MBE Growth and Structural Characterization of Si-SiO$_{x}$-Si Films

POSTER

Abstract

Since the idea of a Si-SiO-Si superlattice was first proposed, two main groups have been associated with investigations of Si-SiO-Si superlattices - Tsu$^{i}$ and Lockwood$^{ii}$. Both groups have synthesized Si-SiO-Si structures on the technologically important Si (100) orientation. Lockwood has demonstrated visible light emission using photoluminescence (PL), and Tsu has demonstrated visible light emission using both electroluminescence and PL. The results of both groups show that the light emission can be tuned via quantum confinement within the Si quantum wells. We present the initial stages of an investigation into the synthesis and utility of Si-O layers as barriers. TEM and depth profiling XPS are presented as evidence of the crystalline growth of Si on ultrathin SiO$_{x}$ layers. \\[4pt] [1] R. Tsu, Nature \textbf{364}, 19 (1993).\\[0pt] [2] Z. H. Lu, D. J. Lockwood and J. M. Barlbeau, Nature \textbf{378}, 258(1995).

Authors

  • Ryan Cottier

    Texas State University

  • Mikhail Zhernenkov

    Angelo State University Department of Physics, Department of Electrical and Computer Engineering, Texas Tech University, The University of Texas at San Antonio, Univeristy of Central Florida-College of Optics and Photonics, BAE Systems, University of Alberta Department of Physics, Istanbul University Department of Physics, Texas Tech University Department of Physics, Istanbul University, Beyazit, University of Alberta, Edmonton, UTD, TAMS at UNT, Department of Mechanical Engineering, The University of Texas at El Paso, El Paso, TX 79968, College of Nanoscale Science and Engineering, University at Albany, Dept. of Physics, University of New Orleans, University of Texas at Arlington, Prairie View A\&M University, Chemistry, UTSA, Sciprint.org, Texas Tech University Department of Electrical and Computer Engineering, Texas State University, Punjab U, Dept. of Mechanical Engineering, University of Texas, Dept. of Physics, Texas State University, Department of Physics, University of Texas at Dallas, Richardson TX 75080, Department of Physics, Texas A\&M University, College Station, Texas 77843-4242, Department of Physics, University of California, San Diego, California 92093, Universidade Federal Fluminense, Volta Redonda, RJ, Brazil, Universidade de Sao Paulo, Sao Paulo, SP, Brazil, Department of Physics, Texas A\&M University, University of Colorado at Colorado Springs, Federal University of Rio Grande do Norte, University of Texas Arlington, Harvard-Smithsonian Center for Astrophysics, Max Plank Institute, Dresden, Germany, Education Consultant, APS, The University of Texas M. D. Anderson Cancer Center, Department of Physics, Texas A\&M University, College Station, TX 77843, LANSCE, Los Alamos National Laboratory

  • Mikhail Zhernenkov

    Angelo State University Department of Physics, Department of Electrical and Computer Engineering, Texas Tech University, The University of Texas at San Antonio, Univeristy of Central Florida-College of Optics and Photonics, BAE Systems, University of Alberta Department of Physics, Istanbul University Department of Physics, Texas Tech University Department of Physics, Istanbul University, Beyazit, University of Alberta, Edmonton, UTD, TAMS at UNT, Department of Mechanical Engineering, The University of Texas at El Paso, El Paso, TX 79968, College of Nanoscale Science and Engineering, University at Albany, Dept. of Physics, University of New Orleans, University of Texas at Arlington, Prairie View A\&M University, Chemistry, UTSA, Sciprint.org, Texas Tech University Department of Electrical and Computer Engineering, Texas State University, Punjab U, Dept. of Mechanical Engineering, University of Texas, Dept. of Physics, Texas State University, Department of Physics, University of Texas at Dallas, Richardson TX 75080, Department of Physics, Texas A\&M University, College Station, Texas 77843-4242, Department of Physics, University of California, San Diego, California 92093, Universidade Federal Fluminense, Volta Redonda, RJ, Brazil, Universidade de Sao Paulo, Sao Paulo, SP, Brazil, Department of Physics, Texas A\&M University, University of Colorado at Colorado Springs, Federal University of Rio Grande do Norte, University of Texas Arlington, Harvard-Smithsonian Center for Astrophysics, Max Plank Institute, Dresden, Germany, Education Consultant, APS, The University of Texas M. D. Anderson Cancer Center, Department of Physics, Texas A\&M University, College Station, TX 77843, LANSCE, Los Alamos National Laboratory

