Anomalous Angular Nonstoichiometric Sputtering Yield of a Ga-In Eutectic Target

POSTER

Abstract

Sputtering is a thin film deposition technique in which an ion beam fired at a target ejects atoms from the top several layers of the target's surface allowing these atoms to deposit as a thin film on any nearby surface. We employed this technique to deposit the first layers of the Ga-In target onto an aluminum foil which we then analyzed using RBS to determine the angular distribution of sputtered material. The purpose of this experiment is to expand the base of scientific knowledge on sputtering and better understand the sputtering process in hopes of improving models of this process. The Ga-In eutectic alloy used in this experiment has a Gibbsian segregation, in which the first atomic monolayer of the surface is at least 94{\%} Indium, while the second layer is primarily Gallium, as reflected in the alloy's bulk concentration (16.5{\%} Indium). Therefore, the majority of Gallium deposited by sputtering originates from the second atomic monolayer or deeper in the sample. The eutectic alloy is a liquid at room temperature, which is ideal for sputtering processes. Liquid targets are self-healing; their composition does not change over time as atoms are ejected from their surface. Since we know that the majority of Gallium sputtered from the Ga-In target originates from below the first atomic monolayer, studying the angular distribution of Gallium isotopes reveals the behavior of atoms ejected from atomic layers beneath the first monolayer of a target during sputtering.

Authors

  • Mariel Kerbacher

    Southwestern University

  • J.W. Deaton

    University of Louisiana at Lafayette

  • Edward Fry

    Institute for Astronomy, ETH, National Optical Astronomy Observatory, Department of Physics, ETH, Texas A&M University, LANL, American Physical Society, Society of Physics Students National Office, Texas Tech University, University of Texas, Universite d'Orleans, Steward Observatory, University of Arizona, Texas A\&M University-Commerce, Texas A\&M University, Institute for Quantum Electronics, ETH Zurich, Department of Engineering and Applied Science, Harvard University, Rice University, University of Houston, Bucknell University, Department of Physics, Texas A\&M University, Air Force Research Laboratory, Department of Physics, Texas A\&M University, College Station, TX 77843, Department of Physics and MIC, Texas A\&M University, University of Texas at Arlington, Changwon National University, University of North Texas, Southwestern University, The Pennsylvania State University, University of Dallas, UT Southwestern Medical Center, Naval Air Systems Command, Institute for Quantum Studies and Department of Physics, Texas A\&M University, College Station, TX 77843, The University of Texas at Arlington, TCU, ELTE, National Institute of Chemistry, Ljubljana, Slovenia, Texas Christian University, Fort Worth, TX, Dept. of Physics, Texas A\&M University-Commerce, Univ. of North Texas, Los Alamos National Laboratory, Oswego State University of New York, Lee College, University of Texas at San Antonio, UTSA-Professor, UNT, Sam Houston State University, Sewanee: The University of the South, Director of Education for NSF, Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, Sackler School of Chemistry, Tel-Aviv University, Rice University, Department of Physics and Astronomy, Houston, TX 77005, Center for Nonlinear Dynamics, University of Texas at Austin

  • Edward Fry

    Institute for Astronomy, ETH, National Optical Astronomy Observatory, Department of Physics, ETH, Texas A&M University, LANL, American Physical Society, Society of Physics Students National Office, Texas Tech University, University of Texas, Universite d'Orleans, Steward Observatory, University of Arizona, Texas A\&M University-Commerce, Texas A\&M University, Institute for Quantum Electronics, ETH Zurich, Department of Engineering and Applied Science, Harvard University, Rice University, University of Houston, Bucknell University, Department of Physics, Texas A\&M University, Air Force Research Laboratory, Department of Physics, Texas A\&M University, College Station, TX 77843, Department of Physics and MIC, Texas A\&M University, University of Texas at Arlington, Changwon National University, University of North Texas, Southwestern University, The Pennsylvania State University, University of Dallas, UT Southwestern Medical Center, Naval Air Systems Command, Institute for Quantum Studies and Department of Physics, Texas A\&M University, College Station, TX 77843, The University of Texas at Arlington, TCU, ELTE, National Institute of Chemistry, Ljubljana, Slovenia, Texas Christian University, Fort Worth, TX, Dept. of Physics, Texas A\&M University-Commerce, Univ. of North Texas, Los Alamos National Laboratory, Oswego State University of New York, Lee College, University of Texas at San Antonio, UTSA-Professor, UNT, Sam Houston State University, Sewanee: The University of the South, Director of Education for NSF, Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, Sackler School of Chemistry, Tel-Aviv University, Rice University, Department of Physics and Astronomy, Houston, TX 77005, Center for Nonlinear Dynamics, University of Texas at Austin

  • D.L. Weathers

    UNT