Sheet resistance measurements on a Fe-doped NiO ReRAM Test Chip.

ORAL

Abstract

Transition metal oxide, specifically NiO, shows promise in its potential application in Resistive Random Access Memory (ReRAM) devices. In ReRam the resistance of a thin oxide layer is reversible switched via soft breakdown between a low and high resistance state. We investigated the sheet resistance of Fe doped NiO test structures. The ReRAM device wafer consisted of a50 nm thick Ni0.9Fe0.1-oxide film sandwiched between a bottom (20 nm Ti/150 nm Co) and top electrode (2 nm Ti/78nm Co). All devices were made by RF sputtering using an AJA system. 2pp and 4pp resistance measurements were made using an HP4145A semiconductor parameter analyzer (SPA) connected to a wafer prober. The measured sheet resistances were: 1.02E9$+$/-0.20E9 Ohm/square for the oxide, 11.3$+$/-1.51 Ohm/square for the bottom electrode, and 51 Ohm/square for the top electrode. Of particular interest is the behavior of the PyO test structures under probing by the SPA in 4pp mode using current sourcing. Initial attempts to obtain resistance resulted in non-linear measurements of Voltage against current. Upon introducing a hold and delay time to the measurements, linearity of voltage versus current emerged suggesting that the oxide test structures displays characteristics of a capacitance device. We acknowledge financial support from Texas State University (Research Enhancement grant) and from DOD (HBCU/MI grant W911NF-15-1-0394).

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Authors

  • James Shook

    Department of Physics, Texas State University, San Marcos, TX78666

  • Yubo Cui

    Department of Physics, Texas State University, San Marcos, TX78666

  • Md Abdul Ahad Taludker

    Department of Physics, Texas State University, San Marcos, TX78666

  • Tang Xi

    Department of Physics, Texas State University, San Marcos, TX78666

  • Harry A. Atwater

    Institute for Advanced Physics and Mathematics, Zhejiang University of Technology, Baylor University, baylor university, Lanzhou Jiaotong University, Lanzhou University, Trinity University, University of New Hampshire, Los Alamos National Lab, Southwest Research Institute, University of Texas San Antonio, Texas A&M University, Department of Physics, Texas State University, San Marcos, TX78666, None, Southern Illinois University, Carbondale, Illinois 62901, Beijing Computational Science Research Center, Beijing 100094, P.R. China, The State Key Laboratory of Quantum Optics and Quantum Optics Devices, China, COMSATS Institute of Information Technology, Islamabad, Pakistan, Lamar University, NIST, NIST Physical Measurement Laboratory,Thermodynamic Metrology Laboratory, Rice University, University of Texas at Rio Grande Valley, University of Texas at Dallas, Texas Tech University, Department of Physics and Astronomy, Texas A\&M University, Russian Quantum Center, Physics Department, International Laser Center, M.V. Lomonosov Moscow State University, Baylor University, Texas A&M University, Princeton University, Baylor University, Texas A&M University, Florida State University, Univ of Texas, Dallas, University of Texas Rio Grande Valley, University of Houston, Physics and Astronomy, Material Science and Eng,Texas A\&M University. WPI-Advanced Institute for Materials Research, Tohoku University, Sendai, Japan, Physics and Astronomy, Texas A\&M University, Material Science and Eng., Texas A\&M University, Texas Christian University, Utaca College, University of Texas at Arlington, Angelo State University Physics & Geosciences Department, Texas State University, Universidade Federal de Viçosa, Department of Physics, Lamar University, Texas Lutheran University, University of Oklahoma, Texas A&M University, Baylor University, Princeton University, Texas A&M University, Baylor University, Institute for Quantum Science and Engineering (IQSE) and Department of Physics and Astronomy, Texas A&M University, College Station, Texas 77843-4242, Texas A\&M University, Florida A&M University, Texas A&M University, Princeton University, Baylor University, Department of Physics and Astronomy, Texas A&M University, College Station, TX, Texas A&M University and Baylor University, Abilene Christian University, Michigan State University, Argonne National Laboratory, Southern Methodist University, University of Maryland, Baltimore County, Baltimore, MD 21250, Institute for Quantum Science and Engineering, Texas A&M University 4242 TAMU College Station, Texas 77843-4242, The Institute for Quantum Science and Engineering, Texas A&M University, Southern Nazarene University, Texas A&M University, Landau Institute for Theoretical Physics, University of Cologne, Department of Physics, The University of Texas at Dallas, 800 W. Campbell Rd., Richardson, Texas 75080, USA, Department of Chemistry, The University of Texas at Austin, Austin, Texas 78712, USA, $^{1}$Department of Physics and Astronomy, Texas A\&M University, $^{1}$Department of Physics and Astronomy, Texas A\&M University, $^{2}$WPI-AIMR, Tohoku University, Japan, Department of Physics, Austin College, AMRIS/NHMFL, University of Florida, University of Texas Southwestern Medical Center, Mississippi State University, The Methodist Hospital System, Biophotonic Solutions, Inc., University of Texas, Austin, California Insititute of Technology

  • Alex Zakhidov

    Department of Physics, Texas State University, San Marcos, TX78666

  • Luisa Scolfaro

    Department of Physics, Texas State University, San Marcos, TX78666

  • Wilhelmus Geerts

    Department of Physics, Texas State University, San Marcos, TX78666