Fabrication and characterization of superconducting qubits on a 200mm wafer

Superconducting circuits perform relatively well on small scale; however, when the circuits become more complex and larger dimensions are involved, the homogeneity and reproducibility deteriorate. The non-homogeneity of superconducting properties is detrimental to a complex system because it requires the characterization of all elements in the system to effectively control it.

To address this issue, my project focuses on optimizing the homogeneity and reproducibility of superconducting qubit fabrication on 200mm wafers. A large number of qubits will be fabricated, and both room temperature and cryogenic measurements will be taken to obtain both intra and inter wafer statistics. I’ll present our latest results/preliminary results obtained on our first 200 mm wafer.