Raman Microscopic Analysis of Internal Stress in Boron-Doped Diamond

ORAL

Abstract

Boron-doped diamond (BDD) thin films are of interest in neurosurgical applications due to the superior stability of BDD-coated electrodes compared to that of carbon-fiber electrodes. BDD film stability is therefore relevant, as delamination and dislocation of films, which can occur during surgical electrode implantation, negatively impact biosensing by fast-scan cyclic voltammetry. This study investigated induced stress in both undoped and BDD-doped diamond thin films using confocal Raman mapping. In addition to dopant quantity, sample chemical composition and substrate effects were also compared. Electrodes were fabricated by chemical vapor deposition in a custom-built reactor, on cylindrical tungsten substrates. Results of the spectroscopic mapping and stress-analysis revealed a correlation between regions of pure diamond and enhanced stress, while greater boron incorporation coincided with stress release throughout the film. Preferential boron incorporation into the diamond lattice was also observed. Sp2-type carbon impurities may also have contributed to high values of compressive stress.

Authors

  • Emma Sundin

    Department of Physics, University of Texas at El Paso

  • William Stockwell

    Logan High School, University of Tsukuba, Department of Physics, University of Texas at El Paso, El Paso, TX, Division of Engineering, Mayo Clinic, Rochester, MN, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Utah Valley University, University of New Mexico, Brigham Young University, Moxtek, INC, New Mexico State University, Oak Ridge National Laboratory, Oak Ridge TN 37830, USA, Los Alamos National Laboratory, Argonne National Laboratory, Embry-Riddle Aeronautical University, University of Newcastle, University of Sydney, Brigham Young University Provo, Rice University, Perimeter Institute and University of Guelph, University of Reims Champagne-Ardenne, France, Texas A&M University, University of Illinois at Urbana-Champaign, University of Valencia, Spain, None, University of Texas at El Paso, Universidad Simon Bolivar, Universidad Autonoma de Ciudad Juarez, Brigham Young University - Provo, Morgan High School - Morgan, UT, Utah State University, University of Tsukaba, Chemistry Research Center, US Air Force Academy, USAFA, JILA, University of Colorado Boulder, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, El Paso, TX, Department of Orthopedics, Mayo Clinic, Rochester, MN, Colorado State University, National Research Tomsk Polytechnic University \& New Mexico State University,, National Institute of Standards and Technology Center for Neutron Research, Oak Ridge National Laboratory, Huazhong University of Science and Technology, U of Utah, NMSU, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Chemical Science Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA, INM - Leibniz Institute for New Materials, Saarbrucken, Germany, Department of Physics, The University of Texas at El Paso, El Paso, Texas, 7996, UTEP, Arizona State University, The University of Texas at El Paso, none, National Renewable Energy Laboratory, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, Division of Engineering, Mayo Clinic, Department of Neurologic Surgery, Mayo Clinic, Department of Physics & Astronomy, Texas A&M University, Commerce,TX-75428, USA., INFN, Sezione di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy, Texas A&M University Commerce, Commerce, Texas-75429, Department of Physics and Astronomy, Texas A&M University-Commerce, Commerce, Texas 75429, USA, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, USA, Department of Physics, University of Texas at El Paso, University of Delaware, IIT INDORE, UT AUSTIN, Idaho Accelerator Center, Brigham Young University, Physics and Astronomy, Univesidad de Guanajuato, Fermilab, École Polytechnique Fédérale de Lausanne, RadiaSoft, LLC, Weber State University, University of Texas at Dallas, National High Magnetic Field Laboratory, University of Texas Southwestern Medical Center, University of Alabama in Huntsville, Marshall Space Flight Center, NASA, Howard University

  • William Stockwell

    Logan High School, University of Tsukuba, Department of Physics, University of Texas at El Paso, El Paso, TX, Division of Engineering, Mayo Clinic, Rochester, MN, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Utah Valley University, University of New Mexico, Brigham Young University, Moxtek, INC, New Mexico State University, Oak Ridge National Laboratory, Oak Ridge TN 37830, USA, Los Alamos National Laboratory, Argonne National Laboratory, Embry-Riddle Aeronautical University, University of Newcastle, University of Sydney, Brigham Young University Provo, Rice University, Perimeter Institute and University of Guelph, University of Reims Champagne-Ardenne, France, Texas A&M University, University of Illinois at Urbana-Champaign, University of Valencia, Spain, None, University of Texas at El Paso, Universidad Simon Bolivar, Universidad Autonoma de Ciudad Juarez, Brigham Young University - Provo, Morgan High School - Morgan, UT, Utah State University, University of Tsukaba, Chemistry Research Center, US Air Force Academy, USAFA, JILA, University of Colorado Boulder, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, El Paso, TX, Department of Orthopedics, Mayo Clinic, Rochester, MN, Colorado State University, National Research Tomsk Polytechnic University \& New Mexico State University,, National Institute of Standards and Technology Center for Neutron Research, Oak Ridge National Laboratory, Huazhong University of Science and Technology, U of Utah, NMSU, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Chemical Science Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA, INM - Leibniz Institute for New Materials, Saarbrucken, Germany, Department of Physics, The University of Texas at El Paso, El Paso, Texas, 7996, UTEP, Arizona State University, The University of Texas at El Paso, none, National Renewable Energy Laboratory, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, Division of Engineering, Mayo Clinic, Department of Neurologic Surgery, Mayo Clinic, Department of Physics & Astronomy, Texas A&M University, Commerce,TX-75428, USA., INFN, Sezione di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy, Texas A&M University Commerce, Commerce, Texas-75429, Department of Physics and Astronomy, Texas A&M University-Commerce, Commerce, Texas 75429, USA, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, USA, Department of Physics, University of Texas at El Paso, University of Delaware, IIT INDORE, UT AUSTIN, Idaho Accelerator Center, Brigham Young University, Physics and Astronomy, Univesidad de Guanajuato, Fermilab, École Polytechnique Fédérale de Lausanne, RadiaSoft, LLC, Weber State University, University of Texas at Dallas, National High Magnetic Field Laboratory, University of Texas Southwestern Medical Center, University of Alabama in Huntsville, Marshall Space Flight Center, NASA, Howard University

  • William Stockwell

    Logan High School, University of Tsukuba, Department of Physics, University of Texas at El Paso, El Paso, TX, Division of Engineering, Mayo Clinic, Rochester, MN, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Utah Valley University, University of New Mexico, Brigham Young University, Moxtek, INC, New Mexico State University, Oak Ridge National Laboratory, Oak Ridge TN 37830, USA, Los Alamos National Laboratory, Argonne National Laboratory, Embry-Riddle Aeronautical University, University of Newcastle, University of Sydney, Brigham Young University Provo, Rice University, Perimeter Institute and University of Guelph, University of Reims Champagne-Ardenne, France, Texas A&M University, University of Illinois at Urbana-Champaign, University of Valencia, Spain, None, University of Texas at El Paso, Universidad Simon Bolivar, Universidad Autonoma de Ciudad Juarez, Brigham Young University - Provo, Morgan High School - Morgan, UT, Utah State University, University of Tsukaba, Chemistry Research Center, US Air Force Academy, USAFA, JILA, University of Colorado Boulder, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, El Paso, TX, Department of Orthopedics, Mayo Clinic, Rochester, MN, Colorado State University, National Research Tomsk Polytechnic University \& New Mexico State University,, National Institute of Standards and Technology Center for Neutron Research, Oak Ridge National Laboratory, Huazhong University of Science and Technology, U of Utah, NMSU, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Chemical Science Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA, INM - Leibniz Institute for New Materials, Saarbrucken, Germany, Department of Physics, The University of Texas at El Paso, El Paso, Texas, 7996, UTEP, Arizona State University, The University of Texas at El Paso, none, National Renewable Energy Laboratory, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, Division of Engineering, Mayo Clinic, Department of Neurologic Surgery, Mayo Clinic, Department of Physics & Astronomy, Texas A&M University, Commerce,TX-75428, USA., INFN, Sezione di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy, Texas A&M University Commerce, Commerce, Texas-75429, Department of Physics and Astronomy, Texas A&M University-Commerce, Commerce, Texas 75429, USA, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, USA, Department of Physics, University of Texas at El Paso, University of Delaware, IIT INDORE, UT AUSTIN, Idaho Accelerator Center, Brigham Young University, Physics and Astronomy, Univesidad de Guanajuato, Fermilab, École Polytechnique Fédérale de Lausanne, RadiaSoft, LLC, Weber State University, University of Texas at Dallas, National High Magnetic Field Laboratory, University of Texas Southwestern Medical Center, University of Alabama in Huntsville, Marshall Space Flight Center, NASA, Howard University

  • William Stockwell

    Logan High School, University of Tsukuba, Department of Physics, University of Texas at El Paso, El Paso, TX, Division of Engineering, Mayo Clinic, Rochester, MN, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Utah Valley University, University of New Mexico, Brigham Young University, Moxtek, INC, New Mexico State University, Oak Ridge National Laboratory, Oak Ridge TN 37830, USA, Los Alamos National Laboratory, Argonne National Laboratory, Embry-Riddle Aeronautical University, University of Newcastle, University of Sydney, Brigham Young University Provo, Rice University, Perimeter Institute and University of Guelph, University of Reims Champagne-Ardenne, France, Texas A&M University, University of Illinois at Urbana-Champaign, University of Valencia, Spain, None, University of Texas at El Paso, Universidad Simon Bolivar, Universidad Autonoma de Ciudad Juarez, Brigham Young University - Provo, Morgan High School - Morgan, UT, Utah State University, University of Tsukaba, Chemistry Research Center, US Air Force Academy, USAFA, JILA, University of Colorado Boulder, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, El Paso, TX, Department of Orthopedics, Mayo Clinic, Rochester, MN, Colorado State University, National Research Tomsk Polytechnic University \& New Mexico State University,, National Institute of Standards and Technology Center for Neutron Research, Oak Ridge National Laboratory, Huazhong University of Science and Technology, U of Utah, NMSU, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Chemical Science Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA, INM - Leibniz Institute for New Materials, Saarbrucken, Germany, Department of Physics, The University of Texas at El Paso, El Paso, Texas, 7996, UTEP, Arizona State University, The University of Texas at El Paso, none, National Renewable Energy Laboratory, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, Division of Engineering, Mayo Clinic, Department of Neurologic Surgery, Mayo Clinic, Department of Physics & Astronomy, Texas A&M University, Commerce,TX-75428, USA., INFN, Sezione di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy, Texas A&M University Commerce, Commerce, Texas-75429, Department of Physics and Astronomy, Texas A&M University-Commerce, Commerce, Texas 75429, USA, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, USA, Department of Physics, University of Texas at El Paso, University of Delaware, IIT INDORE, UT AUSTIN, Idaho Accelerator Center, Brigham Young University, Physics and Astronomy, Univesidad de Guanajuato, Fermilab, École Polytechnique Fédérale de Lausanne, RadiaSoft, LLC, Weber State University, University of Texas at Dallas, National High Magnetic Field Laboratory, University of Texas Southwestern Medical Center, University of Alabama in Huntsville, Marshall Space Flight Center, NASA, Howard University

  • Felicia Manciu

    Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, El Paso, TX, Department of Physics, Border Biomedical Research Center, The University of Texas at El Paso, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso