Electrical Characterization of Thin Films

POSTER

Abstract

NiO samples are being investigated for possible application in Resistive RAM devices (RRAM). RRAM is non-volatile memory technology that is currently being considered to replace Flash memory beyond the 14 nm technology node. The material that is being studied are RF sputtered NiO$_{\mathrm{\thinspace }}$thin films made by reactive sputtering. We also measured resistivity of Al and Pt films and devices. The samples were characterized through four different methods; 2-point probe (2pp), linear 4-point probe (4pp), the Van der Pauw method (VDP) techniques, and by direct measurement on manufactured devices. We acquired measurements using a Keithley 2182A nanovoltmeter, a Keithley 6514 system electrometer, a Keithley 6221 DC and AC current source, and a Keithley 7001 switching system furnished with a Hall card all controlled by a labview program. Some samples were measured at both 298K and 77K by use of a cryostat. The resistivity parallel to the surface has semiconductor-like properties. Measurements were done as a function of the oxygen pressure during deposition. For 60 nm thickness, it was unveiled that the resistivity varied with the oxygen concentration in the sputter gas showing a maximum for 10 percent Oxygen and an average resistivity of 2.47E$+$6 ohms.

Authors

  • Chandler Hutton

    Texas State Univ-San Marcos

  • Qiye Zheng

    Santa Fe Institute, Baylor University, University of Texas at Dallas, Department of Chemistry, The University of Texas at Austin, Jozef Stefan Institute, Texas A&M University-Commerce, Commerce, Texas 75429, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, Texas A&M University, Department of Physics, Texas State University, Department of Physics, Baylor University, University of Texas at El Paso, Univ of Texas, El Paso, University of Science and Technology of China, The University of Texas at Dallas, Faculty, None, Southwestern University, Texas State University, Texas A&M University - Commerce, UT Southwestern Medical Center, National High Magnetic Field Laboratory, The Cyclotron Institute at Texas A&M University, Department of Biological Sciences, Texas State Univ-San Marcos, The University of Texas at Dallas, Richardson, Texas 75080, King Abdullah University of Science and Technology, Univ of Texas, Dallas, N.Chiao Tung U., UT Dallas, Inorganic Chemistry and Catalysis Group, Utrecht University, Electrical & Computer Engineering, Baylor University, Department of Materials Science and NanoEngineering, Rice University, University of Texas at Arlington, University of Chicago, The University of Mississippi, Astronomical Observatory, Warsaw University, Nicolaus Copernicus Astronomical Centre, Polish Academy of Sciences, Rochester Institute of Technology, California Institute of Technology, University of Houston, NASA-GSFC and UMBC, MD, Virginia Tech, VA, Texas Christian University, The University of Texas at San Antonio, Department of Physics, Teivecca Nazarene University, Weatherford College, Air Force Research Laboratory, Sensors Directorate, WPAFB, OH, USA, Air Force Research Laboratory, Directed Energy Directorate, KAFB, NM, US, Department of Physics & Astronomy, University of Texas at San Antonio TX, USA, University of Arizona, University of North Carolina at Chapel Hill, Stanford University, Harvard Center for Astrophysics, Texas A\&M University, UTSW, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, Boston College, Chestnut Hill, Massachusetts 02467, Naval Research Laboratory, Washington, D.C. 20375

  • Qiye Zheng

    Santa Fe Institute, Baylor University, University of Texas at Dallas, Department of Chemistry, The University of Texas at Austin, Jozef Stefan Institute, Texas A&M University-Commerce, Commerce, Texas 75429, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, Texas A&M University, Department of Physics, Texas State University, Department of Physics, Baylor University, University of Texas at El Paso, Univ of Texas, El Paso, University of Science and Technology of China, The University of Texas at Dallas, Faculty, None, Southwestern University, Texas State University, Texas A&M University - Commerce, UT Southwestern Medical Center, National High Magnetic Field Laboratory, The Cyclotron Institute at Texas A&M University, Department of Biological Sciences, Texas State Univ-San Marcos, The University of Texas at Dallas, Richardson, Texas 75080, King Abdullah University of Science and Technology, Univ of Texas, Dallas, N.Chiao Tung U., UT Dallas, Inorganic Chemistry and Catalysis Group, Utrecht University, Electrical & Computer Engineering, Baylor University, Department of Materials Science and NanoEngineering, Rice University, University of Texas at Arlington, University of Chicago, The University of Mississippi, Astronomical Observatory, Warsaw University, Nicolaus Copernicus Astronomical Centre, Polish Academy of Sciences, Rochester Institute of Technology, California Institute of Technology, University of Houston, NASA-GSFC and UMBC, MD, Virginia Tech, VA, Texas Christian University, The University of Texas at San Antonio, Department of Physics, Teivecca Nazarene University, Weatherford College, Air Force Research Laboratory, Sensors Directorate, WPAFB, OH, USA, Air Force Research Laboratory, Directed Energy Directorate, KAFB, NM, US, Department of Physics & Astronomy, University of Texas at San Antonio TX, USA, University of Arizona, University of North Carolina at Chapel Hill, Stanford University, Harvard Center for Astrophysics, Texas A\&M University, UTSW, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, Boston College, Chestnut Hill, Massachusetts 02467, Naval Research Laboratory, Washington, D.C. 20375

  • Qiye Zheng

    Santa Fe Institute, Baylor University, University of Texas at Dallas, Department of Chemistry, The University of Texas at Austin, Jozef Stefan Institute, Texas A&M University-Commerce, Commerce, Texas 75429, Cyclotron Institute, Texas A&M University, College Station, Texas 77843, Texas A&M University, Department of Physics, Texas State University, Department of Physics, Baylor University, University of Texas at El Paso, Univ of Texas, El Paso, University of Science and Technology of China, The University of Texas at Dallas, Faculty, None, Southwestern University, Texas State University, Texas A&M University - Commerce, UT Southwestern Medical Center, National High Magnetic Field Laboratory, The Cyclotron Institute at Texas A&M University, Department of Biological Sciences, Texas State Univ-San Marcos, The University of Texas at Dallas, Richardson, Texas 75080, King Abdullah University of Science and Technology, Univ of Texas, Dallas, N.Chiao Tung U., UT Dallas, Inorganic Chemistry and Catalysis Group, Utrecht University, Electrical & Computer Engineering, Baylor University, Department of Materials Science and NanoEngineering, Rice University, University of Texas at Arlington, University of Chicago, The University of Mississippi, Astronomical Observatory, Warsaw University, Nicolaus Copernicus Astronomical Centre, Polish Academy of Sciences, Rochester Institute of Technology, California Institute of Technology, University of Houston, NASA-GSFC and UMBC, MD, Virginia Tech, VA, Texas Christian University, The University of Texas at San Antonio, Department of Physics, Teivecca Nazarene University, Weatherford College, Air Force Research Laboratory, Sensors Directorate, WPAFB, OH, USA, Air Force Research Laboratory, Directed Energy Directorate, KAFB, NM, US, Department of Physics & Astronomy, University of Texas at San Antonio TX, USA, University of Arizona, University of North Carolina at Chapel Hill, Stanford University, Harvard Center for Astrophysics, Texas A\&M University, UTSW, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, Boston College, Chestnut Hill, Massachusetts 02467, Naval Research Laboratory, Washington, D.C. 20375