  • Mikhail Zhernenkov

    Angelo State University Department of Physics, Department of Electrical and Computer Engineering, Texas Tech University, The University of Texas at San Antonio, Univeristy of Central Florida-College of Optics and Photonics, BAE Systems, University of Alberta Department of Physics, Istanbul University Department of Physics, Texas Tech University Department of Physics, Istanbul University, Beyazit, University of Alberta, Edmonton, UTD, TAMS at UNT, Department of Mechanical Engineering, The University of Texas at El Paso, El Paso, TX 79968, College of Nanoscale Science and Engineering, University at Albany, Dept. of Physics, University of New Orleans, University of Texas at Arlington, Prairie View A\&M University, Chemistry, UTSA, Sciprint.org, Texas Tech University Department of Electrical and Computer Engineering, Texas State University, Punjab U, Dept. of Mechanical Engineering, University of Texas, Dept. of Physics, Texas State University, Department of Physics, University of Texas at Dallas, Richardson TX 75080, Department of Physics, Texas A\&M University, College Station, Texas 77843-4242, Department of Physics, University of California, San Diego, California 92093, Universidade Federal Fluminense, Volta Redonda, RJ, Brazil, Universidade de Sao Paulo, Sao Paulo, SP, Brazil, Department of Physics, Texas A\&M University, University of Colorado at Colorado Springs, Federal University of Rio Grande do Norte, University of Texas Arlington, Harvard-Smithsonian Center for Astrophysics, Max Plank Institute, Dresden, Germany, Education Consultant, APS, The University of Texas M. D. Anderson Cancer Center, Department of Physics, Texas A\&M University, College Station, TX 77843, LANSCE, Los Alamos National Laboratory

  • Mikhail Zhernenkov

    Angelo State University Department of Physics, Department of Electrical and Computer Engineering, Texas Tech University, The University of Texas at San Antonio, Univeristy of Central Florida-College of Optics and Photonics, BAE Systems, University of Alberta Department of Physics, Istanbul University Department of Physics, Texas Tech University Department of Physics, Istanbul University, Beyazit, University of Alberta, Edmonton, UTD, TAMS at UNT, Department of Mechanical Engineering, The University of Texas at El Paso, El Paso, TX 79968, College of Nanoscale Science and Engineering, University at Albany, Dept. of Physics, University of New Orleans, University of Texas at Arlington, Prairie View A\&M University, Chemistry, UTSA, Sciprint.org, Texas Tech University Department of Electrical and Computer Engineering, Texas State University, Punjab U, Dept. of Mechanical Engineering, University of Texas, Dept. of Physics, Texas State University, Department of Physics, University of Texas at Dallas, Richardson TX 75080, Department of Physics, Texas A\&M University, College Station, Texas 77843-4242, Department of Physics, University of California, San Diego, California 92093, Universidade Federal Fluminense, Volta Redonda, RJ, Brazil, Universidade de Sao Paulo, Sao Paulo, SP, Brazil, Department of Physics, Texas A\&M University, University of Colorado at Colorado Springs, Federal University of Rio Grande do Norte, University of Texas Arlington, Harvard-Smithsonian Center for Astrophysics, Max Plank Institute, Dresden, Germany, Education Consultant, APS, The University of Texas M. D. Anderson Cancer Center, Department of Physics, Texas A\&M University, College Station, TX 77843, LANSCE, Los Alamos National Laboratory