Improving the long-term stability of new-generation perovskite-based TCO using binary and ternary oxides capping layers

We report the impact of capping layers on vanadate based transparent conductive oxides (TCOs) to prolong the thermal stability with a minimal loss of resistivity during heat treatment in ambient environment. In the present study, various protecting layers (amorphous Al₂O₃, LaAlO₃, TiO₂ grown in base pressure and TiO₂ deposited under oxygen partial pressure) are grown in-situ on polycrystalline perovskite SrVO₃ thin films using Pulsed Laser Deposition. The results show that amorphous LaAlO₃ is the most promising protection layer among the oxide layers, to preserve both electrical and optical properties of perovskite SrVO₃ films from natural as well as artificial aging. Our present approach for a capping layer on SrVO₃ may address the long-term stability issues of correlated TCOs and would open an opportunity for the future oxide electronics applications.