, Space Telescope Science Institute, Fermi National Accelerator Lab, National Optical Astronomy Observatory, Austin Peay State Univerity, North Carolna State University, Florida Intl Univ, University of North Georgia, Clemson University, Clemson Univ, Vanderbilt University/ORNL, Vanderbilt University/Univ. of Kentucky, College of William and Mary, Louisiana State University, Presbyterian College, North Carolina State Univ, Department of Physics, Virginia Tech, Mathematical Institute, University of Oxford, Virginia Tech University, Hollins University, University of Tennessee Space Institute, Davidson College, University of Tennessee, American Superconductor Corporation, University of South Alabama, North Carolina State University, James Madison University, Lousiana State University, Korea Electrotechnology Research Institute, Changwon Korea

  • Brad Cox

    North Carolnia State University, Vanderbilt University, University of South Carolina, University of Virginia, Francis Marion Univ, Oak Ridge National Laboratory, Massachusetts Institute of Technology, Florida International University, Georgia College, JINR, Tsinghua University, LBNL, GANIL, Austin Peay State University, Lehigh University, University of Pardubice, Universit\'e de Rennes, Austin Peay State University Department of Physics and Astronomy, Oak Ridge National Laboratory, Oak Ridge TN 37831, American Superconductor Corp., Westborough MA 01581, University of North Georgia, Dahlonega GA 30597, Florida State University, Ecole Polytechnique, Space Telescope Science Institute, Fermi National Accelerator Lab, National Optical Astronomy Observatory, Austin Peay State Univerity, North Carolna State University, Florida Intl Univ, University of North Georgia, Clemson University, Clemson Univ, Vanderbilt University/ORNL, Vanderbilt University/Univ. of Kentucky, College of William and Mary, Louisiana State University, Presbyterian College, North Carolina State Univ, Department of Physics, Virginia Tech, Mathematical Institute, University of Oxford, Virginia Tech University, Hollins University, University of Tennessee Space Institute, Davidson College, University of Tennessee, American Superconductor Corporation, University of South Alabama, North Carolina State University, James Madison University, Lousiana State University, Korea Electrotechnology Research Institute, Changwon Korea

  • Brad Cox

    North Carolnia State University, Vanderbilt University, University of South Carolina, University of Virginia, Francis Marion Univ, Oak Ridge National Laboratory, Massachusetts Institute of Technology, Florida International University, Georgia College, JINR, Tsinghua University, LBNL, GANIL, Austin Peay State University, Lehigh University, University of Pardubice, Universit\'e de Rennes, Austin Peay State University Department of Physics and Astronomy, Oak Ridge National Laboratory, Oak Ridge TN 37831, American Superconductor Corp., Westborough MA 01581, University of North Georgia, Dahlonega GA 30597, Florida State University, Ecole Polytechnique, Space Telescope Science Institute, Fermi National Accelerator Lab, National Optical Astronomy Observatory, Austin Peay State Univerity, North Carolna State University, Florida Intl Univ, University of North Georgia, Clemson University, Clemson Univ, Vanderbilt University/ORNL, Vanderbilt University/Univ. of Kentucky, College of William and Mary, Louisiana State University, Presbyterian College, North Carolina State Univ, Department of Physics, Virginia Tech, Mathematical Institute, University of Oxford, Virginia Tech University, Hollins University, University of Tennessee Space Institute, Davidson College, University of Tennessee, American Superconductor Corporation, University of South Alabama, North Carolina State University, James Madison University, Lousiana State University, Korea Electrotechnology Research Institute, Changwon Korea

  • Chad Sosolik

    Clemson Univ