Fabrication of Waveguides for Characterization of Low-k Dielectric Thin Films

POSTER

Abstract

As microelectronic devices increase in clock frequency, the RC time delay in transmission lines is becoming an obstacle. A technique used in overcoming this obstacle is the use of low-k dielectrics along with less resistive metals such as Al in microchip fabrication. We have demonstrated a method of constructing coplanar waveguide test structures on low-k dielectric thin films deposited on SiC/Si wafers using standard industry techniques. The dielectric properties of the low-k dielectric thin films on wafers can then measured at microwave frequencies (.5 to 13.5 GHz) using these test structures. The details of the fabrication of the waveguide structures using DC magnetron sputter deposition, semiconductor laser beam lithography, and reactive plasma etching with tetrafluoroethane will be reported. The magnetron chamber was pumped to a base pressure of 4 x 10-7 Torr that yielded a deposition rate of 100 angstroms a second. The photolithography process is a combination of several steps, spinning, baking, exposing, and developing. The plasma etching was in the magnetron with a plasma consisting of HFC 134a (1,1,1,2-tetrafluroethane) and O$_2$ at 20 mTorr to remove the low-k and SiC under layer.

Authors

  • James McDonald

  • Nilanjan Das

    Dept. of Physics, ESFM-IPN, Mexico City, Dept. of Physics, The University of Texas at El Paso, Texas A\&M University, Southeast Missouri State University, Departamento de Fisica, FCEN, Universidad de Buenos Aires, Nunez, Argentina, Cyclotron Institute, Texas A\&M University, University of Houston, Denison U., Advanced Space Propulsion Laboratory, AdAstra Rocket Company, Texas Tech University, Department of Chemistry and Biochemistry, Texas State Unv. - San Marcos, Department of Physics, Texas State Unv. - San Marcos, Rice U., Texas State University - San Marcos, Freescale Semiconductor, Inc., Varian Semiconductor Equipment Associates, Gloucester, MA, University of North Texas, Denton, TX, National Insitute of Standards \& Technology, Gaithersburg, MD, James Madison University, Harrisonburg, VA, Texas A\&M University, College Station, TX, Hong Kong University of Science and Technology; Texas Center for Superconductivity and Advanced Materials, University of Houston, Texas Center for Superconductivity at the University of Houston, University of Houston, University of Idaho, Department of Physics, Istanbul Technical University, University of California at Davis, Physics Department, University of South Florida, FL 33620, Physics Department, Texas A\&M University, TX 77843, Center for Studies in Statistical Mechanics and Complex Systems, The University of Texas at Austin, Rice University, TcSUH, University of Houston, Lawrence Berkeley National Laboratory, Hong Kong University of Science and Technology, Institute of Solid State Physics, Bulgarian Academy of Sciences, Hong Kong University of Science and Technology; Texas Center for Superconductivity, University of Houston; Lawrence Berkeley National Laboratory, Texas Center for Superconductivity, University of Houston

  • Nilanjan Das

    Dept. of Physics, ESFM-IPN, Mexico City, Dept. of Physics, The University of Texas at El Paso, Texas A\&M University, Southeast Missouri State University, Departamento de Fisica, FCEN, Universidad de Buenos Aires, Nunez, Argentina, Cyclotron Institute, Texas A\&M University, University of Houston, Denison U., Advanced Space Propulsion Laboratory, AdAstra Rocket Company, Texas Tech University, Department of Chemistry and Biochemistry, Texas State Unv. - San Marcos, Department of Physics, Texas State Unv. - San Marcos, Rice U., Texas State University - San Marcos, Freescale Semiconductor, Inc., Varian Semiconductor Equipment Associates, Gloucester, MA, University of North Texas, Denton, TX, National Insitute of Standards \& Technology, Gaithersburg, MD, James Madison University, Harrisonburg, VA, Texas A\&M University, College Station, TX, Hong Kong University of Science and Technology; Texas Center for Superconductivity and Advanced Materials, University of Houston, Texas Center for Superconductivity at the University of Houston, University of Houston, University of Idaho, Department of Physics, Istanbul Technical University, University of California at Davis, Physics Department, University of South Florida, FL 33620, Physics Department, Texas A\&M University, TX 77843, Center for Studies in Statistical Mechanics and Complex Systems, The University of Texas at Austin, Rice University, TcSUH, University of Houston, Lawrence Berkeley National Laboratory, Hong Kong University of Science and Technology, Institute of Solid State Physics, Bulgarian Academy of Sciences, Hong Kong University of Science and Technology; Texas Center for Superconductivity, University of Houston; Lawrence Berkeley National Laboratory, Texas Center for Superconductivity, University of Houston

