Evolution of Ni on Si after thermal annealing observed with XRR

ORAL

Abstract

The self-aligned silicide module of a CMOS process requires cleaning the silicon surface, metal deposition, thermal annealing, and selective removal of the unreacted metal by wet- chemical etching, followed by a final thermal annealing step to reduce the electrical resistivity. We have followed the evolution of sputtered Ni films with 10 nm thickness on Si (100) through these process steps with x-ray reflectivity (XRR). Both HF wet clean and in situ plasma clean produce NiSi films with similar properties. We also did not find a significant impact of the anneal method. Films annealed at 360C for 5s or at 320C for 30s produced similar XRR spectra. However, Ni films deposited on Si after an in situ RF sputter etch with Ar ions have a low-density voided region below the surface, which cannot be removed by annealing. A similar intermediate layer is reported in the literature when annealing Pt on Si in an oxygen-containing ambient. Transistors produced with NiSi contacts have undesirable characteristics (leakage) if the substrate is cleaned by RF etch prior to Ni deposition. Most likely, the RF sputter edge encourages the formation of NiSi2 pyramids at very low temperatures ($<400^{\circ}$C) or the diffusion of Ni from the source-drain regions of the transistor into the channel.

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Authors

  • Stefan Zollner

  • Dana Dunn

    University of Texas at Arlington, Peoples Friendship University of the Russia, TSAAPT Officer, University of Texas at El Paso, Department of Chemistry, Stephen F. Austin University, Department of Physics, Stephen F. Austin University, Highland Park High School, Dallas, Texas, Lamar High School, Arlington, Texas, Angelo State University, Abilene Christian University, Southern Nazarene University, Texas Tech University, Sam Houston State University, University of Texas at Austin, Cornell University, University of Houston, University of Texas Center for Relativity, Ion Beam Modification and Analysis Laboratory (IBMAL), University of North Texas, University of North Texas, School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, NanoTech Institute, University of Texas at Dallas, Richardson, TX 75083, Department of Physics, The University of Texas at Arlington, Arlington, Texas 76019, Department of Physics, University of Texas at Arlington, Arlington, TX, 76019, UTA High Energy Physics Group, Univ. of Texas, Arlington, USA, KAERI Korea, Changwon National Univ., Korea, Rutgers University, Iowa State University, Rigaku/MSC, Texas Christian University, Dept. of Physics, Changwon National University, Department of Physics, University of North Texas, Department of Chemistry and Biochemistry, Arizona State University, Research Center, Philip Morris USA, Harrington Department Bioengineering Arizona State University, Universidad Autonoma de Colima, Universidad de Buenos Aires, Department of Physics, University of Texas, Arlington, Chair, Department of Physics, University of Texas at Arlington, Dean of Science, University of Texas at Arlington, President, University of Texas at Arlington, Department of Electrical Engineering, Princeton University, Department of Physics, Texas A\&M University, NanoFAB Center and Electrical Engineering Department, University of Texas at Arlington, University of Texas at San Antonio, SEMATECH, University of Texas at Dallas, CINVESTAV Queretaro, Mexico and University of Texas at Dallas, Texas A\&M University, Departamento de F\&#039;isica, FCEN, Universidad de Buenos Aires, Freescale Semiconductor, Inc., Department of Physics, UT Austin, Physics Department, The University of Texas at Arlington, Department of Physics, University of Texas at Arlington, Tolar High School, Granbury High School

  • Dana Dunn

    University of Texas at Arlington, Peoples Friendship University of the Russia, TSAAPT Officer, University of Texas at El Paso, Department of Chemistry, Stephen F. Austin University, Department of Physics, Stephen F. Austin University, Highland Park High School, Dallas, Texas, Lamar High School, Arlington, Texas, Angelo State University, Abilene Christian University, Southern Nazarene University, Texas Tech University, Sam Houston State University, University of Texas at Austin, Cornell University, University of Houston, University of Texas Center for Relativity, Ion Beam Modification and Analysis Laboratory (IBMAL), University of North Texas, University of North Texas, School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, NanoTech Institute, University of Texas at Dallas, Richardson, TX 75083, Department of Physics, The University of Texas at Arlington, Arlington, Texas 76019, Department of Physics, University of Texas at Arlington, Arlington, TX, 76019, UTA High Energy Physics Group, Univ. of Texas, Arlington, USA, KAERI Korea, Changwon National Univ., Korea, Rutgers University, Iowa State University, Rigaku/MSC, Texas Christian University, Dept. of Physics, Changwon National University, Department of Physics, University of North Texas, Department of Chemistry and Biochemistry, Arizona State University, Research Center, Philip Morris USA, Harrington Department Bioengineering Arizona State University, Universidad Autonoma de Colima, Universidad de Buenos Aires, Department of Physics, University of Texas, Arlington, Chair, Department of Physics, University of Texas at Arlington, Dean of Science, University of Texas at Arlington, President, University of Texas at Arlington, Department of Electrical Engineering, Princeton University, Department of Physics, Texas A\&M University, NanoFAB Center and Electrical Engineering Department, University of Texas at Arlington, University of Texas at San Antonio, SEMATECH, University of Texas at Dallas, CINVESTAV Queretaro, Mexico and University of Texas at Dallas, Texas A\&M University, Departamento de F\&#039;isica, FCEN, Universidad de Buenos Aires, Freescale Semiconductor, Inc., Department of Physics, UT Austin, Physics Department, The University of Texas at Arlington, Department of Physics, University of Texas at Arlington, Tolar High School, Granbury High School

