Lifetime expectancy and characterization of MEMS chevron actuators

This work will present a detailed reliability and lifetime expectancy study of electrothermal micro-actuators under different actuation scenarios. The actuators are designed using the topmost poly-silicon layer of Sandia National Laboratories' SUMMiT V process. The legs of the actuator are $\sim $ 395 $\mu $m in length, 2.25 $\mu $m in thickness, with an offset angle of 5\r{ }. A custom made optical characterization setup was built to conduct the reliability and lifetime testing of the device. The test involved first identifying key power levels and then actuating the devices until the onset of plasticity. The entire test setup was automated by use of custom built LabView virtual instruments (VIs).