Sub-Wavelength Lithography Using Nitrogen-Vacancy Color Centers in Diamond

ORAL

Abstract

In classical optical lithography, resolution is limited to about half of the wavelength of the source used in the process. However, as we reach high frequencies (Deep UV or X-ray), several problems and difficulties occur. Over the last decade, several techniques were suggested to go beyond the classical limit. In 2010, Liao, Alamri, and Zubairy proposed a method using two lasers with different frequencies; one is used to induce Rabi oscillations between two states and the other is used to excite the ground state to a third state, thus writing the lithography pattern. In this presentation I will talk about an experimental approach to implement their method of sub-wavelength lithography using optical and magnetic properties of NV color centers in diamond.

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Authors

  • Fahad Alghannam

    • Institute for Quantum Studies and Department of Physics and Astronomy, Texas A\&M University, College Station, Texas 77843-4242, USA

  • Philip Hemmer

    • Department of Electrical and Computer Engineering, Texas A\&M University, College Station, TX 77843, USA

  • Zeyang Liao

    • Institute for Quantum Studies and Department of Physics and Astronomy, Texas A\&M University, College Station, Texas 77843-4242, USA
    • Institute for Quantum Science and Engineering and Department of Physics and Astronomy, Texas A\&M University, College Station, TX 77843-4242, USA

  • Mohammad Al-Amri

    • he National Center for Mathematics and Physics, KACST, P.O. Box 6086, Riyadh 11442, Saudi Arabia

  • M. Suhail Zubairy

    • Institute for Quantum Studies and Department of Physics and Astronomy, Texas A\&M University, College Station, Texas 77843-4242, USA
    • Institute of Quantum Science and Engineering (IQSE), and Department of Physics and Astronomy, Texas A\&M University, College Station, Texas 77843-4242
    • Institute for Quantum Science and Engineering and Department of Physics and Astronomy, Texas A\&M University, College Station, TX 77843-4242, USA
    • Institute for Quantum Science and Engineering (IQSE) and Department of Physics and Astronomy, Texas A\&M University, College Station, Texas 77843, USA