Spectroscopic analysis of temperature dependent growth of WO3 and W0.95Ti0.05O3 thin films

POSTER

Abstract

We present a comparative spectroscopic study of the morphology and composition of tungsten oxide WO$_{3}$ and W$_{0.95}$Ti$_{0.05}$O$_{3}$ thin films, grown by radio frequency magnetron reactive sputtering at substrate temperatures varied from room temperature (RT) to 500~$^{\circ}$C, using Raman and X-ray photoelectron spectroscopy (XPS). The Raman results demonstrate the occurrence of a phase transformation from a monoclinic WO$_{3}$ structure to an orthorhombic or tetragonal configuration in the W$_{0.95}$Ti$_{0.05}$O$_{3}$ thin films. This remark is based on the observed shifting, with Ti doping, to lower frequencies of the Raman peaks corresponding to W-O-W stretching modes of WO$_{3}$ at 806 and 711 cm$^{-1}$, to 793 and 690 cm$^{-1}$, respectively. Also, higher growth temperatures are required to obtain crystalline microstructure for Ti-doped WO$_{3}$ films than for WO$_{3}$ films. XPS data indicate that the doped material has a reduced WO$_{3-x}$ stoichiometry at the surface, with the presence of W$^{+6}$ and W$^{+5}$ tungsten oxidation states; this observation could also be related to the existence of a different structural phase of this material, corroborating with the Raman measurements.

Authors

  • Young Yun

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos

  • Allan Headley

    Texas A\&M, Sam Houston State University, Southern Methodist University, Dept of Physics, Texas Tech University, Depts of Cell Physiology and Molecular Biophysics, Texas Tech University HSC, Texas Tech University, Lee College, Texas A\&M University, Texas A\&M Univ.-Commerce, University of North Texas, Texas A\&M University and Princeton University, Princeton University, The University of North Texas, University of Texas at Austin, Center for High Energy Density Science, University of Texas at Austin, Institute for Fusion Studies, University of Texas at Austin, UT Arlington, Stephen F. Austin State University, Texas A&M University--Commerce, University of Texas at Dallas, University of Texas at El Paso, Department of Physics, The University of Texas at Dallas, Department of Physics and Astronomy, Francis Marion University, University of Texas at Brownsville, Texas State University--San Marcos, UTSA, Northwestern University, Rice University, Abilene Christian University, Texas Southern University, Department of Physics, Southern Methodist University, Dallas, Texas A\&M University Cyclotron Institute, Sciprint.org, University of Texas MD Anderson Cancer Center, University of Texas at San Antonio, Paschal High School, Fort Worth, TX, Department d'Enginyeria Electronica, Universitat Autonoma de Barcelona, Department of Physics, Texas State University at San Marcos, Texas State University at San Marcos, Angelo State University, Texas State University-San Marcos, Department of Surgery, The University of Texas Southwestern Medical Center, Dallas, TX 75390, Department of Medicine, Baylor College of Medicine, Department of Bioengineering, Rice University, Department of Physics and Astronomy, Rice University, Department of Surgery, University of Texas Southwestern Medical Center, University of Texas at Dallas, Physics, Viginia State University, Jefferson Laboratory, Trinity University, LIGO, UTB-TSC, Mount Holyoke College, Texas A&M University, Electrical and Computer Engineering, TAMU, American Institute of Physics, University of Texas at Arlington, Texas Christian University, Fort Worth, TX, University of Pennsylvania, Philadelphia, PA, University of Missouri-Columbia, Columbia, MO, Paine College, Augusta, GA, Univ. of Edinburgh, INFN-LNS, INFN LNS CATANIA ITALY, Arkansas Technical University, AR, USA, Cyclotron Institute Texas A\&M University College Station Usa, and Heather Galloway, Texas State University--San Marcos