CVD-grown 2D films for superconducting quantum devices – Part I

Materials with low loss at microwave frequencies are essential for improving the coherence of superconducting qubits. Two-dimensional (2D) superconductors grown by chemical vapor deposition (CVD) provide a scalable materials platform for superconducting quantum circuits. When integrated, CVD-grown films serve as building blocks for key components such as capacitors, Josephson junctions, inductors, and readout resonators for superconducting quantum devices. Combining wafer-scale 2D material growth with established qubit fabrication techniques opens new directions for building high-performance scalable quantum devices.

In the first part of a two-part talk, we present a circuit design for measuring the kinetic inductance of coplanar waveguide resonators fabricated from transferred 2D superconductors, without requiring galvanic contact. Previous approaches probed the kinetic inductance by shunting 2D films to resonators, a method that introduces additional loss and reduces device yield. Here, we demonstrate a platform in which a 2D heterostructure (hBN–NbSe₂–graphene–MoS₂) is patterned into a half-wave resonator and capacitively coupled to a feedline. This approach establishes that monolayer CVD-grown materials can be integrated into resonators, allowing direct characterization of their properties and their implementation in compact, scalable quantum computing devices.