  • Dana Dunn

    University of Texas at Arlington, Peoples Friendship University of the Russia, TSAAPT Officer, University of Texas at El Paso, Department of Chemistry, Stephen F. Austin University, Department of Physics, Stephen F. Austin University, Highland Park High School, Dallas, Texas, Lamar High School, Arlington, Texas, Angelo State University, Abilene Christian University, Southern Nazarene University, Texas Tech University, Sam Houston State University, University of Texas at Austin, Cornell University, University of Houston, University of Texas Center for Relativity, Ion Beam Modification and Analysis Laboratory (IBMAL), University of North Texas, University of North Texas, School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, NanoTech Institute, University of Texas at Dallas, Richardson, TX 75083, Department of Physics, The University of Texas at Arlington, Arlington, Texas 76019, Department of Physics, University of Texas at Arlington, Arlington, TX, 76019, UTA High Energy Physics Group, Univ. of Texas, Arlington, USA, KAERI Korea, Changwon National Univ., Korea, Rutgers University, Iowa State University, Rigaku/MSC, Texas Christian University, Dept. of Physics, Changwon National University, Department of Physics, University of North Texas, Department of Chemistry and Biochemistry, Arizona State University, Research Center, Philip Morris USA, Harrington Department Bioengineering Arizona State University, Universidad Autonoma de Colima, Universidad de Buenos Aires, Department of Physics, University of Texas, Arlington, Chair, Department of Physics, University of Texas at Arlington, Dean of Science, University of Texas at Arlington, President, University of Texas at Arlington, Department of Electrical Engineering, Princeton University, Department of Physics, Texas A\&M University, NanoFAB Center and Electrical Engineering Department, University of Texas at Arlington, University of Texas at San Antonio, SEMATECH, University of Texas at Dallas, CINVESTAV Queretaro, Mexico and University of Texas at Dallas, Texas A\&M University, Departamento de F\&#039;isica, FCEN, Universidad de Buenos Aires, Freescale Semiconductor, Inc., Department of Physics, UT Austin, Physics Department, The University of Texas at Arlington, Department of Physics, University of Texas at Arlington, Tolar High School, Granbury High School

  • Dana Dunn

    University of Texas at Arlington, Peoples Friendship University of the Russia, TSAAPT Officer, University of Texas at El Paso, Department of Chemistry, Stephen F. Austin University, Department of Physics, Stephen F. Austin University, Highland Park High School, Dallas, Texas, Lamar High School, Arlington, Texas, Angelo State University, Abilene Christian University, Southern Nazarene University, Texas Tech University, Sam Houston State University, University of Texas at Austin, Cornell University, University of Houston, University of Texas Center for Relativity, Ion Beam Modification and Analysis Laboratory (IBMAL), University of North Texas, University of North Texas, School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, NanoTech Institute, University of Texas at Dallas, Richardson, TX 75083, Department of Physics, The University of Texas at Arlington, Arlington, Texas 76019, Department of Physics, University of Texas at Arlington, Arlington, TX, 76019, UTA High Energy Physics Group, Univ. of Texas, Arlington, USA, KAERI Korea, Changwon National Univ., Korea, Rutgers University, Iowa State University, Rigaku/MSC, Texas Christian University, Dept. of Physics, Changwon National University, Department of Physics, University of North Texas, Department of Chemistry and Biochemistry, Arizona State University, Research Center, Philip Morris USA, Harrington Department Bioengineering Arizona State University, Universidad Autonoma de Colima, Universidad de Buenos Aires, Department of Physics, University of Texas, Arlington, Chair, Department of Physics, University of Texas at Arlington, Dean of Science, University of Texas at Arlington, President, University of Texas at Arlington, Department of Electrical Engineering, Princeton University, Department of Physics, Texas A\&M University, NanoFAB Center and Electrical Engineering Department, University of Texas at Arlington, University of Texas at San Antonio, SEMATECH, University of Texas at Dallas, CINVESTAV Queretaro, Mexico and University of Texas at Dallas, Texas A\&M University, Departamento de F\&#039;isica, FCEN, Universidad de Buenos Aires, Freescale Semiconductor, Inc., Department of Physics, UT Austin, Physics Department, The University of Texas at Arlington, Department of Physics, University of Texas at Arlington, Tolar High School, Granbury High School

