Preliminary results of porous silicon synthesis by a non-contact method

ORAL

Abstract

The goal of this work is to produce porous silicon (p-Si) thin films on n-type and p-type crystalline Si substrates with various dopant types by using a light-induced hydrofluoric acid (HF) synthesis technique. The samples were treated using an expanded beam of a He-Ne laser to produce a localized electric field on bulk crystalline silicon while the samples were immersed in hydro-fluoric acid for varying amounts of time. Samples are now being analyzed by photoluminescence spectroscopy to determine if there is visible light emission, which is characteristic of p-Si. In addition, pore size was estimated by examining SEM micrographs, which indicate pore wall thicknesses on the order of one micron, with a typical pore size of two microns or less. The physical structure and size of the porous regions were found to vary with the concentration and dopant type of the crystalline Si wafer. In contrast to previous published reports, only the side of the sample illuminated with the He-Ne beam during HF synthesis was found to produce the porous thin film.

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Authors

  • Kristin Peterson

    Angelo State University

  • Toni Sauncy

    Angelo State University, Angelo State University Physics

  • Tim Dallas

    Texas Tech University, Texas Tech University Electrical Engineering

  • Edward Fry

    Institute for Astronomy, ETH, National Optical Astronomy Observatory, Department of Physics, ETH, Texas A&M University, LANL, American Physical Society, Society of Physics Students National Office, Texas Tech University, University of Texas, Universite d'Orleans, Steward Observatory, University of Arizona, Texas A\&M University-Commerce, Texas A\&M University, Institute for Quantum Electronics, ETH Zurich, Department of Engineering and Applied Science, Harvard University, Rice University, University of Houston, Bucknell University, Department of Physics, Texas A\&M University, Air Force Research Laboratory, Department of Physics, Texas A\&M University, College Station, TX 77843, Department of Physics and MIC, Texas A\&M University, University of Texas at Arlington, Changwon National University, University of North Texas, Southwestern University, The Pennsylvania State University, University of Dallas, UT Southwestern Medical Center, Naval Air Systems Command, Institute for Quantum Studies and Department of Physics, Texas A\&M University, College Station, TX 77843, The University of Texas at Arlington, TCU, ELTE, National Institute of Chemistry, Ljubljana, Slovenia, Texas Christian University, Fort Worth, TX, Dept. of Physics, Texas A\&M University-Commerce, Univ. of North Texas, Los Alamos National Laboratory, Oswego State University of New York, Lee College, University of Texas at San Antonio, UTSA-Professor, UNT, Sam Houston State University, Sewanee: The University of the South, Director of Education for NSF, Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, Sackler School of Chemistry, Tel-Aviv University, Rice University, Department of Physics and Astronomy, Houston, TX 77005, Center for Nonlinear Dynamics, University of Texas at Austin