Crystal grain orientation and characterization mapping in CVD diamond using polarized micro-Raman spectroscopy.

Raman spectroscopy is well-established method of characterizing samples. Polarized Raman methods have been previously shown to be effective in determining the crystal orientation of a point on a specific grain within a polycrystalline silicon sample. We combine line focus micro Raman and an addressable polarization laser light source to establish an orientation mapping capability. Our technique interrogates a region of the sample and returns grain size, frequency, crystal orientation, and geographic information allowing a 2d map of the interrogated area. Parallel processing techniques are used to perform symbolic logic computations, the necessary numerical integrations, and intensity-polarization angle curve fits as well as outlier-cosmic ray filtering for effective Raman scanning at relatively low intensities and integration times.