Hexagonal boron nitride particles for determining the thermal conductivity of diamond films based on near-ultraviolet micro-Raman mapping

ORAL

Abstract

Studies are reported of the thermal conductivity ($\kappa )$ for a suspended \textasciitilde 1 \textmu m thick diamond membrane. Near-ultraviolet micro-Raman spectroscopy is used to map the temperature rise produced in the diamond by a micro-fabricated heater and in hexagonal boron nitride micro/ nano-particles which are dispersed on the surface as local temperature sensors independent of thermal stress in the diamond. Thermal conductivity is determined analytically from Raman temperature rise and also by fitting data via simulation, using a Monte Carlo optimization approach. The low value obtained for $\kappa $, ${78.4}_{-5.1}^{+8.6}$~~W m$^{\mathrm{-1\thinspace }}$K$^{\mathrm{-1}}$, is attributed to the nanocrystalline diamond grain structure as analyzed by transmission electron microscopy (TEM). TEM identifies a disordered silicon-carbon interfacial layer \textasciitilde 2 nm thick which is expected to affect the diamond/silicon thermal boundary resistance.

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Authors

  • Brian Squires

    Texas State Univ-San Marcos

  • Qiye Zheng

    Santa Fe Institute, Baylor University, University of Texas at Dallas, Department of Chemistry, The University of Texas at Austin, Jozef Stefan Institute, Texas A&M University-Commerce, Commerce, Texas 75429, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, Texas A&M University, Department of Physics, Texas State University, Department of Physics, Baylor University, University of Texas at El Paso, Univ of Texas, El Paso, University of Science and Technology of China, The University of Texas at Dallas, Faculty, None, Southwestern University, Texas State University, Texas A&M University - Commerce, UT Southwestern Medical Center, National High Magnetic Field Laboratory, The Cyclotron Institute at Texas A&M University, Department of Biological Sciences, Texas State Univ-San Marcos, The University of Texas at Dallas, Richardson, Texas 75080, King Abdullah University of Science and Technology, Univ of Texas, Dallas, N.Chiao Tung U., UT Dallas, Inorganic Chemistry and Catalysis Group, Utrecht University, Electrical & Computer Engineering, Baylor University, Department of Materials Science and NanoEngineering, Rice University, University of Texas at Arlington, University of Chicago, The University of Mississippi, Astronomical Observatory, Warsaw University, Nicolaus Copernicus Astronomical Centre, Polish Academy of Sciences, Rochester Institute of Technology, California Institute of Technology, University of Houston, NASA-GSFC and UMBC, MD, Virginia Tech, VA, Texas Christian University, The University of Texas at San Antonio, Department of Physics, Teivecca Nazarene University, Weatherford College, Air Force Research Laboratory, Sensors Directorate, WPAFB, OH, USA, Air Force Research Laboratory, Directed Energy Directorate, KAFB, NM, US, Department of Physics & Astronomy, University of Texas at San Antonio TX, USA, University of Arizona, University of North Carolina at Chapel Hill, Stanford University, Harvard Center for Astrophysics, Texas A\&M University, UTSW, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, Boston College, Chestnut Hill, Massachusetts 02467, Naval Research Laboratory, Washington, D.C. 20375

  • Qiye Zheng

    Santa Fe Institute, Baylor University, University of Texas at Dallas, Department of Chemistry, The University of Texas at Austin, Jozef Stefan Institute, Texas A&M University-Commerce, Commerce, Texas 75429, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, Texas A&M University, Department of Physics, Texas State University, Department of Physics, Baylor University, University of Texas at El Paso, Univ of Texas, El Paso, University of Science and Technology of China, The University of Texas at Dallas, Faculty, None, Southwestern University, Texas State University, Texas A&M University - Commerce, UT Southwestern Medical Center, National High Magnetic Field Laboratory, The Cyclotron Institute at Texas A&M University, Department of Biological Sciences, Texas State Univ-San Marcos, The University of Texas at Dallas, Richardson, Texas 75080, King Abdullah University of Science and Technology, Univ of Texas, Dallas, N.Chiao Tung U., UT Dallas, Inorganic Chemistry and Catalysis Group, Utrecht University, Electrical & Computer Engineering, Baylor University, Department of Materials Science and NanoEngineering, Rice University, University of Texas at Arlington, University of Chicago, The University of Mississippi, Astronomical Observatory, Warsaw University, Nicolaus Copernicus Astronomical Centre, Polish Academy of Sciences, Rochester Institute of Technology, California Institute of Technology, University of Houston, NASA-GSFC and UMBC, MD, Virginia Tech, VA, Texas Christian University, The University of Texas at San Antonio, Department of Physics, Teivecca Nazarene University, Weatherford College, Air Force Research Laboratory, Sensors Directorate, WPAFB, OH, USA, Air Force Research Laboratory, Directed Energy Directorate, KAFB, NM, US, Department of Physics & Astronomy, University of Texas at San Antonio TX, USA, University of Arizona, University of North Carolina at Chapel Hill, Stanford University, Harvard Center for Astrophysics, Texas A\&M University, UTSW, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, Boston College, Chestnut Hill, Massachusetts 02467, Naval Research Laboratory, Washington, D.C. 20375

  • Qiye Zheng

    Santa Fe Institute, Baylor University, University of Texas at Dallas, Department of Chemistry, The University of Texas at Austin, Jozef Stefan Institute, Texas A&M University-Commerce, Commerce, Texas 75429, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, Texas A&M University, Department of Physics, Texas State University, Department of Physics, Baylor University, University of Texas at El Paso, Univ of Texas, El Paso, University of Science and Technology of China, The University of Texas at Dallas, Faculty, None, Southwestern University, Texas State University, Texas A&M University - Commerce, UT Southwestern Medical Center, National High Magnetic Field Laboratory, The Cyclotron Institute at Texas A&M University, Department of Biological Sciences, Texas State Univ-San Marcos, The University of Texas at Dallas, Richardson, Texas 75080, King Abdullah University of Science and Technology, Univ of Texas, Dallas, N.Chiao Tung U., UT Dallas, Inorganic Chemistry and Catalysis Group, Utrecht University, Electrical & Computer Engineering, Baylor University, Department of Materials Science and NanoEngineering, Rice University, University of Texas at Arlington, University of Chicago, The University of Mississippi, Astronomical Observatory, Warsaw University, Nicolaus Copernicus Astronomical Centre, Polish Academy of Sciences, Rochester Institute of Technology, California Institute of Technology, University of Houston, NASA-GSFC and UMBC, MD, Virginia Tech, VA, Texas Christian University, The University of Texas at San Antonio, Department of Physics, Teivecca Nazarene University, Weatherford College, Air Force Research Laboratory, Sensors Directorate, WPAFB, OH, USA, Air Force Research Laboratory, Directed Energy Directorate, KAFB, NM, US, Department of Physics & Astronomy, University of Texas at San Antonio TX, USA, University of Arizona, University of North Carolina at Chapel Hill, Stanford University, Harvard Center for Astrophysics, Texas A\&M University, UTSW, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, Boston College, Chestnut Hill, Massachusetts 02467, Naval Research Laboratory, Washington, D.C. 20375

  • Qiye Zheng

    Santa Fe Institute, Baylor University, University of Texas at Dallas, Department of Chemistry, The University of Texas at Austin, Jozef Stefan Institute, Texas A&M University-Commerce, Commerce, Texas 75429, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, Texas A&M University, Department of Physics, Texas State University, Department of Physics, Baylor University, University of Texas at El Paso, Univ of Texas, El Paso, University of Science and Technology of China, The University of Texas at Dallas, Faculty, None, Southwestern University, Texas State University, Texas A&M University - Commerce, UT Southwestern Medical Center, National High Magnetic Field Laboratory, The Cyclotron Institute at Texas A&M University, Department of Biological Sciences, Texas State Univ-San Marcos, The University of Texas at Dallas, Richardson, Texas 75080, King Abdullah University of Science and Technology, Univ of Texas, Dallas, N.Chiao Tung U., UT Dallas, Inorganic Chemistry and Catalysis Group, Utrecht University, Electrical & Computer Engineering, Baylor University, Department of Materials Science and NanoEngineering, Rice University, University of Texas at Arlington, University of Chicago, The University of Mississippi, Astronomical Observatory, Warsaw University, Nicolaus Copernicus Astronomical Centre, Polish Academy of Sciences, Rochester Institute of Technology, California Institute of Technology, University of Houston, NASA-GSFC and UMBC, MD, Virginia Tech, VA, Texas Christian University, The University of Texas at San Antonio, Department of Physics, Teivecca Nazarene University, Weatherford College, Air Force Research Laboratory, Sensors Directorate, WPAFB, OH, USA, Air Force Research Laboratory, Directed Energy Directorate, KAFB, NM, US, Department of Physics & Astronomy, University of Texas at San Antonio TX, USA, University of Arizona, University of North Carolina at Chapel Hill, Stanford University, Harvard Center for Astrophysics, Texas A\&M University, UTSW, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, Boston College, Chestnut Hill, Massachusetts 02467, Naval Research Laboratory, Washington, D.C. 20375

  • Mark Holtz

    Texas State Univ-San Marcos