Calix[6]arene electron beam sensitivity and contrast dependence on functionalization and molecular weight

POSTER

Abstract

Calixarenes are macrocyclic molecules that have shown high resolution as electron beam resists. Earlier work has demonstrated that the sensitivity can be increased by adding functional groups to the molecular rim of these ring-shaped molecules. However, these earlier studies used either unfunctionalized resists or ones that were fully functionalized. In this study, the number of functional groups added to a calix[6]arene structure was deliberately varied from zero to the maximum possible number of groups. This allowed direct observation of the effect of the number of attached groups on the sensitivity. Two different conformers were used; a cone conformer and the 1,2,3-alternate conformer. Both used xylenyl groups as bridging units, giving conformationally-locked monomers. The number of added allyl groups was varied from 0 to 8. The resulting nine resists were exposed and contrast curves were measured by AFM. This allowed measurement of both resist sensitivity and contrast. The sensitivity was found to be a strong function of the number of pendant groups. Also the effect of molecular weight on sensitivity was found for the heaviest resist, after the functional group effect saturated between four and six groups. These results and comparison with others will be discussed.

Authors

  • Gregory Spencer

    Texas State University-San Marcos

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos