Metallic substrates for improved electroplating of carbon nanotube structures

ORAL

Abstract

Metal electroplating of carbon nanotube (CNT) forests is a possible method for metal MEMS fabrication. Recent work has demonstrated that electroplating an interconnected carbon nanotube structure is possible through direct electrical contact to the CNT structure. However, this is not ideal as in many MEMS designs, features need to be both electrically and mechanically isolated from each other. Our current efforts have been directed toward electroplating CNT patterns through indirect electrical contact. Where indirect contact means electrical contacting to the CNT's through a patterned metallic lead that sits between the substrate and the grown CNT forests. As the CNT forest catalysts layer involves an alumina diffusion barrier and the iron catalyst layer, this is not as simple as it sounds. We will report on the current status and recent results of establishing an electric signal from the metallic leads through to the carbon nanotubes.

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Authors

  • Berg Dodson

    Brigham Young University

  • William Stockwell

    Logan High School, University of Tsukuba, Department of Physics, University of Texas at El Paso, El Paso, TX, Division of Engineering, Mayo Clinic, Rochester, MN, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Utah Valley University, University of New Mexico, Brigham Young University, Moxtek, INC, New Mexico State University, Oak Ridge National Laboratory, Oak Ridge TN 37830, USA, Los Alamos National Laboratory, Argonne National Laboratory, Embry-Riddle Aeronautical University, University of Newcastle, University of Sydney, Brigham Young University Provo, Rice University, Perimeter Institute and University of Guelph, University of Reims Champagne-Ardenne, France, Texas A&M University, University of Illinois at Urbana-Champaign, University of Valencia, Spain, None, University of Texas at El Paso, Universidad Simon Bolivar, Universidad Autonoma de Ciudad Juarez, Brigham Young University - Provo, Morgan High School - Morgan, UT, Utah State University, University of Tsukaba, Chemistry Research Center, US Air Force Academy, USAFA, JILA, University of Colorado Boulder, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, El Paso, TX, Department of Orthopedics, Mayo Clinic, Rochester, MN, Colorado State University, National Research Tomsk Polytechnic University \& New Mexico State University,, National Institute of Standards and Technology Center for Neutron Research, Oak Ridge National Laboratory, Huazhong University of Science and Technology, U of Utah, NMSU, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Chemical Science Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA, INM - Leibniz Institute for New Materials, Saarbrucken, Germany, Department of Physics, The University of Texas at El Paso, El Paso, Texas, 7996, UTEP, Arizona State University, The University of Texas at El Paso, none, National Renewable Energy Laboratory, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, Division of Engineering, Mayo Clinic, Department of Neurologic Surgery, Mayo Clinic, Department of Physics & Astronomy, Texas A&M University, Commerce,TX-75428, USA., INFN, Sezione di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy, Texas A&M University Commerce, Commerce, Texas-75429, Department of Physics and Astronomy, Texas A&M University-Commerce, Commerce, Texas 75429, USA, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, USA, Department of Physics, University of Texas at El Paso, University of Delaware, IIT INDORE, UT AUSTIN, Idaho Accelerator Center, Brigham Young University, Physics and Astronomy, Univesidad de Guanajuato, Fermilab, École Polytechnique Fédérale de Lausanne, RadiaSoft, LLC, Weber State University, University of Texas at Dallas, National High Magnetic Field Laboratory, University of Texas Southwestern Medical Center, University of Alabama in Huntsville, Marshall Space Flight Center, NASA, Howard University

  • William Stockwell

    Logan High School, University of Tsukuba, Department of Physics, University of Texas at El Paso, El Paso, TX, Division of Engineering, Mayo Clinic, Rochester, MN, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Utah Valley University, University of New Mexico, Brigham Young University, Moxtek, INC, New Mexico State University, Oak Ridge National Laboratory, Oak Ridge TN 37830, USA, Los Alamos National Laboratory, Argonne National Laboratory, Embry-Riddle Aeronautical University, University of Newcastle, University of Sydney, Brigham Young University Provo, Rice University, Perimeter Institute and University of Guelph, University of Reims Champagne-Ardenne, France, Texas A&M University, University of Illinois at Urbana-Champaign, University of Valencia, Spain, None, University of Texas at El Paso, Universidad Simon Bolivar, Universidad Autonoma de Ciudad Juarez, Brigham Young University - Provo, Morgan High School - Morgan, UT, Utah State University, University of Tsukaba, Chemistry Research Center, US Air Force Academy, USAFA, JILA, University of Colorado Boulder, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, El Paso, TX, Department of Orthopedics, Mayo Clinic, Rochester, MN, Colorado State University, National Research Tomsk Polytechnic University \& New Mexico State University,, National Institute of Standards and Technology Center for Neutron Research, Oak Ridge National Laboratory, Huazhong University of Science and Technology, U of Utah, NMSU, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Chemical Science Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA, INM - Leibniz Institute for New Materials, Saarbrucken, Germany, Department of Physics, The University of Texas at El Paso, El Paso, Texas, 7996, UTEP, Arizona State University, The University of Texas at El Paso, none, National Renewable Energy Laboratory, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, Division of Engineering, Mayo Clinic, Department of Neurologic Surgery, Mayo Clinic, Department of Physics & Astronomy, Texas A&M University, Commerce,TX-75428, USA., INFN, Sezione di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy, Texas A&M University Commerce, Commerce, Texas-75429, Department of Physics and Astronomy, Texas A&M University-Commerce, Commerce, Texas 75429, USA, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, USA, Department of Physics, University of Texas at El Paso, University of Delaware, IIT INDORE, UT AUSTIN, Idaho Accelerator Center, Brigham Young University, Physics and Astronomy, Univesidad de Guanajuato, Fermilab, École Polytechnique Fédérale de Lausanne, RadiaSoft, LLC, Weber State University, University of Texas at Dallas, National High Magnetic Field Laboratory, University of Texas Southwestern Medical Center, University of Alabama in Huntsville, Marshall Space Flight Center, NASA, Howard University

  • William Stockwell

    Logan High School, University of Tsukuba, Department of Physics, University of Texas at El Paso, El Paso, TX, Division of Engineering, Mayo Clinic, Rochester, MN, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Utah Valley University, University of New Mexico, Brigham Young University, Moxtek, INC, New Mexico State University, Oak Ridge National Laboratory, Oak Ridge TN 37830, USA, Los Alamos National Laboratory, Argonne National Laboratory, Embry-Riddle Aeronautical University, University of Newcastle, University of Sydney, Brigham Young University Provo, Rice University, Perimeter Institute and University of Guelph, University of Reims Champagne-Ardenne, France, Texas A&M University, University of Illinois at Urbana-Champaign, University of Valencia, Spain, None, University of Texas at El Paso, Universidad Simon Bolivar, Universidad Autonoma de Ciudad Juarez, Brigham Young University - Provo, Morgan High School - Morgan, UT, Utah State University, University of Tsukaba, Chemistry Research Center, US Air Force Academy, USAFA, JILA, University of Colorado Boulder, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, El Paso, TX, Department of Orthopedics, Mayo Clinic, Rochester, MN, Colorado State University, National Research Tomsk Polytechnic University \& New Mexico State University,, National Institute of Standards and Technology Center for Neutron Research, Oak Ridge National Laboratory, Huazhong University of Science and Technology, U of Utah, NMSU, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Chemical Science Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA, INM - Leibniz Institute for New Materials, Saarbrucken, Germany, Department of Physics, The University of Texas at El Paso, El Paso, Texas, 7996, UTEP, Arizona State University, The University of Texas at El Paso, none, National Renewable Energy Laboratory, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, Division of Engineering, Mayo Clinic, Department of Neurologic Surgery, Mayo Clinic, Department of Physics & Astronomy, Texas A&M University, Commerce,TX-75428, USA., INFN, Sezione di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy, Texas A&M University Commerce, Commerce, Texas-75429, Department of Physics and Astronomy, Texas A&M University-Commerce, Commerce, Texas 75429, USA, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, USA, Department of Physics, University of Texas at El Paso, University of Delaware, IIT INDORE, UT AUSTIN, Idaho Accelerator Center, Brigham Young University, Physics and Astronomy, Univesidad de Guanajuato, Fermilab, École Polytechnique Fédérale de Lausanne, RadiaSoft, LLC, Weber State University, University of Texas at Dallas, National High Magnetic Field Laboratory, University of Texas Southwestern Medical Center, University of Alabama in Huntsville, Marshall Space Flight Center, NASA, Howard University

  • William Stockwell

    Logan High School, University of Tsukuba, Department of Physics, University of Texas at El Paso, El Paso, TX, Division of Engineering, Mayo Clinic, Rochester, MN, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Utah Valley University, University of New Mexico, Brigham Young University, Moxtek, INC, New Mexico State University, Oak Ridge National Laboratory, Oak Ridge TN 37830, USA, Los Alamos National Laboratory, Argonne National Laboratory, Embry-Riddle Aeronautical University, University of Newcastle, University of Sydney, Brigham Young University Provo, Rice University, Perimeter Institute and University of Guelph, University of Reims Champagne-Ardenne, France, Texas A&M University, University of Illinois at Urbana-Champaign, University of Valencia, Spain, None, University of Texas at El Paso, Universidad Simon Bolivar, Universidad Autonoma de Ciudad Juarez, Brigham Young University - Provo, Morgan High School - Morgan, UT, Utah State University, University of Tsukaba, Chemistry Research Center, US Air Force Academy, USAFA, JILA, University of Colorado Boulder, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, El Paso, TX, Department of Orthopedics, Mayo Clinic, Rochester, MN, Colorado State University, National Research Tomsk Polytechnic University \& New Mexico State University,, National Institute of Standards and Technology Center for Neutron Research, Oak Ridge National Laboratory, Huazhong University of Science and Technology, U of Utah, NMSU, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Chemical Science Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA, INM - Leibniz Institute for New Materials, Saarbrucken, Germany, Department of Physics, The University of Texas at El Paso, El Paso, Texas, 7996, UTEP, Arizona State University, The University of Texas at El Paso, none, National Renewable Energy Laboratory, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, Division of Engineering, Mayo Clinic, Department of Neurologic Surgery, Mayo Clinic, Department of Physics & Astronomy, Texas A&M University, Commerce,TX-75428, USA., INFN, Sezione di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy, Texas A&M University Commerce, Commerce, Texas-75429, Department of Physics and Astronomy, Texas A&M University-Commerce, Commerce, Texas 75429, USA, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, USA, Department of Physics, University of Texas at El Paso, University of Delaware, IIT INDORE, UT AUSTIN, Idaho Accelerator Center, Brigham Young University, Physics and Astronomy, Univesidad de Guanajuato, Fermilab, École Polytechnique Fédérale de Lausanne, RadiaSoft, LLC, Weber State University, University of Texas at Dallas, National High Magnetic Field Laboratory, University of Texas Southwestern Medical Center, University of Alabama in Huntsville, Marshall Space Flight Center, NASA, Howard University

  • William Stockwell

    Logan High School, University of Tsukuba, Department of Physics, University of Texas at El Paso, El Paso, TX, Division of Engineering, Mayo Clinic, Rochester, MN, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Utah Valley University, University of New Mexico, Brigham Young University, Moxtek, INC, New Mexico State University, Oak Ridge National Laboratory, Oak Ridge TN 37830, USA, Los Alamos National Laboratory, Argonne National Laboratory, Embry-Riddle Aeronautical University, University of Newcastle, University of Sydney, Brigham Young University Provo, Rice University, Perimeter Institute and University of Guelph, University of Reims Champagne-Ardenne, France, Texas A&M University, University of Illinois at Urbana-Champaign, University of Valencia, Spain, None, University of Texas at El Paso, Universidad Simon Bolivar, Universidad Autonoma de Ciudad Juarez, Brigham Young University - Provo, Morgan High School - Morgan, UT, Utah State University, University of Tsukaba, Chemistry Research Center, US Air Force Academy, USAFA, JILA, University of Colorado Boulder, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, El Paso, TX, Department of Orthopedics, Mayo Clinic, Rochester, MN, Colorado State University, National Research Tomsk Polytechnic University \& New Mexico State University,, National Institute of Standards and Technology Center for Neutron Research, Oak Ridge National Laboratory, Huazhong University of Science and Technology, U of Utah, NMSU, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Rochester, MN, Chemical Science Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA, INM - Leibniz Institute for New Materials, Saarbrucken, Germany, Department of Physics, The University of Texas at El Paso, El Paso, Texas, 7996, UTEP, Arizona State University, The University of Texas at El Paso, none, National Renewable Energy Laboratory, Division of Engineering, Department of Neurologic Surgery, Mayo Clinic, Department of Physics, Border Biomedical Research Center, University of Texas at El Paso, Division of Engineering, Mayo Clinic, Department of Neurologic Surgery, Mayo Clinic, Department of Physics & Astronomy, Texas A&M University, Commerce,TX-75428, USA., INFN, Sezione di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy, Texas A&M University Commerce, Commerce, Texas-75429, Department of Physics and Astronomy, Texas A&M University-Commerce, Commerce, Texas 75429, USA, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, USA, Department of Physics, University of Texas at El Paso, University of Delaware, IIT INDORE, UT AUSTIN, Idaho Accelerator Center, Brigham Young University, Physics and Astronomy, Univesidad de Guanajuato, Fermilab, École Polytechnique Fédérale de Lausanne, RadiaSoft, LLC, Weber State University, University of Texas at Dallas, National High Magnetic Field Laboratory, University of Texas Southwestern Medical Center, University of Alabama in Huntsville, Marshall Space Flight Center, NASA, Howard University