TMAH wet etching of silicon micro- and nano-fins for selective sidewall epitaxy of III-Nitride semiconductors

ORAL

Abstract

We describe formation of silicon micro- and nano-fins, with (111)-plane sidewall facets, for selective sidewall epitaxy of III-Nitride semiconductors. The fins are produced by wet etching (110)-oriented silicon wafers. Silicon dioxide is deposited using plasma enhanced chemical vapor deposition for producing a hard mask. The silicon dioxide is patterned using photo- and electron-beam lithography for micro- and nano-fins, respectively, followed by wet etching in hydrofluoric acid. Wet etching to produce the silicon fins is carried out using tetramethyl ammonium hydroxide (TMAH) diluted with isopropyl alcohol (IPA). Atomic force microscopy and scanning electron microscopy are used to determine morphology including the surface roughness of the area between fins and the etching rate of silicon. We tune the etching time, temperature, and percentage of IPA in order to get the best surface on both (111) and (110) planes. Adding IPA is found to alter the etch rate and improve the surface between the fins without adversely affecting the sidewall morphology.

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Authors

  • Lianci Liu

    Texas Tech University

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos