Optical Properties of Permalloy Oxide Grown by reactive RF magnetron sputtering

ORAL

Abstract

Permalloy oxide (PyO) is being studied to be applied in hematite based water splitting cells, shows promise to be applied in resistive random access memory devices, and has shown to increase the performance of spin valve hard disc reading heads. In this research, we investigated the optical properties of PyO thin films grown on quartz and Si/SiO$_{2}$ substrates. A series of different samples was made as a function of the deposition temperature (24$^{\circ}$C-600$^{\circ}$C). The PyO was deposited in an AJA Magnetron System using a gas flow of 10 sccm (20{\%} O2), and 240w RF power. The substrate was rotated at 60rpm during deposition. The optical properties were measured by a Woollam M2000 variable angle spectroscopic ellipsometer at 8 different angles (50$^{\circ}$ $\sim$ 85$^{\circ})$ from 200-1000 nm. The optical properties and the thickness were calculated in two steps. First a single peak Cody-Lorentz model was used to estimate the optical properties. This result was used as a start for a Bspline model to calculate the thickness and optical spectra of PyO. The MSE of the fits are below 4. The spectrum shows peaks around 2.4, 4, and 5 eV. The peaks of the spectra calculated from the thin films on Si/SiO2 are less sharp. The estimated thickness is in agreement with the sputter rate measured by a crystal thickness monitor.

Authors

  • Yubo Cui

    Department of Physics, Texas State University

  • Darren Depoy

    University of Michigan, Univeristy of Michigan, Texas A\&M University, UC Riverside, University of Massachusetts, STScI, NOAO, University of Texas, Cyclotron Institute, Texas A\&M University, ENEA, Italy, INFN, Italy, University of Texas at Austin, TX, Cyclotron Institute, TAMU, TX, Cyclotron Institute TAMU, TX, Cyclotron Institute - Texas A\&M University, Texas A\&M Univ, Texas A\&M University, Baylor University, Department of Physics and Astronomy, Texas A\&M University, College Station, Texas, School of Materials Science and Engineering, Shanghai Jiaotong University, Shanghai, 200240, China, Department of Materials Science and Engineering, Texas A\&M University, College Station, Texas, Department of Mechanical Engineering, Texas A\&M University, College Station, Texas, Texas State University, University of Texas at Arlington, Lawrence Berkeley National Laboratory, DESY, Department of Physics and Astronomy, Texas A\&M University, Department of Physics, Syracuse University, Department of Physics and Astronomy, Vanderbilt University, Texas A\&M University, Princeton University and Baylor University, Texas A\&M Univ at Qatar, Kazan Federal University, Max Planck Institute for Nuclear Physics, Institue for Quantum Science and Engineering (IQSE) and Department of Physics \& Astronomy, Texas A\&M University, College Station, Texas 77843, USA, MIT, Sandia National Laboratories, Albuquerque, New Mexico, Postgrad, ORNL, Muons Inc., Texas Lutheran University, West Virginia University, Lawrence Livermore National Laboratory, University of Kentucky, US Naval Academy, University of Dallas, U.S. Naval Academy, Univ of Texas, Arlington, Department of Physics, Texas A\&M University, College Station, TX 77845, Science and Petroleum Departments, Texas A\&M University in Qatar, Doha, Qatar, Rice University, Houston, Texas, USA, Department of Physics, Texas State University, Florida A\&M University, Texas A\&M University in Qatar, Doha, Qatar, Physics and Astronomy Dept., TCU, Geology Dept., TCU, Colorado College, University of Texas at El Paso, University of Texas at Brownsville, Rochester Institute of Technology, Baylor University, Texas A\&M, Princeton University, Baylor University, Princeton University, Texas A\&M University, Materials Science and Engineering and Department of Physics and Astronomy, Texas A\&M University; WPI-AIMR, Tohoku University, Japan, WPI-AIMR, Tohoku University, Department of Chemistry, Texas A\&M University, Materials Science and Engineering and Department of Physics and Astronomy, Texas A\&M University, WPI-AIMR, Tohoku University, Japan, Department of Physics and Astronomy, Texas A\&M University, College Station, Texas 77843, USA, Department of Physics and Astronomy, Texas A\&M University and WPI-Advanced Institute for Materials Research, Tohoku University, Japan, University of Texas at Austin, Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, JILA, NIST, Department of Physics and Astronomy, Texas A\&M University and Institute for Quantum Studies and Engineering, College Station, TX 77843-4242, USA, Institute of Applied Physics of the Russian Academy of Sciences, 46 Ulyanov street, Nizhny Novgorod 603950, Russia, Department of Physics, University of Texas at Austin, Rice University, Texas A&M University

  • Wilhelmus Geerts

    Department of Physics, Texas State University