  • Dana Dunn

    University of Texas at Arlington, Peoples Friendship University of the Russia, TSAAPT Officer, University of Texas at El Paso, Department of Chemistry, Stephen F. Austin University, Department of Physics, Stephen F. Austin University, Highland Park High School, Dallas, Texas, Lamar High School, Arlington, Texas, Angelo State University, Abilene Christian University, Southern Nazarene University, Texas Tech University, Sam Houston State University, University of Texas at Austin, Cornell University, University of Houston, University of Texas Center for Relativity, Ion Beam Modification and Analysis Laboratory (IBMAL), University of North Texas, University of North Texas, School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, NanoTech Institute, University of Texas at Dallas, Richardson, TX 75083, Department of Physics, The University of Texas at Arlington, Arlington, Texas 76019, Department of Physics, University of Texas at Arlington, Arlington, TX, 76019, UTA High Energy Physics Group, Univ. of Texas, Arlington, USA, KAERI Korea, Changwon National Univ., Korea, Rutgers University, Iowa State University, Rigaku/MSC, Texas Christian University, Dept. of Physics, Changwon National University, Department of Physics, University of North Texas, Department of Chemistry and Biochemistry, Arizona State University, Research Center, Philip Morris USA, Harrington Department Bioengineering Arizona State University, Universidad Autonoma de Colima, Universidad de Buenos Aires, Department of Physics, University of Texas, Arlington, Chair, Department of Physics, University of Texas at Arlington, Dean of Science, University of Texas at Arlington, President, University of Texas at Arlington, Department of Electrical Engineering, Princeton University, Department of Physics, Texas A\&M University, NanoFAB Center and Electrical Engineering Department, University of Texas at Arlington, University of Texas at San Antonio, SEMATECH, University of Texas at Dallas, CINVESTAV Queretaro, Mexico and University of Texas at Dallas, Texas A\&M University, Departamento de F\&#039;isica, FCEN, Universidad de Buenos Aires, Freescale Semiconductor, Inc., Department of Physics, UT Austin, Physics Department, The University of Texas at Arlington, Department of Physics, University of Texas at Arlington, Tolar High School, Granbury High School

  • Dana Dunn

    University of Texas at Arlington, Peoples Friendship University of the Russia, TSAAPT Officer, University of Texas at El Paso, Department of Chemistry, Stephen F. Austin University, Department of Physics, Stephen F. Austin University, Highland Park High School, Dallas, Texas, Lamar High School, Arlington, Texas, Angelo State University, Abilene Christian University, Southern Nazarene University, Texas Tech University, Sam Houston State University, University of Texas at Austin, Cornell University, University of Houston, University of Texas Center for Relativity, Ion Beam Modification and Analysis Laboratory (IBMAL), University of North Texas, University of North Texas, School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, NanoTech Institute, University of Texas at Dallas, Richardson, TX 75083, Department of Physics, The University of Texas at Arlington, Arlington, Texas 76019, Department of Physics, University of Texas at Arlington, Arlington, TX, 76019, UTA High Energy Physics Group, Univ. of Texas, Arlington, USA, KAERI Korea, Changwon National Univ., Korea, Rutgers University, Iowa State University, Rigaku/MSC, Texas Christian University, Dept. of Physics, Changwon National University, Department of Physics, University of North Texas, Department of Chemistry and Biochemistry, Arizona State University, Research Center, Philip Morris USA, Harrington Department Bioengineering Arizona State University, Universidad Autonoma de Colima, Universidad de Buenos Aires, Department of Physics, University of Texas, Arlington, Chair, Department of Physics, University of Texas at Arlington, Dean of Science, University of Texas at Arlington, President, University of Texas at Arlington, Department of Electrical Engineering, Princeton University, Department of Physics, Texas A\&M University, NanoFAB Center and Electrical Engineering Department, University of Texas at Arlington, University of Texas at San Antonio, SEMATECH, University of Texas at Dallas, CINVESTAV Queretaro, Mexico and University of Texas at Dallas, Texas A\&M University, Departamento de F\&#039;isica, FCEN, Universidad de Buenos Aires, Freescale Semiconductor, Inc., Department of Physics, UT Austin, Physics Department, The University of Texas at Arlington, Department of Physics, University of Texas at Arlington, Tolar High School, Granbury High School