Dependence of calixarene electron beam sensitivity and contrast on functionalization

ORAL

Abstract

Calixarenes form a group of compounds that have been studied as high resolution, high contrast electron beam resists by many groups. They have been shown to be capable of high resolution. While the ultimate resolution may be limited by the size of the calix molecule ($\sim $ 1 nm), both sensitivity and contrast also contribute to their performance. In this study, a particular calixarene molecule has been tested for sensitivity and contrast with differing numbers of attached functional groups. The specific calixarene contained 6 benzene rings and was locked conformationally using bridging xylenyl groups to produce two conformations: a cone conformer and a 1-2-3-alternate conformer. To these calix[6]arenes various numbers of allyl groups were added to improve their electron beam sensitivity. The number of these added groups ranged from 0 to 8 groups. The resulting resists (1{\%} solution with chlorobenzene) were subjected to electron beam exposure. Contrast curves for the cone and alternate conformers were measured by AFM. From this data, both sensitivity and contrast of the resists were found as a function of the number of attached groups. These results and comparison with others will be discussed.

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Authors

  • Gregory Spencer

    Texas State University-San Marcos, Texas State University

  • Andrey Chabanov

    West Texas A\&M University, Rhodes College, Texas Woman's University, University of Texas at San Antonio, Texas A\&M University, Department of Physics, University of Texas at Arlington, Texas State University, Pajarito Scientific Corporation, Idaho National Laboratory, Duke University, UNC, Department of Chemistry, UTSA, Department of Physics and Astronomy, UTSA, The University of Texas at San Antonio, Harvar-Smithsonian Center for Astrophysics, University of New Mexico, Maria Mitchel Observatory, NRAO, University of Alabama, Trinity University, Department of Physics and Astronomy, University of Texas at San Antonio, San Antonio, Texas 78249, V. Alecsandri College, Bacau, Romania, University of Texas at Dallas, Argonne National Laboratory, Western Michigan University, Institute of Physics, UNAM, Mexico, University of North Texas - Chemistry, University of St. Thomas, SwRI San Antonio, Alan G. MacDiarmid NanoTech Institute, University of Texas at Dallas, Department of Electrical and Computer Engineering, University of Texas at Arlington, Department of Physics, University of Texas at Brownsville, SciPrint.org, The University of Texas at Austin, Georgia Tech, MIT, University of Tennessee, University of Michigan, ORNL, Texas A&M University-Commerce, University of Texas San Antonio, University of Texas at Brownsville, University of Dallas, Sternberg Astronomical Institute, SwRI, CU-Boulder, SwRI/UTSA, Southwest Research Institute, JILA, University of Colorado, Department of Physics, Texas A\&M University, Stephen F. Austin State University, Angelo State University, St. Mary's University, Physics Department, University of South Florida, CINVESTAV, Queretaro, Mexico, Department of Physics, UCSD, LANSCE, Los Alamos National Laboratory, Department of Physics and Astronomy, Texas A\&M University, Texas A\&M University: Department of Physics, Texas Christian University, Fort Worth, TX, Paschal High School, Fort Worth, TX, Tarleton State University, Stephenville, TX, Paine College, Augusta, GA, University of Houston, University of Texas at Arlington, IREAP, Department of Physics, University of Maryland, Air Force Research Laboratory, Institute for Quantum Studies and Department of Physics, Texas A\&M Universtity, College Station, Texas 77843, USA, Max-Planck Institut for Kernphysik, Saupfercheckweg 1,D-69117 Heidelberg, Germany, The National Center for Mathematics and Physics, P.O. Box 6086, KACST, Riyadh 11442, Saudi Arabia

  • Anup Bandyopadhyay

    Texas State University

  • Michael Blanda

    Texas State University