  • Nilanjan Das

    Dept. of Physics, ESFM-IPN, Mexico City, Dept. of Physics, The University of Texas at El Paso, Texas A\&M University, Southeast Missouri State University, Departamento de Fisica, FCEN, Universidad de Buenos Aires, Nunez, Argentina, Cyclotron Institute, Texas A\&M University, University of Houston, Denison U., Advanced Space Propulsion Laboratory, AdAstra Rocket Company, Texas Tech University, Department of Chemistry and Biochemistry, Texas State Unv. - San Marcos, Department of Physics, Texas State Unv. - San Marcos, Rice U., Texas State University - San Marcos, Freescale Semiconductor, Inc., Varian Semiconductor Equipment Associates, Gloucester, MA, University of North Texas, Denton, TX, National Insitute of Standards \& Technology, Gaithersburg, MD, James Madison University, Harrisonburg, VA, Texas A\&M University, College Station, TX, Hong Kong University of Science and Technology; Texas Center for Superconductivity and Advanced Materials, University of Houston, Texas Center for Superconductivity at the University of Houston, University of Houston, University of Idaho, Department of Physics, Istanbul Technical University, University of California at Davis, Physics Department, University of South Florida, FL 33620, Physics Department, Texas A\&M University, TX 77843, Center for Studies in Statistical Mechanics and Complex Systems, The University of Texas at Austin, Rice University, TcSUH, University of Houston, Lawrence Berkeley National Laboratory, Hong Kong University of Science and Technology, Institute of Solid State Physics, Bulgarian Academy of Sciences, Hong Kong University of Science and Technology; Texas Center for Superconductivity, University of Houston; Lawrence Berkeley National Laboratory, Texas Center for Superconductivity, University of Houston

  • Nilanjan Das

    Dept. of Physics, ESFM-IPN, Mexico City, Dept. of Physics, The University of Texas at El Paso, Texas A\&M University, Southeast Missouri State University, Departamento de Fisica, FCEN, Universidad de Buenos Aires, Nunez, Argentina, Cyclotron Institute, Texas A\&M University, University of Houston, Denison U., Advanced Space Propulsion Laboratory, AdAstra Rocket Company, Texas Tech University, Department of Chemistry and Biochemistry, Texas State Unv. - San Marcos, Department of Physics, Texas State Unv. - San Marcos, Rice U., Texas State University - San Marcos, Freescale Semiconductor, Inc., Varian Semiconductor Equipment Associates, Gloucester, MA, University of North Texas, Denton, TX, National Insitute of Standards \& Technology, Gaithersburg, MD, James Madison University, Harrisonburg, VA, Texas A\&M University, College Station, TX, Hong Kong University of Science and Technology; Texas Center for Superconductivity and Advanced Materials, University of Houston, Texas Center for Superconductivity at the University of Houston, University of Houston, University of Idaho, Department of Physics, Istanbul Technical University, University of California at Davis, Physics Department, University of South Florida, FL 33620, Physics Department, Texas A\&M University, TX 77843, Center for Studies in Statistical Mechanics and Complex Systems, The University of Texas at Austin, Rice University, TcSUH, University of Houston, Lawrence Berkeley National Laboratory, Hong Kong University of Science and Technology, Institute of Solid State Physics, Bulgarian Academy of Sciences, Hong Kong University of Science and Technology; Texas Center for Superconductivity, University of Houston; Lawrence Berkeley National Laboratory, Texas Center for Superconductivity, University of Houston